Photonic crystals, periodic structure with a high refractive index contrast modulation, have recently become very interesting platform for the manipulation of light. The existence of a photonic bandgap, a frequency range in which the propagation of light is prevented in all directions, makes photonic crystal very useful in application where the spatial localization of light is required, for example waveguide, beam splitter, and cavity. However, the fabrication of 3 dimensional photonic crystals is still difficult process. A concept that has recently attracted a lot of attention is a planar photonic crystal based on a dielectric membrane, suspended in the air and perforated with two dimensional lattice of hole. The fabrication of Si master with pillar structure using hot embossing process is investigated for two dimensional, low-index-contrast photonic crystal waveguide. From our research we show that the multiple stamp copy process proved to be feasible and useful.

There is a strong demand fur the contactless transportation device fur a hard disk and silicon wafer without contaminating and damaging them. To fulfill this requirements, A transportation device fur them has been proposed. But the device needs many of costly displacement sensors positioned along the transportation interval and possesses a very complicated controller and driving scheme. To overcome those kinds of drawback, in this paper, we present a very simple and cost-effective transportation device which only consists of a linear guide, very simple electrostatic suspension system and driving circuit of stepping motor. The principle of stable suspension by relay feedback control, derivation of lateral restoring force, the design of transportation system are described, fellowed by the experimental system. Experimental results show that a 3.5-inch hard disk has been transported with a speed of approximately 20mm/s while being suspended stably at a gap of 0.25mm.

This paper presents an ultra precision machining system using a high sensitive force sensing module to measure machining forces and penetration displacement in a tip-based nanopatterning. The force sensing module utilizes a leaf spring mechanism and a capacitive displacement sensor and it has been designed to provide a measuring range from 80 ${\mu}N$ to 8 N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by X-Y scanning motion stage with 5 nm resolution. In nano indentation experiments and patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned samples were measured by AFM. Experimental results demonstrated that the developed system can be used as an effective device in nano indentation and nanopatterning operation.

This paper describes a robust control scheme for high-speed and long stroke scanning motion of high precision linear motor system consisting of linear motor, air bearing guide and position measurement system using heterodyne interferometer. Nowadays, semiconductor process and inspection of wafer or LCD need high speed and long travel length for their high throughput and extremely small velocity fluctuations or tracking errors. In order to satisfy these conditions, linear motor system are widely used because they have large thrust force and do not need motion conversion mechanisms such as ball screw, rack & pinion or capstan with which the system are burdened. However linear motors have a problem called force ripple. Force ripple deteriorates the tracking performances and makes periodic position errors. So, force ripple must be compensated. To maximize the tracking performance of linear motor system, we propose the control scheme which is composed of a robust control method, Time Delay Controller (TDC) and a feedforward control method, Zero Phase Error Tracking Control (ZPETC) for accurate tracking a given trajectory and an adaptive force ripple compensation (AFC) algorithm fur estimating and compensating force ripple. The adaptive ripple compensation is continuously refined on the basis of tracking error. Computer simulation results based on modeled parameters verify the effectiveness of the proposed control scheme for high-speed, long stroke and high precision scanning motion and show that the proposed control scheme can achieve a sup error tracking performance in comparison to conventional TDC control.

This paper presents an efficient method of extracting line segments from the occupancy grids in a grid map. The grid map is composed of 2-D grids that have both the occupancy and orientation probabilities using sonar sensors. We evaluate the orientation information of every grid when the occupancy probability of the grid is updated from sonar range data. To find the shape of an object in the map from orientation information, the orientations are clustered into several groups according to their values. The line segments are, then, extracted from the clusters based on Hough transform. Finally, a feature-based map is built with these line segments. The proposed method is illustrated with the results produced by sets of experiments in an indoor environment.

It is known that natural awakening of us in the morning is due to stimulation of the reticular activation system through biological clock in the suprachiasmatic nucleus of hypothalamus by the morning sunlight. If we sleep at dark rooms without windows and so without morning sunlight, thus, it is not easy fur us to get up refreshingly in the morning. In this paper, we propose an automatic sunrise household lighting system that helps us fer getting up cheerfully in the morning even if we sleep in dark rooms without morning sunlight. The proposed lighting system is an embedded system that turns automatically on the electric lamp and makes it brighter and brighter coincidently with the actual sunrise. The proposed system is composed of a PIC microcontroller with flash memory, a real-time clock IC, a D/A converter, an amplifier, a dimmer unit, a light bulb, a display panel and a keyboard. The validity of the proposed intelligent lighting system is demonstrated via a prototype production and experimentation.

This paper is about the development of Automatic FPC(flexible printed circuit) punching instrument for the improvement of working condition and cost saving. FPC is used to detect the contact position of keyboard and button like a cellular phone. Depending on the quality of the printed ink and position of reference punching point to the FPC, the resistance and current are varied to the malfunctioning values. The size of reference punching point is 2mm and the above. Because the punching operation is done manually, The punching accuracy is varied with operator's condition. Recently, The punching accuracy has deteriorated severely to the 2mm punching reference hall so that assembly of the K/B has hardly done. To improve this manual punching operation to the FPC, automatic FPC punching system is introduced. Precise mechanical parts like a 5-step stepping motor and ball screw mechanism are designed and tested and low cost PC camera is used fur the sake of cost down instead of using high quality vision systems for the factory automation. Test algorithms and programs showed good results to the designed automatic punching system and led to the increasement of productivity and huge cost down to law material like FPC by avoiding bad quality.

In microcellular injection molding, gas supply system is needed. But, that device is very expensive to attach to the injection molding machines. So, new method is needed and gas-pellets MCPs is one of the solutions. In gas-pellets MCPs, there will be strange characteristics. In this paper, some characteristics are described on the view point of saturation pressure and saturation time.

In this work, computer-aided process design is carried out to develop an optimal preform of a pressure vessel. Knowledge-based rules are employed to design the preform, and they are formulated using the handbooks of plasticity theories. In the FE-analysis, a commercial finite element code, ABAQUS was employed. Axisymmetric deep drawing of a hemisphere-bottomed cup has been analyzed fur various combinations of die design parameters. The length of the land of die, the clearance between punch and die and the clearance between the blank holder and die are optimized to minimize the forming load. The results of the simulations are verified with the experiments which are scaled down to one tenth of the actual size.

The present work covers a new ray tracing scheme of an injection-molded plastic lens linked with finite element analysis fur injection molding processes. The traditional ray tracing schemes have been based on the assumption that optical property of the lens is homogeneous throughout the entire volume. However, this assumption is quite unrealistic for injection-molded plastic lenses since material properties vary at every point due to injection molding effects. In order to consider non-homogeneous property of a lens, a modified ray tracing method is proposed in connection with finite element analysis of injection molding. Through the analysis of the injection molding process, the distribution of refractive indices can be obtained. This information is then utilized in the proposed ray tracing scheme based on finite element meshes so as to take into account variation of the refractive indices. The effect of mold temperature is also investigated through finite element analysis, and the relevant optical quality is evaluated through the proposed ray tracing simulation.

Transplanting accuracy of a rice transplanter mainly depends on the trajectory of the hoe for picking, conveying and transplanting of seedlings as well as the return motion. The trajectory can be decided and prescribed to be suitable in treating seedlings fur a prevailing soil condition. For the purpose of the transplanting accuracy, the design of a transplanting mechanism would be carried out using a planetary-gear-train system instead of the four bar linkage system. In this study, a design method of transplanting mechanism is theoretically proposed by synthesizing a noncircular planetary-gear-train system fur the tool (hoe) to trace a prescribed trajectory. The method utilizes an optimization approach to decide the lengths of an arm and a tool, the inverse kinematics to figure out the configuration angles of the two links, the roll contact condition in transmitting motion between the gears, and a linearization approach to obtain the shapes of the gears. Based on the proposed method, the shapes of the gears and the lengths of the tools of the planetary-gear-train system are determined fur three prescribed trajectories. A kinematical simulation with a commercialized package program is also carried out to confirm that the gear-train system synthesized with the proposed method is able to trace the prescribed trajectory.

This paper deals with the finite element model of the monitor fur the simulation of directional free drop tests such as the backward and vertex free drop as well as the associated free-drop experiment. The model was made for an unconditional stable solution fur the explicit integration algorithm. It was found through the comparison between simulation and experimental results that the general behaviors at the time of impact were observed to well correlate with each other in terms of acceleration, displacement, contact force and stress of monitor components.

The research on surface modification technology has been advanced to improve the properties of engineering materials. ion implantation is a novel surface modification technology to enhance the mechanical, chemical and electrical properties of substrate's surface using accelerated ions. In this research, nitrogen ions were implanted into aluminum substrates which would be used for mold of rubber materials. The composition of nitrogen ion implanted aluminum alloy and nitrogen ion distribution profile were analyzed by Auger Electron Spectroscopy (AES). To analyze the modified surface, properties such as hardness, friction coefficient, wear resistance, contact angle, and surface roughness were measured. Hardness of ion implanted specimens was higher than that of untreated specimens. Friction coefficient was reduced, and wear resistance was improved. From the experimental results, it can be expected that ion implantation of nitrogen enhances the surface properties of aluminum mold.

Responses of the cabinet of the reactor safety system under seismic leadings are analyzed, its dynamic characteristics and structural reliability being evaluated. Analyzed natural frequencies are compared with those measured from a resonance test. Structural safety of the cabinet is evaluated in consideration of the required response spectrums of the operation-base and safe-shutdown earthquakes. Transient responses of the cabinet are analyzed with input ground acceleration measured during the seismic test, accelerations being extracted at the locations of the main internal parts. The transient responses are compared with those from the seismic test, favorable results being shown.

When one opens the door of a microwave oven during operation, microwave might leak through the clearance of the door. Present research has been motivated by the need to reduce the possible clearance by enhancing torsional stiffness of the door of the microwave oven. Static deformation of the door frame of the oven is analyzed under a door-opening force. On the basis of the topological optimization, the right flange of the door frame is shown to need reinforcing. Several types of reinforcing brackets weldable to the right flange is proposed, and their effects to the stiffness of the door frame are compared and evaluated.

The rotating components such as turbine rotors in service are generally subjected to multiaxial cyclic loading conditions. The prediction of fatigue lift for turbine rotor components under complex multiaxial loading conditions is very important to prevent the fatigue failures in service. In this paper, axial and torsional low cycle fatigue tests were preformed for 3.5NiCrMo steels serviced low pressure turbine rotor of nuclear power plant. Several methods to predict biaxial fatigue life such as Tresca, von Mises and Brown & Miller's critical plane approach were evaluated to correlate the experimental results for serviced NiCrMoV steel. The fracture mode and fatigue characteristics of NiCrMoV steel were discussed based on the results of fatigue tests performed under the axial and torsional test conditions. In particular, the Brown and Miller's critical plane approach was found to best correlate the experimental data with predictions being within a factor of 2.

In this paper, we study the mechanism of lead deformation by numerically simulating the stamping process by means of a commercial finite element code. It is very important to analyze effects that the lead shape makes on the lead deformation, because the lead shape is often modified in order to minimize the deformation or to increase the buckling critical load of the punch. Therefore the stamping process, first, numerically simulated by considering as a quasi-static problem. Second, the effect on the lead deformation due to the lead shape variation, a linear lead geometry and a bent lead, was numerically analyzed and discussed. Finally, the punching order was optimized fur multi-lead generating stamping process. The results show that the bent lead is little bit more shifted than the linear lead after the punching process. But the bent lead is vertically less deformed than the linear lead. The punching order to successively generate the lead is good to keep the lead space uniform. The results will be very effectively applied for the design of the blanking or punching dies in industry.

Micro hole is ode of basic elements for micro device or micro parts. Micro electrochemical machining (ECM) can be applied to the machining of micro holes less than 50 ${\mu}m$ in diameter, which it is not easy to apply other techniques to. For the machining of passivating metals such as stainless steel, machining conditions should be chosen carefully to prevent a passive layer. The machining conditions also affect the machining resolution, In this paper, machining characteristics of micro ECM were investigated according to machining conditions such as electrolyte concentration and pulse conditions. From the investigation, optimal machining conditions were suggested for micro ECM of stainless steel.

A numerical system to extract effective elastic properties of polycrystalline thin-films for MEMS devices is developed. In this system, the statistical model based on lattice system is used for modeling the microstructure evolution simulation and the key kinetics parameters of given micrograph, grain distributions and deposition process can be extracted by inverse method proposed in the system. In this work, effects of kinetics parameters on the extraction of effective elastic properties of polycrystalline thin-films are studied by using statistical method. Effects of the fraction of the potential site($f_p$) among the parameters for deposition process of microstructure on the extraction of effective elastic properties of polycrystalline thin-films are investigated. For this research, polysilicon is applied to this system as the polycrystalline thin-films.

In recent years, as the demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this Paper, the optical alignment characteristic of multi-axis ultra precision stage is studied. The alignment algorithms are studied for applying to the ultra precision multi-axis stage. The alignment algorithm is comprised of field search and peak search algorithms. The contour of optical power signals can be obtained by field search and the precise coordinate can be found out by peak search. Three kinds of alignments, such as 1 ch. input vs. 1 ch. output optical stack, 1 ch. input vs. 8 ch. output PLC stacks, and ferrule vs. ferrule, are performed for investigating the alignment characteristics.

An experimental study of the femtosecond laser machining of Si materials was carried out. Direct laser machining of the materials for the feature size of a few micron scale has the advantage of low cost and simple process comparing to the semiconductor process, E-beam lithography, ECM and other machining process. Further, the femtosecond laser is the better tool to machine the micro parts due to its characteristics of minimizing the heat affected zone(HAZ). As a result of line cutting of Si, the optimal condition had the region of the effective energy of 2mJ/mm-2.5mJ/mm with the power of 0.5mW-1.5mW. The polarization effects of the incident beam existed in the machining qualities, therefore the sample motion should be perpendicular to the projection of the electric vector. We also observed the periodic ripple patterns which come out in condition of the pulse overlap with the threshold energy. Finally, we could machined the groove with the linewidth of below $2{\mu}m$ for the application of MEMS device repairing, scribing and arbitrary patterning.

For precise micro-grooving and surface machining, a mechanism for creating elliptical vibration cutting (EVC) motion is proposed which uses two parallel piezoelectric actuators. And based on its kinematical analysis, variations of EVC path are investigated as a function of dimensional changes in the mechanism, phase difference and amplitude of excitation sinusoidal voltages. Using the proposed PZT mechanism, various types of two dimensional EVC paths including one dimensional vibration cutting path along the cutting direction and thrust direction can be easily obtained by changing the phase lag, the amplitude of the piezoelectric actuators, and the dimension of the mechanism.

For precise micro V-grooving, ultrasonic elliptical vibration cutting (UEVC) is proposed using two parallel piezoelectric actuators, which are energized by sinusoidal voltages with a phase difference of 90 degrees. Experimental setup is composed of stacked PZT actuators, a single crystal diamond cutting tool, and a precision motorized xyz stage. It is found that the chip formed in the process of UEVC is discontinuous because of the periodic contacts and non-contacts occurring between the tool and workpiece. It is experimentally observed that the cutting force in the process of UEVC significantly reduces compared to the ordinary non-vibration cutting. In addition, the creation of burr during UEVC is significantly suppressed, which is attributable to the decrease in the specific cutting energy.

This paper addresses the correlation between the change of file size and the scanning path build time by the slicing height of STL file. Though the study about STL file has been achieved quite actively scanning path build time using STL file is not investigated so much to be satisfied. The file size depends on the number of polygon created by the slicing height specified. And this number of polygons increases in a regular rate. The correlation between the number of polygons and the scanning path build time is examined and verified.