Reactive sputtering is widely used because of its high deposition rate and high step coverage. The deposition layer is often affected by target poisoning because the target conditions are changed, as well, by reactive gases during the initial stage of sputtering process. The reactive gas affects the deposition rate and process stability (target poisoning), and it also leads unintended oxide interlayer formation. Although the target poisoning mechanism has been well known, little attention has been paid on understanding the interlayer formation during the reactive sputtering. In this research, we studied the interlayer formation during the reactive sputtering. A DC magnetron sputtering process is carried out to deposit an aluminum oxide film on a silicon wafer. From the real-time process monitoring and material analysis, the target poisoning phenomena changes the reactive gas balance at the initial stage, and affects the interlayer formation during the reactive sputtering process.

Optical emission spectroscopy is used to identify chemical species and monitor the changes of process results during the plasma process. However, plasma process monitoring or fault detection by using emission signal variation monitoring is vulnerable to background signal fluctuations. IR heaters are used in semiconductor manufacturing chambers where high temperature uniformity and fast response are required. During the process, the IR lamp output fluctuates to maintain a stable process temperature. This IR signal fluctuation reacts as a background signal fluctuation to the spectrometer. In this research, we evaluate the effect of infrared background signal fluctuation on plasma process monitoring and improve the plasma process monitoring accuracy by using simple infrared background signal subtraction method. The effect of infrared background signal fluctuation on plasma process monitoring was evaluated on $SiO_2$ PECVD process. Comparing the $SiO_2$ film thickness and the measured emission line intensity from the by-product molecules, the effect of infrared background signal on plasma process monitoring and the necessity of background signal subtraction method were confirmed.

In this study, we synthesized two $Y_3Al_5O_{12}:Ce^{3+}$ phosphors ($7{\mu}m$-sized and $2{\mu}m$-sized YAG) with different sizes by controlling particles sizes of starting materials of the phosphors for white LED. In the smaller one ($2{\mu}m$-sized YAG), its photoluminescence intensity in the reflective mode was 63 % that of the bigger one ($7{\mu}m$-sized YAG); the quantum efficiencies were 93 % and 70 % for the smaller and the bigger ones. Two kinds of white LED packages with the same color coordinates were fabricated with a blue package (chip size $53{\times}30$) and two phosphors. The luminous flux of the white LED package with the smaller YAG phosphor was 92 % of that with the bigger one, indicating that the quantum efficiency of phosphor dispersed inside LED package was higher than that of the pure powder. It was consistently confirmed by the optical simulation (LightTools 6.3). It is notable according to the optical simulation that the white LED with the smaller phosphor showed 24 % higher luminous efficiency. If the smaller one had the same quantum efficiency as the bigger one (~93 %). Therefore, it can be suggested that the higher luminous efficiency of white LED can be possible by reducing the particle size of the phosphor along with maintaining its similar quantum efficiency.

Inspection and measurement of surface quality is one of the most critical processes for manufacturing products such as semiconductor wafers, sapphire substrates, and display panels. The vibrations of the inspection and measurement devices are supposed to be the most dominant factors for severe measurement errors and longer measuring time. In this study, dynamic characteristics of an inspection and measurement device are analyzed through frequency response experiment and computer simulation to obtain parameters such as frequencies, magnitudes, mode shapes, and periods of vibrations. And then an active damper which consists of sensor, interface board, and actuator is designed based on the parameters to formulate the most effective reaction signal to suppress the vibrations which is generated by an interface board, and provided by an actuator. If the vibrations are measured by the sensor, the active damper immediately generates and provides the corresponding reaction signal to inspection and measurement device. The result shows that the active damper can suppress structural vibrations effectively and reduce measuring time of the device and enhance the productivity.

In this paper, 5.8GHz 25W microwave wireless power transmission system was developed. The transmission system is composed of a signal generator, a 1W drive amplifier, a 25W power amplifier, and a circularly polarized transmission antenna. The receiving system was fabricated with an integrated receiver that combines a circularly polarized receiving antenna, a pass band filter, and an RF-DC converter. And a multi-integrated receiver had twelve parts, including an integrated receiver. Under the conditions, voltage and current were measured for the system at 5cm intervals from a minimum distance of 5cm to a maximum distance of 80cm. The power was calculated for the system. The results of the system are shown in tables and graphs. The power decreases with distance, but the power does not drop sharply due to a multi-integrated receiver.

In this study, a new adhesion evaluating equipment and data processing methods were developed to overcome some limitations of existing evaluating equipment. Nano-diamond coated tool is a specimen of experiment. When applying frictional force and shear force on the specimen by a rotating polishing pad, delamination occurs at a moment. During each experiment, the vibration, load, and torque is obtained by accelerometer, loadcell and torque s+ kpensor. Frictional force and coefficient of friction are obtained by calculating torque and load. Based on FFT transformation, acceleration is processed and analyzed. As a result, the moment of delamination and the load at that time can be detected by the new developed equipment and measurement system. Finally, we call this load as an Adhesion force.

Titanium dioxide ($TiO_2$) is a promising dielectric material in the semiconductor industry for its high dielectric constant. However, for utilization on Si substrate, $TiO_2$ film meets with a difficulty due to the large leakage currents caused by its small conduction band energy offset from Si substrate. In this study, we propose an in-situ plasma oxidation process in plasma-enhanced atomic layer deposition (PE-ALD) system to form an oxide barrier layer which can reduce the leakage currents from Si substrate to $TiO_2$ film. $TiO_2$ film depositions were followed by the plasma oxidation process using tetrakis(dimethylamino)titanium (TDMAT) as a Ti precursor. In our result, $SiO_2$ layer was successfully introduced by the plasma oxidation process and was used as a barrier layer between the Si substrate and $TiO_2$ film. Metal-oxide-semiconductor ($TiN/TiO_2/P-type$ Si substrate) capacitor with plasma oxidation barrier layer showed improved C-V and I-V characteristics compared to that without the plasma oxidation barrier layer.

Proton beam writing is a direct writing lithography technique for semiconductor fabrication process. The advantage of this technique is that the proton beam does not scatter as they travel through the matter and therefore maintain a straight path as they penetrate into the resist. The experiment has been carried out at Accelerator Mass Spectrometry facility. The focused proton beam with the fluence of $100nC/mm^2$ was exposed on the PMMA coated silicon sample to make a pattern on a photo resist. The results show the potential of proton beam writing as an effective way to produce semiconductor fabrication process.

The four different polymer compounds were manufactured to make cable sheath for ship industry. Two kinds of ethylene-vinyl acetate (EVA) were selected as main matrix polymers for compounding with fire retardant, crosslinking agent, filler, plasticizer, and other additives. The properties of the four compounded materials were investigated with the contents of fire retardant, silane coated aluminum hydroxide (S-ATH). Rheology, Mooney viscosity, and tensile strength increased with S-ATH contents by reinforcing effect. With increasing fire retardant amount, fire resistance increased, but cold resistance didn't show an obvious enhancement due to polar effect of vinyl acetate in EVA.

The blue emitting fluorescence of $SrAl_{12}O_{19}:Ce_{0.09}{^{3+}}$, $Eu_{0.01}{^{2+}}$ phosphor includes two kinds of independent energy transfer mechanism through electric multipole interactions between donor and acceptor ions. The first energy transfer takes place between the $Ce^{3+}$ ion and the $Eu^{2+}$ion which strongly depends on the concentration $Eu^{2+}$ions. The second energy transfer occurs between the $Ce^{3+}$ ion and the $O_{Me}-Ce^{3+}$ complexes. Both energy transfer mechanisms of blue emitting peak at 410 nm were investigated by fitting of Gaussian functions. The result shows that the peak at 410 nm is two overlapping emissions originated by $Eu^{2+}$ions and $O_{Me}-Ce^{3+}$ complexes and as time elapses $Eu^{2+}$peak remains whereas $O_{Me}-Ce^{3+}$ related peak disappears.

Since floating facility with mooring system can be moved and rotated by wind or other environmental variables, the error in azimuthal angle must be compensated using a GPS receiver and geo-magnetic sensor. Accordingly, when an existing photovoltaic tracking algorithm is applied to a floating photovoltaic system, it is difficult to do the optimal solar tracking. In this paper, an effective azimuthal angle algorithm is develop for the photovoltaic tracking in floating condition. In order to verify the developed algorithm, the prototype of the floating photovoltaic system is manufactured and the developed algorithm is applied to the system. The algorithm shows a good tracking feasibility on the prototype.

Recently, time synchronous has become important for satellite launch control facilities, multiple thermal power plants, and power system facilities. Information from time synchronous at each of these industrial sites requires time synchronization to control or monitor the system with correlation. In this paper, IRIG-B codes, which can be used for time synchronous, are used as specifications in IRIG standard 200-16. Signals from IRIG-B120 (Analog), IRIG-B000 (Digital), and one PPS are output from GPS receiver. Using the signal from IRIG-B120 (Analog), it passes through the signal from the analog amplifier and generates one PPS signal using the field-programmable gate array. The FPGA is used cyclone EPM570T100I5N. According to IEEE regulations, the error of one PPS is specified within 1us, but in this paper, the error is within 100ns. The output of the one PPS signal was then compared and tested against the one PPS signal on the GPS receiver to verify accuracy and reliability. In addition, the proposed time synchronous is simple to construct and structure, easy to implement, and provides high time precision compared to typical time synchronous. The output of the one PPS signals and IRIG-B000 signal will be used in many industry sectors.

The cure properties of ethoxysilyl diglycidyl isocyanurate(Ethoxysilyl-DGIC) and ethylsilyl diglycidyl isocyanurate (Ethylsilyl-DGIC) epoxy resin systems with a phenol novolac hardener were investigated for anticipating fan out-wafer level package(FO-WLP) applications, comparing with ethoxysilyl diglycidyl ether of bisphenol-A(Ethoxysilyl-DGEBA) epoxy resin systems. The cure kinetics of these systems were analyzed by differential scanning calorimetry with an isothermal approach, and the kinetic parameters of all systems were reported in generalized kinetic equations with diffusion effects. The isocyanurate type epoxy resin systems represented the higher cure conversion rates comparing with bisphenol-A type epoxy resin systems. The Ethoxysilyl-DGIC epoxy resin system showed the highest cure conversion rates than Ethylsilyl-DGIC and Ethoxysilyl-DGEBA epoxy resin systems. It can be figured out by kinetic parameter analysis that the highest conversion rates of Ethoxysilyl-DGIC epoxy resin system are caused by higher collision frequency factor. However, the cure conversion rate increases of the Ethylsilyl-DGEBA comparing with Ethoxysilyl-DGEBA are due to the lower activation energy of Ethylsilyl-DGIC. These higher cure conversion rates in the isocyanurate type epoxy resin systems could be explained by the improvements of reaction molecule movements according to the compact structure of isocyanurate epoxy resin.

It was confirmed that current flowing in thin films below nm increases conductivity in diffusion currents by holes rather than electric currents by electrons. ZTO thin film, which was heat treated at $150^{\circ}C$, increased electron concentration, and thus increased capacitances. However, it was found that low current movement would be difficult as the degree of movement was reduced. Therefore, it was found that diffusion currents were more advantageous than drift currents by electrons in order to allow low current to be produced in very thin films of nm class.

As software becomes larger and network technology develops, the management of distributed data becomes more popular. Therefore, it is becoming increasingly important to use blockchain technology that can guarantee the integrity of data in various fields by utilizing existing infrastructure. Blockchain is a distributed computing technology that ensures that servers participating in a network maintain and manage data according to specific agreement algorithms and rules to ensure integrity. As smart contracts are applied, not only passwords but also various services to be applied to the code. In order to reinforce existing research on smart contract applied to the blockchain, we proposed a dynamic conditional rule of smart contract that can formalize rules of smart contract by introducing ontology and SWRL and manage rules dynamically in various situations. In the previous research, there is a module that receives the upper rule in the blockchain network, and the rule layer is formed according to this module. However, for every transaction request, it is a lot of resources to check the top rule in a blockchain network, or to provide it to every blockchain network by a reputable organization every time the rule is updated. To solve this problem, we propose to separate the module responsible for the upper rule into an independent server. Since the module responsible for the above rules is separated into servers, the rules underlying the service may be transformed or attacked in the middleware. Therefore, the security mechanism using TLS and PKI is added as an agent in consideration of the security factor. In this way, the benefits of computing resource management and security can be achieved at the same time.

In the recent industry, unmanned systems are expected to continue to spread throughout the economy. Especially in case of cosmetics, Users do not buy it right away. They look around, test it thoroughly, check the reviews, and decide on the purchase. Therefore, unmanned system using kiosk is more popular than face - to - face service of clerks. In this study, the persona analysis was completed based on the results obtained from the questionnaires and in - depth interviews. After sorting out the needs of the users, we applied them to the kiosk UI design of "Lalavela". The purpose of this study is to propose a kiosk UI design that helps many users who want to know information about the product though they are reluctant to ask directly to the clerk.

As a highly conductive and transparent electrode, ITO/Ag/ITO multilayers are fabricated using an in-line sputtering method. Optimal thickness conditions have been investigated in terms of the optical transmittance and the electrical conductance. Considering the optical properties, in this study, the experimental characteristics are analyzed based on theoretical phenomena, and they are compared with the simulated results. The simulations are based on the finite-difference-time-domain (FDTD) method in solving linear Maxwell equations. Consequently, the results showed that ITO/Ag/ITO multilayer structures with respective thicknesses of 39.2 nm/10.7 nm/39.2 nm are most suitable with an average transmittance of about 87% calculated for wavelengths ranging from 400-800 nm and a sheet resistance of about $7.1{\Omega}/{\square}$.

In the presence of ${\mu}-tip$ embedded in a slot-die head for stripe coatings, there arises the capillary flow that limits an increase of the stripe density, which is required for the potential applications in organic light-emitting diode displays. With an attempt to suppress it, we have employed a computational fluid dynamics software and performed simulations by varying the ${\mu}-tip$ length and the contact angles of the head lip and ${\mu}-tip$. We have first demonstrated that such a capillary flow phenomenon (a spread of solution along the head lip) observed experimentally can be reproduced by the computational fluid dynamics software. Through simulations, we have found that stronger capillary flow is observed in the hydrophilic head lip with a smaller contact angle and it is suppressed effectively as the contact angle increases. When the contact angle of the head lip increases from $16^{\circ}$ to $130^{\circ}$, the distance a solution can reach decreases sharply from $256{\mu}m$ to $44{\mu}m$. With increasing contact angle of the ${\mu}-tip$, however, the solution flow along the ${\mu}-tip$ is disturbed and thus the capillary flow phenomenon becomes more severe. If the ${\mu}-tip$ is long, the capillary flow also appears strong due to an increase of flow resistance (electronic-hydraulic analogy). It can be suppressed by reducing the ${\mu}-tip$ length, but not as effectively as reducing the contact angle of the head lip.

Understanding and classification of the human's emotion play an important tasks in interacting with human and machine communication systems. This paper proposes a novel emotion recognition method by extracting facial keypoints, which is able to understand and classify the human emotion, using active Appearance Model and the proposed classification model of the facial features. The existing appearance model scheme takes an expression of variations, which is calculated by the proposed classification model according to the change of human facial expression. The proposed method classifies four basic emotions (normal, happy, sad and angry). To evaluate the performance of the proposed method, we assess the ratio of success with common datasets, and we achieve the best 93% accuracy, average 82.2% in facial emotion recognition. The results show that the proposed method effectively performed well over the emotion recognition, compared to the existing schemes.

Registering different kinds of clinical images widely used in diagnostic and surgery planning. However, cause of tumor growth or effected by gravity, human tissue has plenty of non-rigid deformation with clinically. Non-rigid registration allows the mapping of straight lines to curves. Therefore, such local deformation makes registration more complicated. In this work, we mainly introduce intra-subject, inter-modality registration. This paper mainly studies the nonlinear registration method of 2D medical image registration. The general medical image registration algorithm requires manual intervention, and cost long registration time. In our work to reduce the registration time in rough registration step, the barycenter and the direction of main axis of the image is calculated, which reduces the calculation amount compared with the method of using mutual information.

The TADF (Thermally Activated Delayed Fluorescence)-based OLED patents were analyzed and 4410 of patents were selected at the first step. And 975 patents were screened at second step. Finally, 39 key patents were selected. Patent qualitative analysis was performed in these patents to find which of the four property (lifetime, efficiency, color purity, driving voltage) of TADF was improved. Also, the variation of the hosts and dopants in patented TADF material were surveyed and their combination was analyzed. According to the analysis of the variation and the combination, some of TADF compounds were used as an assistant dopant to transfer energy. In addition, it tended to transfer energy by forming exciplex that shows TADF characteristics. These were similar to the mechanism of the introduced hyper fluorescence and could solve the inherent TADF problems. Finally, patent citation network was illustrated to visualize the patent citations and citations relationship of the major applicants in the current TADF-based OLED technology. The leading patent applicant organization was revealed as Idemitsu Kosan, Semiconductor Energy Laboratory, UDC, Princeton University, Merck and Nippon Steel & Sumikin Chemical, which had lots of reference patents 559, 524, 477, 310, 258, and 167, respectively.

This study was carried out by structural analysis using finite element method for designing high rigidity structure of multi - functional automatic lathe bed. As a result of comparison, it was confirmed that the weight was designed to be higher than the maximum deformation amount. The shape and dimensions of the main pillars and walls of the bed were changed to derive the most suitable design for the multifunction automatic lathe bed. A model of structural design was derived with the goal of minimizing the maximum deformation amount of $20{\mu}m$ or less and the weight of the bed. As a result of applying the derived design improvement proposal to the multifunctional automatic lathe bed, 57.4% weight reduction and maximum principal stress decreased by 45.0% than the initial design model. It is expected that the optimum design that meets these design conditions will reduce the weight of the structure as well as improve the safety of the structure and reduce the machining error in the operation of the machine tool.

Pipes are widely used in various industries such as automobile, anti-vibration devices, factories and ship building. Chamfering is one of the most critical processes in pipe manufacturing which removes burrs of the pipes for better surface quality. In most cases, the defects of the chamfered surface are originated from the structural vibrations of the chamfering machine. In this study, the dynamic characteristics of a chamfering machine have been analyzed though the experiment and the computer simulation. And the effects of the design parameters affecting the stability of the machine have been investigated to stabilize the machine structure and further to reduce structural vibrations. The result shows that design alterations to stabilize the machine can suppress the defects of the machined surface as well as the vibrations during chamfering.

Currently mobile services are on the verge of full commercialization ahead of 5G mobile communication (5G). The first goal could be to preempt the 5G market through realistic media services utilizing VR (Virtual Reality) and AR (Augmented Reality) technologies that users can most easily experience. Basically this movement is based on the advanced development of smart devices and high quality graphics processing computing power of mobile application processors. Accordingly, the importance of mobile GPUs is emerging and the most concern issue becomes a model for predicting the power and performance for smooth operation of high quality mobile contents. In many cases, the performance of mobile GPUs has been introduced in terms of power consumption of mobile GPUs using dynamic voltage and frequency scaling and throttling functions for power consumption and heat management. This paper introduces several studies of mobile GPU performance prediction model with user-friendly methods not like conventional power centric performance prediction models.

4M D램 공동연구 개발사업(1986.10~89.03)은 당시 미 일의 강력한 기술보호주의를 극복하기 위한 자구책으로 시작되었다. 국내 반도체업계는 선진국의 높은 기술장벽 및 기술보호주의를 극복하고, 강력한 경쟁력확보 및 기술축적을 위해 정부에 건의하였다. 이에 정부는 적극적인 자금지원을 통해 4M D램 개발 및 주변기술 개발을 목표로 초고집적반도체기술공동개발사업을 수행하게 되었다. 본 공동R&D사업은 ETRI의 주관으로 당시 금성반도체, 삼성전자, 현대전자산업 등의 반도체 업체와 학계가 참여하였고, 1986년 10월부터 1989년 3월까지 3단계에 걸쳐 수행되었다. 공동연구의 목적은 설계, 공정, 조립, 검사 등 4M D램 제조와 관련되는 기본기술개발과 함께 $0.8{\mu}m$ 선폭의 4M D램을 개발하는 것이며, 이를 위해 단계별 목표를 설정하고 관민연의 혼연일치로 추진되었다. 1차년에는 중요 핵심기술개발, 2차년에는 $0.8{\mu}m$ 4M D램 Working-die개발, 3차년에는 수율 20%의 $0.8{\mu}m$ 4M D램 양산시 제품을 목표대로 완료하였다. 각 연구단계별로 주요 핵심기술에 대한 연구평가가 실시되었으며, 관련기술에 대한 중복투자 방지를 위해 2차년도부터 분담연구가 수행되었고, 상호 기술공유를 위한 기술교류회가 활발히 이루어졌다. 또한 R&D수행을 통해 4M D램 Working-die를 2차년도 중반에 개발완료하였으며, 3차년도에는 4M D램의 20% 수율확보와 공정기술의 최적화 및 DB 구축을 수행했다. 공동R&D 방식에서도 기업간 경쟁체제 도입에 입각하여 동기유발 형태로 진행되었다. 정부는 자금적 지원으로 기업간의 경쟁 심리를 자극하는 전략을 추진했다. 선두기업인 삼성에게는 선행적 개발 지위에 비례하여 더 많은 지원을 부여하는 대신에, 삼성의 기술성과를 다른 기업에게로 확산시킴으로써 반도체 3사 전체의 기술능력을 향상시키는 전략을 추진했다. 본 사업이 성공적으로 수행되어 반도체 제품의 세계시장 점유율제고, 국제수지 개선, 반도체 핵심기술 조기확보뿐만 아니라 16M D램급 이상 차세대 반도체기술 개발의 교도보가 되었다.