Dispersion Characteristics of Nonspherical Fume Micro-Particles in Laser Line Machining in Terms of Particle Sphericity

입자 구형도에 따른 레이저 선가공의 비구형 흄 마이크로 입자 산포 특성 연구

  • Kim, Kyoungjin (Department of Mechanical System Engineering, Kumoh National Institute of Technology) ;
  • Park, Joong-Youn (Department of Mechanical System Engineering, Kumoh National Institute of Technology)
  • 김경진 (금오공과대학교 기계시스템공학과) ;
  • 박중윤 (금오공과대학교 기계시스템공학과)
  • Received : 2022.03.17
  • Accepted : 2022.06.21
  • Published : 2022.06.30

Abstract

This computational investigation of micro-sized particle dispersion concerns the fume particle contamination over target surface in high-precision laser line machining process of semiconductor and display device materials. Employing the random sampling based on probabilistic fume particle generation distributions, the effects of sphericity for nonspherical fume particles are analyzed for the fume particle dispersion and contamination near the laser machining line. The drag coefficient correlation for nonspherical particles in a low Reynolds number regime is selected and utilized for particle trajectory simulations after drag model validation. When compared to the corresponding results by the assumption of spherical fume particles, the sphericity of nonspherical fume particles show much less dispersion and contamination characteristics and it also significantly affects the particle removal rate in a suction air flow patterns.

Keywords

Acknowledgement

본 연구는 금오공과대학교 학술연구비에 의하여 지원된 논문이다(과제번호: 2019-104-012).

References

  1. Cho, K. W. and Park, H. J., "Laser Processing Technology in Semiconductor and Display Industry", Journal of the Korean Society for Precision Engineering, Vol. 27, pp. 32-38, 2010.
  2. Dubey, A. K. and Yadava, V., "Laser Beam Machining - A Review", International Journal of Machine Tools and Manufacture, Vol. 48, pp. 609-628, 2008. https://doi.org/10.1016/j.ijmachtools.2007.10.017
  3. Powell, J., CO2 Laser Cutting, 2ndEd., Springer-Verlag: London, 1998.
  4. Malkusch, W., Rehn, B, and Bruch, J, ''In Vitro Method for Medical Risk Assessment of Laser Fumes", Optics and Laser Technology, Vol. 27, pp. 39-43, 1995. https://doi.org/10.1016/0030-3992(95)93957-S
  5. Vassie. R., Roach, R. J., Tyrer, J. R., and Sharp, B. L., ''Fumes Generated During Laser Processing of Polyvinyl Chloride (PVC)", Optics and Laser Technology, Vol. 27, pp. 31-37, 1995. https://doi.org/10.1016/0030-3992(95)93956-R
  6. Kim, K., "A Study on Dispersion Behaviors of Fume Particles in Laser Cutting Process of Optical Plastic Thin Films", Journal of the Semiconductor and Display Technology, Vol. 18, pp. 62-68, 2019.
  7. Kim, K., "Downward and Upward Air Flow Effects on Fume Particle Dispersion in Laser Line Cutting of Optical Plastic Films", Journal of the Semiconductor and Display Technology, Vol. 19, pp. 37-44, 2020.
  8. Kim, K. and Park, J. Y., "Assessment of Air Flow Misalignment Effects on Fume Particle Removal in Optical Plastic Film Cutting Process", Journal of the Semiconductor and Display Technology, Vol. 19, pp. 51-58, 2020.
  9. Kim, K. and Park, J. Y., "Fume Particle Dispersion in Laser Micro-Hole Machining with Oblique Stagnation Flow Conditions", Journal of the Semiconductor and Display Technology, Vol. 20, pp. 77-82, 2021.
  10. Brown, P. B. and Lawler, D. F., "Sphere Drag and Settling Velocity Revisited", Journal of Environmental Engineering, Vol. 203, pp. 222-231, 2007.
  11. Haider, A. and Levenspiel, O., "Drag Coefficient and Terminal Velocity of Spherical and Nonspherical Particles", Powder Technology, Vol. 58, pp. 63-70, 1989. https://doi.org/10.1016/0032-5910(89)80008-7