This computational investigation of micro-sized particle dispersion concerns the fume particle contamination over target surface in high-precision laser line machining process of semiconductor and display device materials. Employing the random sampling based on probabilistic fume particle generation distributions, the effects of sphericity for nonspherical fume particles are analyzed for the fume particle dispersion and contamination near the laser machining line. The drag coefficient correlation for nonspherical particles in a low Reynolds number regime is selected and utilized for particle trajectory simulations after drag model validation. When compared to the corresponding results by the assumption of spherical fume particles, the sphericity of nonspherical fume particles show much less dispersion and contamination characteristics and it also significantly affects the particle removal rate in a suction air flow patterns.

A functional polyethylene terephthalate substrate to increase light extraction efficiency of organic light-emitting diodes is studied. We formed nano-structured PET surfaces by controlling the power, gas, and exposure time of the linear ion-beam. The haze of the polyethylene terephthalate can be controlled from 0.2% to 76.0% by changing the peak-to-valley roughness of nano structure by adjusting the exposure cycle. The treated polyethylene terephthalate shows average haze of 76.0%, average total transmittance of 86.6%. The functional PET increases the current efficiency of organic light-emitting diodes by 47% compared to that of organic light-emitting diode on bare polyethylene terephthalate. In addition to polyethylene terephthalate with light extraction performance, by conducting additional research on the development of functional PET with anti-reflection and barrier performance, it will be possible to develop flexible substrates suitable for organic light-emitting diodes lighting and transparent flexible displays.

In this work, we evaluated the Al₂O₃ film, which was deposited by atomic layer deposition, degraded by exposure to harsh environments. The Al₂O₃ films deposited by atomic layer deposition have long been used as a gas diffusion barrier that satisfies barrier requirements for device reliability. To investigate the barrier and mechanical performance of the Al₂O₃ film with increasing temperature and relative humidity, the properties of the degraded Al₂O₃ film exposed to the harsh environment were evaluated using electrical calcium test and tensile test. As a result, the water vapor transmission rate of Al₂O₃ films stored in harsh environments has fallen to a level that is difficult to utilize as a barrier film. Through water vapor transmission rate measurements, it can be seen that the water vapor transmission rate changes can be significant, and the environment-induced degradation is fatal to the Al₂O₃ thin films. In addition, the surface roughness and porosity of the degraded Al₂O₃ are significantly increased as the environment becomes severer. the degradation of elongation is caused by the stress concentration at valleys of rough surface and pores generated by the harsh environment. Becaused the harsh envronment-induced degradation convert amorphous Al₂O₃ to crystalline structure, these encapsulation properties of the Al₂O₃ film was easily degraded.

The ultraviolet-C emitting praseodymium doped yttrium phosphate (YPO₄:Pr³⁺) powder was synthesized by conventional solid-state reaction. The electroluminescence device was fabricated by simple screen-printing method using the synthesized YPO₄:Pr³⁺ powder, especially, polyvinylidene fluoride as an insulating layer was applied on the printed YPO₄:Pr³⁺ powder for stable performance of the electroluminescence. The electroluminescence properties were investigated under alternating current power system of 400 Hz. The device starts to emit at 350 V, which showed the ultraviolet-C emission peaking at the 233, 245, 264, 273 nm attributed to electronic transition of the Pr³⁺ ions. The electroluminescence intensity was increased as increasing the operating voltage and the device revealed stable performance up to 600 V due to the polyvinylidene fluoride serve as a protective layer.

The purpose of this research is to determine the hardness of guide hole. A guide pin and a guide hole of SSD(Solid State Drive) tester used to mount SSD in a fixed position accurately. The guide pin and guide hole are worn by friction due to repeated operation, and the wear is concentrated on the guide hole made of weak material rather than the guide pin made of relatively strong material. Because of that reason, it is often overdesigned in the design stage because it can lose its function. If the guide hole is made soft, the manufacturing cost will decrease, but the accuracy will decrease due to wear caused by repeated friction. If the guide hole is manufactured excessively, the manufacturing process becomes complicated and the manufacturing cost increases. It is essential to design a guide hole, but since there is no standard or verified data that can be referenced, it is difficult to design. Experimental device which guides in the same way as the SSD tester is used for this research, and three types of anodizing state are experimented for different hardness. Also, weight of COK(Change over Kit) were analyzed by measuring the wear amount and state of the guide hole according to the number of repeated attachment and detachment.

By an aid of needle coating, we have fabricated a spherical microlens array using poly(methyl methacrylate) for potential applications in light extraction of organic light-emitting diodes. With an attempt to achieve high-density and high-aspect-ratio microlens arrays, we have investigated the coating behaviors by varying the material parameters such as the solute concentration and wettability of the poly(methyl methacrylate) solution and process parameters such as the dwell time of needle near the substrate, retract distance of needle from the substrate, and coating gap between the needle and substrate. Under the optimized coating conditions, it is demonstrated that high-aspect-ratio microlens arrays can be obtained using a coating solution with high solute concentration and a small amount of a hydrophobic solvent. It is found that the diameter and height of microlens array are decreased with increasing poly(methyl methacrylate) concentration, yet the overall aspect ratio is rather enhanced. By the addition of 5 wt% hexylamine in 35 wt% poly(methyl methacrylate) solution, we have achieved a spherical microlens with the height of 7.7 ㎛ and the width of 94.24 ㎛ (the aspect ratio of 0.082). To estimate the capability of light extraction by the microlens array, we have performed ray tracing simulations and demonstrated that the light extraction efficiency of organic light-emitting diode is expected to be enhanced up to 24%.

As semiconductors become finer, equipment must perform precise and accurate processes to achieve the desired wafer fabrication requirement. Radio frequency power delivery system in plasma system plays a critical role to generate the plasma, and the role of impedance matching unit is critical to terminate the reflected radio frequency power by modifying the impedance of the matching network in the plasma equipment. Impedance matching unit contains one fixed inductor and two variable vacuum capacitors whose positions are controlled two step motors. Controlling the amount of vacuum variable capacitor should be made as soon as possible when the mismatched impedance is detected. In this paper, we present the impedance matching algorithm using the phase sensor.

Plasma density in semiconductor fabrication equipment becomes higher to achieve the improved the throughput of the process, but the increase of surface corrosion of the ceramic coated chamber wall has been observed by the increased plasma density. Plasma chamber wall coating with aerosol deposition prefer to be firm and uniform to prevent the potential creation of particle inside the chamber from the deformation of the coating materials, and the aerosol discharge nozzle is a good control factor for the deposited coating condition. In this paper, we investigated the design of the nozzle of the aerosol deposition to form a high-quality coating film. Computational fluid dynamics (CFD) study was employed to minimize boundary layer effect and shock wave. The degree of expansion, and design of simulation approach was applied to found out the relationship between the divergence angle and nozzle length as the key parameter for the nozzle design. We found that the trade-off tendency between divergence angle and nozzle length through simulation and quantitative analysis, and present the direction of nozzle design that can improve the uniformity of chamber wall coating.

The etching with high selectivity of silicon dioxide over silicon nitride is essential in semiconductor fabrication, and gas phase etch (GPE) can increase the competitiveness of the selective dielectric etch. In this work, GPE of plasma enhanced chemical vapor deposited SiO₂ was performed, and the effects of process parameters, such as temperature, partial pressure ratio, and gas supply cycle, are investigated in terms of etch rate and within wafer uniformity. Employing multiple regression analysis, the importance of each parameter elements is analyzed.

Recently, the demand for semiconductors is expanded to various industries, and the use of high-quality and high-performance chips is increasing. With the trend, the diameter magnification and high integration of the semiconductor wafers are mandatory. As a result, there is a growing demand for the productivity improvement and the surface precision. There have been many studies on the stabilization of the wafer manufacturing processes in order to satisfy those specifications. Many complaints have been appealed by the wafer buyers that there are many unacceptable wafers with surface defects and foreign material adhesion which are caused by the vibrations during transportation. This study intends to derive the material improvement of the packing box of the wafers to suppress the vibrations of the box, and eventually to reduce the surface defects and the foreign material adhesion. The result shows that optimal material can substantially decrease the vibration of the packing box.

The curing characteristics of naphthalene type epoxy resin systems according to the change of curing agent were investigated to develop a new next-generation EMC(Epoxy Molding Compound) with excellent warpage characteristics, low thermal expansion, and excellent fluidity for WLP(Wafer Level Package). As epoxy resins, DGEBA, which are representative bisphenol type epoxy resins, NE-16, which are the base resins of naphthalene type epoxy resins, and NET-OH, NET-MA, and NET-Epoxy resins newly synthesized based on NE-16 were used. As a curing agent, DDM (Diamino Diphenyl Methane) and CBN resin with naphthalene moiety were used. The curing reaction characteristics of these epoxy resin systems with curing agents were analyzed through thermal analysis experiments. In terms of curing reaction mechanism, DGEBA and NET-OH resin systems follow the nth curing reaction mechanism, and NE-16, NET-MA and NET-Epoxy resin systems follow the autocatalytic curing reaction mechanism in the case of epoxy resin systems using DDM as curing agent. On the other hand, it was found that all of them showed the nth curing reaction mechanism in the case of epoxy resin systems using CBN as the curing agent. Comparing the curing reaction rate, the epoxy resin systems using CBN as the curing agent showed a faster curing reaction rate than them with DDM as a hardener in the case of DGEBA and NET-OH epoxy resin systems following the same nth curing reaction mechanism, and the epoxy resin systems with a different curing mechanism using CBN as a curing agent showed a faster curing reaction rate than DDM hardener systems except for the NE-16 epoxy resin system. These reasons were comparatively explained using the reaction rate parameters obtained through thermal analysis experiments. Based on these results, low thermal expansion, warpage reduction, and curing reaction rate in the epoxy resin systems can be improved by using CBN curing agent with a naphthalene moiety.

In this study, we produced the surface defect detection model to automatically detect defect bone plates using a deep learning algorithm. Bone plates with a width and a length of 50 mm are most used for fracture treatment. Normal bone plates and defective bone plates were printed on the 3d printer. Normal bone plates and defective bone plates were photographed with 1,080 pixels using the webcam. The total quantity of collected images was 500. 300 images were used to learn the defect detection model. 200 images were used to test the defect detection model. The mAP(Mean Average Precision) method was used to evaluate the performance of the surface defect detection model. As the result of confirming the performance of the surface defect detection model, the detection accuracy was 96.3 %.

As the semiconductor industry develops, the difficulty of newly required process technology becomes difficult, and the importance of production yield and product reliability increases. As an effort to minimize yield loss in the manufacturing process, interests in the process defect process for facility diagnosis and defect identification are continuously increasing. This research observed the plasma condition changes in the multi oxide/nitride layer deposition (MOLD) process, which is one of the 3D-NAND manufacturing processes through optical emission spectroscopy (OES) and monitored the result of whether the change in plasma characteristics generated in repeated deposition of oxide film and nitride film could directly affect the film. Based on these results, it was confirmed that if a change over a certain period occurs, a change in the plasma characteristics was detected. The change may affect the quality of oxide film, such as the film thickness as well as the interfacial surface roughness when the oxide and nitride thin film deposited by plasma enhenced chemical vapor deposition (PECVD) method.

We reported on annealing effect on Ga₂O₃/Al₂O₃/SiC devices grown by radio frequency sputtering method. Post-deposition annealing at 900 ℃ was performed, which results in crystallization in the Ga₂O₃ films. The major peaks (-401) and (403) of Ga₂O₃ which was thermally treated at 900 ℃ appears in the x-ray diffraction (XRD) results. Auger electron spectroscopy (AES) shows that Ga and Al atoms seems to be diffused into the opposite direction Al₂O₃ and Ga₂O₃ after annealing. Transfer and output characteristics of back-gate transistor were analyzed where SiC substrate is used as gate material. On-state current and on/off ratio increased almost 10⁹ and 10⁶ times higher in the 900 ℃ annealed sample.

In order to minimize the picking time when the products are released from the warehouse, they should be located close to the exit when the products are released. Currently, the warehouse determines the loading location based on the order of the requirement of products, that is, the frequency of arrival and departure. Items with lower requirement ranks are loaded away from the exit, and items with higher requirement ranks are loaded closer from the exit. This is a case in which the delivery time is faster than the products located near the exit, even if the products are loaded far from the exit due to the low requirement ranking. In this case, there is a problem in that the transit time increases when the product is released. In order to solve the problem, we use the idle time of the stocker in the warehouse to rearrange the products according to the order of delivery time. Temporal difference learning method using Q_learning control, which is one of reinforcement learning types, was used when relocating items. The results of rearranging the products using the reinforcement learning method were compared and analyzed with the results of the existing method.

In this paper, a power loss analysis technique of a high-frequency transformer of a bidirectional DAB (Dual Active Bridge) converter is reported. To miniaturize the transformer of the dual active bridge converter, a resonant inductor was designed with an air gap included low-coupled rate state core to combine leakage inductor with the resonant inductor which is required for soft-switching. In this paper, leakage inductance and magnetizing inductance, core material, type of winding and winding method are included in the dual active bridge transformer loss analysis process to enable optimal design at the initial design stage. Transformer loss analysis for dual active bridge with a switching frequency of 200 kHz and maximum output of 5 kW was executed, and elements necessary for design based on the number of turns on the primary side were graphed while maintaining the transformer turns ratio and window area. In particular, it was possible to determine the optimal number of turns and thickness of the transformer, and ultimately, the total loss of the transformer could be estimated.

In this paper, WBG semiconductor such as SiC and GaN were applied as power switches for LCL circuit that can be applied to satellite power systems and the test results of the LCL circuit are reported. P-channel MOSFET and N-channel MOSFET, which were generally used in the conventional LCL circuit, were applied together to expand the utility of the test results. The design and stability evaluation were performed using a Micro Cap circuit simulation program. For the test circuit, a module using each switch was manufactured, and a total of 5 modules were manufactured and the steady state and transient state characteristics were compared. From the experimental results, the LCL circuit for power supply of the satellite power system constructed in this paper satisfied the constant current and constant voltage conditions under various operating conditions. The P-channel MOSFET showed the lowest efficiency characteristics, and the three N-channel switches of Si, SiC and GaN showed relatively high efficiency characteristics of up to 99.05% or more. In conclusion, it was verified that the on-resistor of the switch had a direct effect on the efficiency and loss characteristics.

In this paper, a plastic film type submersion sensor capable of measuring submersion speed was developed. This submersion sensor is designed as a capacitive type, and it is a sensor that outputs the change in capacitance between the electrode of the submersion sensor and the grounded body as a voltage through a C-V(capacitance-voltage) converter. We developed an submersion sensor in which two electrodes of different lengths are connected in parallel to measure the submersion speed accurately by minimizing the influence of noise such as contamination. When both electrodes of the submersion sensor are exposed to water, the rate of change of water level suddenly increases, so the submersion speed is measured by measuring the time to this point. Since the difference in length between the two electrodes of the submersion sensor does not change in any case, it is possible to accurately measure the submersion speed.

The demand for a rear reflective material is continuing according to the expansion of the bifacial soar module and the effect on the re-reflection of the ground using a back sheet that is not used due to the increase in the supply of the bifacial solar module was confirmed. For analysis, a bifacial solar module with an output of 445W was connected to a single inverter of 49.84kW, and analysis of each two inverters was carried out. In the analysis of the results, it was confirmed that the generation amount increased by 5.25% compared to the case where the back sheet reflective film was not installed and it was confirmed that the increase in the generation amount was the noon time when strong solar radiation was irradiated, not the time of sunrise and sunset.

This paper proposes a method for evaluating the work of manufacturing workers using MediaPipe as a risk factor for musculoskeletal diseases. Recently, musculoskeletal disorders (MSDs) caused by repeated working attitudes in industrial sites have emerged as one of the biggest problems in the industrial health field while increasing public interest. The Korea Occupational Safety and Health Agency presents tools such as NIOSH Lifting Equations (NIOSH), OWAS (Ovako Working-posture Analysis System), Rapid Upper Limb Assessment (RULA), and Rapid Entertainment Assessment (REBA) as ways to quantitatively calculate the risk of musculoskeletal diseases that can occur due to workers' repeated working attitudes. To compensate for these shortcomings, the system proposed in this study obtains the position of the joint by estimating the posture of the worker using the posture estimation learning model of MediaPipe. The position of the joint is calculated using inverse kinetics to obtain an angle and substitute it into the REBA equation to calculate the load level of the working posture. The calculated result was compared to the expert's image-based REBA evaluation result, and if there was a result with a large error, feedback was conducted with the expert again.

We investigated deep levels in n-type 4H-SiC epitaxy layer of the Positive-Intrinsic-Negative diode and Schottky barrier diodes by using deep level transient spectroscopy. Despite the excellent performance of 4H-SiC, research on various deep level defects still requires a lot of research to improve device performance. In Positive-Intrinsic-Negative diode, two defects of 196K and 628K are observed more than Schottky barrier diode. This is related to the action of impurity atoms infiltrating or occupying the 4H-SiC lattice in the ion implantation process. The I-V characteristics of the Positive-Intrinsic-Negative diode shows about ~100 times lower the leakage current level than Schottky barrier diode due to the grid structures in Positive-Intrinsic-Negative. As a result of comparing the capacitance of devices diode and Schottky barrier diode devices, it can be seen that the capacitance value lowered if it exists the P implantation regions from C-V characteristics.

In the era of COVID-19 pandemic, COVID related keywords, news and SNS data are pouring out. With the help of the data and LDA topic modeling, we can check out what media reports about COVID-19 and vaccines. Also, we can be clear how the public reacts to the vaccine on social media and how this is related with the increasing number of COVID-19 patients. By using sentimental analysis methodology, we can get to know about the different kinds of reports that Korea media send out and get to know what kind of emotions that each media company uses in majority. Through this procedure, we can know the difference between the Korean media and the foreign ones. Ultimately, we can find and analyze the keyword that suddenly rose during the COVID-19 period throughout this research.

In the smart industry where data plays an important role, cloud computing is being used in a complex and advanced way as a convergence technology because it has and fits well with its strengths. Accordingly, in order to utilize artificial intelligence rather than human beings for quality management of cloud computing services, a consistent standardization method of data collected from various nodes in various areas is required. Therefore, this study analyzed technologies and cases for incorporating artificial intelligence into specific services through previous studies, suggested a plan to use artificial intelligence to comprehensively standardize data in quality management of cloud computing services, and then verified it through case studies. It can also be applied to the artificial intelligence learning model that analyzes the risks arising from the data formalization method presented in this study and predicts the quality risks that are likely to occur. However, there is also a limitation that separate policy development for service quality management needs to be supplemented.

The employment prediction model proposed in this paper uses 16 independent variables, including self-introductions of M University students who applied for IPP and work-study internship, and 3 dependent variable data such as large companies, mid-sized companies, and unemployment. The employment prediction model for large companies was developed using Random Forest and Word2Vec with the result of F1_Weighted 82.4%. The employment prediction model for medium-sized companies and above was developed using Logistic Regression and Word2Vec with the result of F1_Weighted 73.24%. These two models can be actively used in predicting employment in large and medium-sized companies for M University students in the future.

A cryogenic Mixed Refrigerant Joule-Thomson refrigeration cycle was designed to be applied to the semiconductor etching process with non-flammable constituents. 3-stage cascade refrigerator, single mixed refrigerant Joule-Thomson refrigerator, and 2-stage cascade type mixed refrigerant Joule-Thomson refrigerator are analyzed to figure out the coefficient of performance. Non-flammable mixture of argon(Ar), tetrafluoromethane(R14), trifluoromethane (R23) and octafluoropropane(R218) were utilized to analyze the refrigeration cycle efficiency. The designed refrigeration cycle was adapted to cool down the coolant of HFE7200(Ethoxy-nonafluorobutane, C₄F₉OC₂H₅) with certain constraints. Maximum coefficient of performance of the refrigeration system is obtained as 0.289 for the cooling temperature lower than -100℃. The detailed result of the coefficient of performance according to the mixture composition is discussed in this study.