As the design rules in semiconductor manufacturing process become more and more stringent, the higher degree of planarization of device surface is required for a following lithography process. Also, it is great challenge for chemical mechanical polishing to achieve global planarization of 12” wafer or beyond. To meet such requirements, it is essential to understand the CMP equipment and process itself. In this paper, authors suggest the velocity distribution on the wafer, direction of friction force and the uniformity of velocity distribution of conventional rotary CMP equipment in an analytical method for an intuitive understanding of variation of kinematic variables. To this end, a novel dimensionless variable defined as “kinematic number” is derived. Also, it is shown that the kinematic number could consistently express the velocity distribution and other kinematic characteristics of rotary CMP equipment.

As the design rules in semiconductor manufacturing process become more and more stringent, the higher degree of planarization of device surface is required for a following lithography process. Also, it is great challenge for chemical mechanical polishing to achieve global planarization of 12” wafer or beyond. To meet such requirements, it is essential to understand the CMP equipment and process itself. In this paper, authors suggest the velocity distribution on the wafer, direction of friction force and the uniformity of velocity distribution of conventional rotary CMP equipment in an analytical method for an intuitive understanding of variation of kinematic variables. To this end, a novel dimensionless variable defined as “kinematic number” is derived. Also, it is shown that the kinematic number could consistently express the velocity distribution and other kinematic characteristics of rotary CMP equipment.

Geometric cutting-simulation and verification play an important role in detecting NC machining errors in mold & die manufacturing and thereby reducing correcting time & cost on the shop floor. Current researches in the area may be categorized into view-based, solid-based, and discrete vector-based methods mainly depending on workpiece models. Each methodology has its own strengths and weaknesses in terms of computing speed, representation accuracy, and its ability of numerical inspection. The paper proposes a hybrid modeling scheme for workpiece representation with z-map model and discrete vector model, which performs 3-axis and 5-axis cutting-simulation via tool swept surface construction by connecting a sequence of silhouette curves.

The formation of exit burr in drilling metals is analyzed by finite element method. The simplified burr formation model is suggested for the complex mechanism of burr formation in drilling on the basis of experimental data. Using the model the magnitude of burr is predicted and the effect of material properties of workpiece and cutting condition on burr formation is analyzed in the present study. The suggested model is verified by comparing simulation results and experimental ones. The predicted size and shape of burr are in good agreement with those observed by experiment.

In case of hollow cylinder extrusion using porthole die, the effects of extrusion parameters-temperature, the speed of extrusion, the shape of the die and mandrel-on metal flow in porthole die extrusion of aluminum have been investigated. However, there have been few studies about condenser tube extruded by porthole die. Original metal flow of condenser tube by porthole die extrusion is similar to hollow cylinder extrusion but the estimation of metal flow for extrusion parameters is different. For example, variation of chamber length in hollow extrusion only affects the welding pressure, however, the welding chamber length in condenser tube extrusion influences to the welding pressure as well as the deflection of mandrel. This study was designed to evaluate metal flow, welding pressure, extrusion load, tendency of mandrel deflection according to angular variation in the bottom of chamber in porthole die. Estimation was carried out using finite element method in as non-steady state. Analytical results can provide useful information the optimal design of porthole die.

In case of hollow cylinder extrusion using porthole die, the effects of extrusion parameters-temperature, the speed of extrusion, the shape of the die and mandrel-on metal flow in porthole die extrusion of aluminum have been investigated. However, there have been few studies about condenser tube extruded by porthole die. Original metal flow of condenser tube by porthole die extrusion is similar to hollow cylinder extrusion but the estimation of metal flow for extrusion parameters is different. For example, variation of chamber length in hollow extrusion only affects the welding pressure, however, the welding chamber length in condenser tube extrusion influences to the welding pressure as well as the deflection of mandrel. This study was designed to evaluate metal flow, welding pressure, extrusion load, tendency of mandrel deflection according to angular variation in the bottom of chamber in porthole die. Estimation was carried out using finite element method in as non-steady state. Analytical results can provide useful information the optimal design of porthole die.

Vehicle dynamics control (VDC) has been a breakthrough and become a new terminology for the safety of a driver and improvement of vehicle handling. This paper examines the usefulness of a brake steer system (BSS), which uses differential brake forces for steering intervention in the context of VDC, In order to help the car to turn, a yaw moment can be achieved by altering the left/right and front/rear brake distribution. The steering function achieved through BSS can then be used to control lateral position in an unintended road departure system. An 8-DOF non-linear vehicle model including STI tire model will be validated using the equations of motion of the vehicle, and the non-linear vehicle dynamics. Since fuzzy logic can consider the nonlinear effect of vehicle modeling, fuzzy controller is designed to explore BSS feasibility, by modifying the brake distribution through the control of the yaw rate of the vehicle. The control strategies developed will be tested by simulation of a variety of situation; the possibility of VDC using BSS is verified in this paper.

A wind turbine monitoring system is essential equipment fur the performance evaluation and mechanical load analysis of a wind turbine. A monitoring system using LabVIEW is developed in this study. This system monitors signals from a meteorological mast, wind turbine generator, and tower. The discrete signals which are sampled at t Hz are automatically saved on a data file in the unit of a day. Besides these basic functions, the developed monitoring system has the other several capabilities. One of them is the information access from a remote PC through the internet. A vision image of the test site area and data files that are produced by LabVIBW software can be uploaded to the main computer located in a remote site. An emergency backup system using UPS fur the power loss on the monitoring HW is also prepared, A detail explanation for the developed wind turbine monitoring system is presented in this study.

In a winding process, important control specifications include regulation of web tension and velocity. In this research, an adaptive controller has been developed for controlling web tension and velocity in winding processes. For the controller design, the linear quadratic regulator theory has been adopted and a gain-scheduling scheme has been incorporated. A prototype winding system has been constructed, and the controller has been implemented in a real-time PC-based environment. The performance of the closed loop system has been evaluated via simulation and experiments, and it was observed that both the web tension and velocity could be regulated within a small tolerance.

This paper is concerned with the development of Internet-based robot system controlled on the remote site via the Internet. In order to draw the public attention into this exciting system, we built the simple system by which a robot is moved in response to answer for the given OX quizzes. As the primary research fer Internet-based robot control, this study focuses on the development of user-friendly interface by which a beginner achieves information for a robot on the remote site from the 3D virtual simulator and the real camera image. for the compensation of Internet time delay, position prediction simulator is implemented in the user interface.

These days, the researches related with the emotional robots are actively investigated and in progress. And human language, expression, action etc. are merged in the emotional robot to understand the human emotion. However, there are so many sound sources and background noise around the robot, that the robots should be able to separate the mixture of these sound sources into the original sound sources, moreover to understand the meaning of voice of a specific person. Also they should be able to turn or move to the direction of a specific person to observe his expression or action effectively. Until now, the researches on the localization and separation of sound sources have been so theoretical and computative that real-time processing is hardly possible. In this reason for the practical emotional robot, fast computation should be realized by using simple principle. In this paper the methods for detecting the direction of sound sources by using the phase difference between peaks on spectrums, and the separating the sound sources by using fundamental frequency and its overtones of human voice, are proposed. Also by using these methods, it is shown that the effective and real-time localization and separation of sound sources in living room are possible.

As the new model development lead time becoming shorter and the market requirements becoming more strict, automobile manufacturer begins to utilize 3-dimensional CAD system based techniques such as DMU (Digital Mock-up), Rf (Rapid Prototyping), VE (Virtual Engineering) to meet the market trends. But, no satisfactory utilities have been developed yet, to represent emotional properties such as embossment on the surface of interior parts, touch originated from material characteristics in virtual environment, so it is inevitable to manufacture prototype parts to verify actual feeling which passengers feel in automobile. This paper suggests a methodology to enhance the human sensitivity via embodying embossment on the surface of prototype car interior trim without deterioration of dimensional accuracy using RIM (Reaction Injection Molding) and thermoforming method.

In this study, it is attempted to obtain the optimum size of holes in 15 square plate models where a hole exists on every quadrant of a plate, and to get eigenvalues by performing free vibration analysis for each model. Moreover, the specimen is produced from optimized square plate and eigenvalue of each plate is measured through the shocking load. And then the result is compared with that of finite element analysis. For free vibration analysis of the square plate, the boundary condition of finite element analysis and experiment is assumed as both ends clamped support. From the results of this study, it is known that more stable structures can be designed by changing the natural frequency which is dependent on the location of holes and further studies are considered to be necessary fur the basic design information.

As the huge energy transfer systems like as nuclear power plant and steam power plant are operated for a long time at a high temperature, mechanical properties are changed and ductile-brittle transition temperature is raised by degradation. So it is required to estimate degradation in order to assess the safety, remaining life and further operation parameters. The sub-sized specimen test method using surveillance specimen was developed for evaluating the integrity of metallic components. In this study, we would like to present the evaluation technique of the ductile-brittle transition temperature by the sub-sized specimen test. The four classes of the thermally aged 1Cr-1Mo-0.25V specimens were prepared using an artificially accelerated aging method. The tensile test and fracture toughness test were performed. The results of the fracture toughness tests using the sub-sized specimens were compared with the evaluation technique of the ductile-brittle transition temperature.

Most manufacturing processes such as welding, cutting and molding generate residual stresses on the surface of manufactured parts. Between compressive and tensile residual stresses, the tensile residual stress is harmful to the surface integrity, which results in reduced fatigue life and causes other structural failures when the service stresses are superimposed on the residual stresses. In the research, the residual stresses in the hardened tool steel (SKD11) were measured using hole-drilling method. The specimens were prepared through hard turning. Most of residual stresses in the machined surface were compressive.

In order to investigate the possibility of punching process of brittle material by ball impact, the effects of sealing materials about impact damage of soda-lime glass by small spheres were evaluated experimentally. The using of sealing materials in the development of perfect cone crack was more effective than no using of sealing materials. At the sealing materials condition, in the case of 5mm-thick specimen, Copper and PMMA sealing were more effective in producing a perfect cone formation than the other sealing materials. And in the case of 8mm-thick specimen, Aluminum sealing was most effective in producing a perfect cone formation. The impact velocity range over which perfect cones were formed was influenced by both the thickness of specimen and sealing materials. By a proper selection of sealing materials, the application fur industrial technology for hole (or nozzle) punching process of brittle materials is expected.

To ensure the reliability of DVDR-P and DVD-ROM, it is imperative to remedy the unrecoverable creep deformation and/or relaxation of the holding force of an optical disc holder. To predict the deformation of an optical disc holder, a deformation analysis of an 80 mm optical disc holder considering the creep characteristics of 3 plastic materials has been conducted. Subsequently, the results by this Finite Element Analysis (FEA) are experimentally verified. A disc holder inserted in a cartridge case is kept in a chamber of $60^{\circ}C$ with 90 % humidity for 24 hours. The arm span and the holding force of the disc holder are measured after being left for another 24 successive hours at a room temperature and under normal humidity. The predicted results by FEA are in good agreement with experimentally measured values.

An Amplitude Proportional Friction Damper (APFD) is considered in order to improve the characteristics of Coulomb friction damper. The frictional force is proportional to the amplitude in APFD system and the system is non-linear as is Coulomb damper system. A free vibration analysis on the 1-DOF system has made to demonstrate the characteristics of the APFD system. The results show that APFD system has similar damping characteristics to the viscous damper. Also, the solution for the response of a base-excited system with APFD is developed through the application of a Fourier series to represent the frictional force of APFD. It is assumed that no stick-slips occur during any portion of the steady-state oscillation.

In the precision motion device, the frictional problem by mechanical friction causes serious effects on the system performance. Various researches have been executed to solve this problem, but classical fluid lubrication method has some disadvantages in precision motion under clean environment. Therefore, the magnetic bearing and contact-free systems have been focused on with its pollution-free characteristics. In this paper, we treat modeling and analysis of electromagnets not only for magnetic bearing but also fer contact-free electromagnetic actuators. Three types of electromagnet for various applications are modeled and analyzed by magnetic circuit theory and the validity is verified by experiments.

Atomic Force Microscope (AFM) has been widely used in micro/nano-scale studies and applications for. the last few decade. In this work, wear characteristics of silicon-based AFM tip was investigated. AFM tip shape was observed using a high resolution SEM and the wear coefficient was approximately calculated based on Archard's wear equation. It was shown that the wear coefficient of silicon and silicon nitride were in the range of ${10}^{-1}$~${10}^{-3}$ and ${10}^{-3}$~${10}^{-4}$, respectively. Also, the effect of relative humidity and sliding distance on adhesion-induced tip wear was discussed. It was found that the tip wear has more severe for harder test materials. Finally, the probable wear mechanism was analyzed from the adhesive and abrasive interaction point of view.

This paper demonstrates that an improved hybrid neural-genetic multimodel parameter estimation algorithm can be applied to the structured system identification of an electro-hydraulic servo system. This algorithm is consists of a recurrent incremental credit assignment (ICRA) neural network and a genetic algorithm, The ICRA neural network evaluates each member of a generation of model and the genetic algorithm produces new generation of model. We manufactured an electro-hydraulic servo system and the improved hybrid neural-genetic multimodel parameter estimation algorithm is applied to the task to find the parameter values, such as mass, damping coefficient, bulk modulus, spring coefficient and disturbance, which minimize total square error.

An elastomeric bushing is a device used in automotive suspension systems to reduce the load transmitted from the wheel to the frame of the vehicle. A bushing is an elastomeric hollow cylinder which is bonded to a solid steel shaft at its inner surface and a steel sleeve at its outer surface. The relation between the load applied to the shaft or sleeve and the relative deformation of elastomeric bushing is nonlinear and exhibits features of viscoelasticity. A load-displacement relation for elastomeric bushing is important for dynamic numerical simulations. A boundary value problem for the bushing response leads to the load-displacement relation which requires complex calculations. Therefore, by modifying the constitutive equation fur a nonlinear viscoelastic incompressible material developed by Lianis, the data fur the elastomeric bushing material was obtained and this data was used to derive the new load-displacement relation for radial response of the bushing. After the load relaxation function for the bushing is obtained from the step displacement control test, Pipkin-Rogers model was developed, Solutions were allowed fur comparison between the results of Modified Lianis model and those of the proposed model. It is shown that the proposed Pipkin-Rogers model is in very good agreement with Modified Lianis model.

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numerical method by ABAQUS S/W. Polymer (PMMA) and brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic restoration and pile-up was proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1-l0mm. The result of the investigation will be applied to the fabrication of the hyper-fine pattern and mold.

This paper describes a novel MEMS integration technique on a CMOS chip. MEMS integration on CMOS circuit has many advantages in view of manufacturing cost and reliability. The surface topography of a CMOS chip from a commercial foundry has 0.9 ${\mu}{\textrm}{m}$ bumps due to the conformal coating on aluminum interconnect patterns, which are used for addressing each MEMS element individually. Therefore, it is necessary to achieve a flat mirror-like CMOS chip fer the microelectromechanical system (MEMS) such as micro mirror array. Such CMOS chip needs an additional thickness of the dielectric passivation layer to ease the subsequent planarization process. To overcome a temperature limit from the aluminum thermal degradation, this study uses RF sputtering of silicon nitride at low temperature and then polishes the CMOS chip together with the surrounding dummy pieces to define a polishing plane. Planarization reduces 0.9 ${\mu}{\textrm}{m}$ of the bumps to less than 25 nm.

The injection molding is a traditional manufacturing method that can make plastic parts by just one time in mold. Therefore, the injection molding has become one of a manufacturing method, which is widely applied in a producing of plastic products. Nowadays, to use of plastic parts has increased and plastic product-model using term has been shorten. By these reasons, using term of a injection mold has fast been reduced. These produced molds will be disused and leaved in a storage after a regular term to use it. These leaved molds are sometime sold as scrap iron. But, these molds have lots parts for recycling except special parts for example, cavities, cores and eject pins, etc. In this research, we investigated when the cavity and core of in injection mold would be changed, the injection mold could be recycled. We suggested the structures and standardizations for recycling of a moldbase. We also developed a program in which can be used when the recycling moldbase design in the Auto-CAD with the recycling standards. We called this program as the Recy-Mold. For the availability of the program and moldbase structure fur the recycling standards, we experimented a used mold for automobile lens, which was remanufactured by the recycling standard. The results of this test showed feasibility for the recycling mold.

In this paper, a method of disassembly time evaluation for a product has been proposed. The product designer can predict the ability of disassembly for a given product in terms of time by considering a type, size, weight, connection parts, and the movement distance of the product. The equation for calculating disassembly time were derived by applying the basis motion status of worker and some informations of connection parts, various tools, and many different type of assembly structures. The developed method of evaluating disassembly time has been applied to disassemble the product by manual labor. The proposed method has shown that the actual disassembly time was well predicted.