The effect of mechanical parameters on chemical mechanical polishing (CMP) of blanket and patterned aluminum thin films are investigated. CMP process experiments are conducted using the soft pad and the slurry mainly composed of acid solution and A1$_2$O$_3$ abrasive. The result for the blanket film showed that as the concentration of abrasive in slurry is increased, the surface roughness gets worse but the waviness gets better. The planarity of the patterned Al films is slowly improved by CMP when the width of and gap between the patterns are relatively small. It is tried to find the optimized CMP process conditions by that the patterned Al thin film can be planarized with fine surface. The most satisfiable film surface is obtained when the applied pressure is low (10kPa) and the abrasive concentration is relatively high (5wt%).

In these days, according to increasing the technical development, the dimension of a product goes up for ultra-precision. For the net shape manufacturing, grinding is a important process that influences directly the accuracy and the integrity of produced products. In this study, an experimental evaluation was carried out. Workpiece materials were used STD11, SUS304, and STB2 in accordance with varing condition of feedrate and depth of cut. From measuring the grinding force and the surface roughness, material characteristics of grinding by using CBN wheel were examined.

Turbine blade is subject to cyclic bending force by steam pressure. Stress analysis by fractography is already established technology as means far seeking cause of fracture and has been widely employed. In the X-ray frctography, plastic deformation and residual stress near the fracture surface can be determined and information of internal structure of material can be obtained. Therefore, to find a fracture mechanism of torsion-mounted blade in nuclear power plant, based on the information from the fracture surface obtained by fatigue test, the correlation of X-ray parameter and fracture mechanics parameter was determined and then the stress intensity factor to actual broken turbine blade was predicted.

Thermomechanical behavior and mechanical properties of A16061 matrix composite with shape memory alloy(SMA) fiber are studied by using fnite element analysis(FEA). The smartness of the SMA is given due to the shape memory effect of the TiNi fiber which generates compressive residual stress in the matrix material when healed after being prestrained. In this paper, an analytical model is assumed two dimentional axisymetric model of one fiber and around the matrix. To evaluate the strength of composite usig FEM, the concept of smart composite was simulated on computer. The Shape memory effect(SME) simulation is very difficult using FEM because of the nonlinear analysis and the elastic plastic analysis. Thus, in this paper, the FEA was carried out at two critical temperature conditions; room temperature and high temperature(363K). The analysis is compare the finite element analysis result with the test result for the analysis validity.

In end milling process the undeformed chip thickness and the cutting force components vary periodically with phase change of the tool. In this study, up end milling process is transformed to the equivalent oblique cutting. The varying undeformed chip thickness and the cutting force components in end milling process are replaced with the equivalent average ones. Then it can be possible to analyze the chip-tool friction and shear process in the shear plane of the end milling process by the equivalent oblique cutting system. According to this analysis, when cutting Inconel 718, 61, 64 and 55% of the total energy is consumed in the shear process with the helix angle 30$^{\circ}$, 40$^{\circ}$ and 50$^{\circ}$ respectively, and the balance is consumed in the friction process. With the helix angle of 40$^{\circ}$ the specific cutting energy consumed is smaller than with the helix angle 30$^{\circ}$ and 50$^{\circ}$.

Most of Rapid Prototyping (RP) process adopt a solid Computer Aided Design (CAD) model, slicing into thin layers of uniform, but not necessarily constant, thickness in the building direction. Each cross-sectional layer is successive1y deposited and at the same time, bonded onto the previous layers; the stacked layers form a physical part of the model. The objective of this study is to develop a method for calculating the rotation angle ($$\theta$_x, $\theta$_y$) of hotwire of the cutting system in the three-dimensional space for the Variable Lamination Manufacturing process using expandable polystyrene foam sheet (VLM-S). In order to examine the applicability of the developed method to VLM-S, various three-dimensional shapes. such as a screw, an extruded cross, and free surface bodies such as miniatures of the monkey(a figure of Sonokong), were made using the data obtained form the method.

In order to reduce the lead-time and cost, the technology of rapid prototyping (RP) has been widely used. However, RP technologies have disadvantageous characteristics according to their working principle: low building speed, high cost for introduction and maintenance of RP apparatus, stair-stepped surface and additional post processing. A new rapid prototyping process, as a transfer type of Variable Lamination Manufacturing by using expandable polystyrene room (VLM-ST), has been developed to reduce building lime. apparatus cost including the introduction and the maintenance and additional post-processing. The objective of this study is to propose a VLM-ST process and to develop an apparatus for implementation of the process. Design criteria of the apparatus are defined and the techniques arc proposed to satisfy the design criterion. In order to examine the efficiency and applicability of the developed process, various three-dimensional shapes, such as a world-cup logo. a knob shape, an extruded cross, a twisted shape, a character, Son-o-kong. a helical gear shaped and a scissor shape are fabricated on the apparatus in which unit shape layer (USL) was generated to build up each layer.

Stencil is used normally as a mask for seeder pasting on pad of PCB. The objective of this study is to develop stencil cutting system and determine optimal conditions which make good-quality stencil by using a Nd:YAG laser. The effects of process parameters such as laser power, type of mask, gas pressure, cutting speed and pulse width old the cut edge quality were investigated. In order to analyse fille cut surface characteristics(roughness, kerf width, dross) optical microscopy, SEM photography and roughness test were used. As a result, the optimal conditions of process parameters were determined, and the practical feasibility of the proposed system is also examined by using a commercial Gerber file for PCB stencil manufacturing.

As semi-solid forging (SSF) is compared with conventional easting such as gravity die-easting and squeeze casting, the product without inner defects can be obtained from semi-solid forming and globular microstructure as well. Generally speaking. SSF consists of reheating, forging, ejecting precesses. In the reheating process, the materials are heated up to the temperature between the solidus and liquidus line at which the materials exists in the form of liquid-solid mixture. The process variables such as reheating time, reheating temperature, reheating holding time, and induction heating power have much effect on the quality of the reheated billets. It is difficult to consider all the variables at the same time when predicting the quality. In this paper, Taguchi method, regression analysis and neural network were applied to analyze the relationship between processing conditions and solid fraction. A356 alloy was used for the present study, and the learning data were extracted by the reheating experiments. Results by neural network were on good agreement with those by experiment. Polynominal regression analysis was formulated by using the test data from neural network. Optimum processing condition was calculated to minimize the grain size, solid fraction standard deviation, otherwise, to maximize the specimen temperature average. In this time, discussion is liven about reheating process of row material and results are presented with regard to accurate process variables for proper solid fraction, specimen temperature and grain size.

Robot manipulator has highly nonlinear dynamics. Therefore the control of multi-link robot arms is a challenging and difficult problem. In this paper an independent joint adaptive fuzzy sliding mode scheme is developed leer control of robot manipulators. The proposed scheme does not require an accurate manipulator dynamic model, yet it guarantees asymptotic trajectory tracking despite gross robot parameter variations. Numerical simulation for independent joint control of a 3-axis PUMA arm will also be included.

A number of experimental studies on burr formation in face milling operations have been pursued. They usually focus on machining parameters such as depth of cut, leed rate, spindle speed and in-plane exit angle. But it if difficult to set the correlation between burrs and the parameters on burr when such parameters are considered at the same time. Therefore, in this paper, acoustic emission (AE) is considered as an alternate way to predict burr types regardless of machining conditions. AE signals during face milling were sampled and processed, then fed into an artificial neural network to classify burr types \\\"on-line\\\".\\\".uot;.

The planar tracked vehicle model used in this investigation consists of two kinematically decoupled subsystems, i.e., the chassis subsystem and the track subsystem. The chassis subsystem includes the chassis frame, sprocket, idler and rollers, while the track subsystem is represented as a closed kinematic chain consisting of rigid links interconnected by revolute joints. In this study, the recursive kinematic and dynamic formulation of the tracked vehicle is used to find the vertical terce and the distance of an arbitrary track moved in the driving direction along the track. These distances and vertical forces obtained are used to get the deformation and sinkage of a terrain. The FEM(Finite Element Method) is adopted to analyze the interaction between tracked vehicle and terrain. The terrain is represented by a system of elements wish specified constitutive relationships and considered as a piecewise linear elastic, plastic and isotropic material. When the tracked vehicle is moving with different speeds on the terrain, the elastic and plastic deformations and the maximum sinkage for the four different types of isotropic soils are simulated.

The method of accumulating a sequence of focused images is usually used for reconstruction of 3D object\\`s shape. To acquire a focused image, the conventional methods must calculate the focus measures of all pixels resulting in a long measurement time. This paper proposes a new method of reducing the computation time spent for deciding the focused pixels in the input image, which predicts the area in the image to calculate the focus measure based on a priori information on the object to be measured. The proposed algorithm estimates the area to consider in the next measurement based on the focused area in the present measurement. As the focus measure, Laplacian measure was used in this paper and the experiments have shown that the preposed algorithm may significantly reduce the calculation time. Although, as implied, this algorithm can be applied to only simple objects at this stage, advanced representation schemes will eliminate the restrictions on application domain.

Retroreflective article is different from other reflecting objects as it returns the incidence ray to the near of its source. This characteristic makes the retroreflectors have many applications in reflective highway signs, reflective vests, and other safety-relaxed items. These articles may have various shapes. However, the quantitative evaluation of performance for the best shape of retroreflector needs much time and cost for manufacturing prototypes and for performance experiments. In this work, we have developed a program for simulating the trace of ray entered into a retroreflective element, in order to determine the optimal shape of retro-reflection. We have also proposed new performance criterion of retroreflective articles, which can confide the range of incidence angle, instead of the criterion with the merely retroreflective strength.

This paper is the study on stress analysis of spur gear using a finite element method. Gear drives constitute very important mechanisms in transmitting mechanical power processes compromising several cost effective and engineering advantages. The load transmission occurred by the contacting surfaces arises variable elastic deformations which are being evaluated through finite element analysis. The automatic gear design program is developed to model gear shape precisely. This gear design system developed was used by pre-processor of FEM packages. The distribution of stresses at contacting surfaces was examined when a pair of gear contact.

This paper describes a research work on the development of computer-aided design system far the deep drawing & ironing of high pressure gas cylinder. An approach to the design system is based on the knowledge-based rules. Knowledge for the system is formulated from plasticity theories, handbook, experimental results and the empirical knowledge of field experts. This system has been written in AutoLISP on the AutoCAD Rl4.0 using personal computer. This system is composed of three modules which are input. process design and drawing.

For the fine grinding process development of semiconductor monocrystalline silicon, wheel rotational speed, chuck rotational speed, feed rate and hysteresis force were controlled. Magic mirror system was used for grinding wheel pattern analysis. Curvature of wheel pattern was measured by fitting equation. The modeling of surface wheel pattern was related to wheel and chuck rotational speed. The calculated curvature of the model was well matched with the measured curvature. The statistical analysis indicated wheel and chuck rotational speed were significantly effective on.

An automated process planning system for cold forging of non-axisymmetric parts of comparatively simple shape was developed in this study. Programs for the system have been written with Visual LISP in the AutoCAD using a personal computer and are composed of four main modules such as input module, shape cognition and shape expression module, material diameter determination module and process planning module. The design rules and knowledges for the system are extracted from the plasticity theories, handbook, relevant reference and empirical knowledge of field experts. Generally, in forging, only front view is needed for expression of axisymmetric parts, but non-axisymmetric parts need front and plane view. At the plane, this system cognizes the external shape of non-axisymmetric, parts - number of sides of regular polygon and radius of a circle circumscribing the polygon of n sides. At the front view, the system perceives diameter of axisymmetric portions and height of primitive geometries such as polygon, cylinder, cone, concave, convex, etc.

Active magnetic hearings allow much high surface speed than conventional ball bearings and therefore greatly suitable for high speed cutting. This paper describes a design and test of an active magnetic bearing system with 16-pole radial magnets. The spindle is originally designed for a CNC lathe and driven by outer motor with 5.5 kW power and maximum speed 10,000 rpm. Considering static load condition and geometric restrictions, radial magnet is designed 16-pole type for smaller outer diameter of the spindle system. Dynamic system characteristics such as natural frequency, critical speed, stiffness, damping and system stabilities are simulated with a rigid rotor model including direct feedback controller. The designed spindle system is realized with digital PIDD controller to compensate phase lag of PWM amplifier and magnet coils. With levitation and step response experiment the control system characteristics are tested, and the spindle is rotated up to 10,000 rpm stab1y.

A cone-shaped active magnetic healing spindle system for high speed internal grinding with built-in motor that has 7.5kW power and maximum rotational speed of 50,000 rpm is designed and built. Using cone-shaped AMB(Active Magnetic Bearing) system, the axial rotor dick and magnets of conventional 5-axis actuating design can be eliminated. so this concept of design provides a simple magnetic bearing system. In this paper, the cone-shaped electromagnets are designed by magnetic circuit theory, and a de-coupled direct feedback PID controller is applied to control the coupled magnetic bearings. The designed crone-shaped AMB spindle system is built and constructed with a digital control system, which has TMS320C6702 DSP, 16 bit AD/DA, switching power amplifier and gap sensors. As the AMB system provides high damping ratio eliminating overshoot and resonance speed, this spindle runs up to 40,000 rpm stably with about 5${\mu}{\textrm}{m}$ of runout.

The design of suction muffler for compressor aims to achieve a maximum noise reduction and a minimum pressure loss. Until now, the design process has been performed experimentally rather than theoretically. In this paper, to achieve the maximum noise reduction and minimum pressure loss. we studied the effect of the shape and volume of the expansion tube of the muffler on TL and pressure drop. We made an extensive use of computer program such as SYSNOISE. FLUENT, and STAR-CD to calculate the TL and pressure distribution of suction muffler. The design of the muffler is optimized with respect to flow loss and TL. Experiments are performed to check the result of design change, which proves satisfactory results. It is expected that this process can reduce time to design a muffler in the fields.

In this study, the carbon steels, SM20C were machined with the tungsten carbide tipped circular saw to clarify the cutting-off characteristics in terms of tool wear. The results show that an improved performance in view of both the tool wear and the cutting efficiency was obtained by using oil base cutting fluid at the cutting speed of 100m/min with the feed of 0.06mm/tooth. The rake angle of 10$^{\circ}$ , clearance angle of 8$^{\circ}$ , nose radius of R0.1mm, and end cutting edge champer of 0.1mm$\times$25$^{\circ}$ are believed as the best tool geometries. The tool wear decreases due to using the saw of the disk of STS5 and the tool material of P30.