An in-line wet etch/cleaning system was established for the research and development in wet etch process as a formation of electrode such as metal or transparent conductive oxide layer. A reverse moving system was equipped in the in-line wet etch/cleaning system for the alternating motion of glass substrate in a wet etch bath of the system. Therefore, it was possible for the glass substrate to be moved back and forth and it was possible to reduce the size of the system by using the reversing moving system. For the effect of the alternating motion of substrate on the etch rate in the in-line wet etch bath, indium tin oxide(ITO) patterns were obtained through wet etch process in the in-line system in which the substrate was moved back and forth. From the CD(critical dimension) skews resulted from the ADI CD and ACI CD of the ITO patterns, it was concluded that the alternating motion of glass substrate are possible to be applied to the mass production of wet etch process.

PMMA light guiding plate with nano pattern was fabricated by nano imprint lithography method. A silicon mold for electroplating of nickel was fabricated by conventional photolithography process. A nickel stamp for nano imprint lithography was fabricated by electroplating process using silicon mold. The nano imprint lithography was performed on PMMA plate at $140^{\circ}C$ under pressure of 20kN. The nano pattern on PMMA plate was investigated using FE-SEM. It is shown that the patterns were well transferred for several steps and the nano imprint lithography method could be applied for fabricating patterns of light guiding plate.

Recently, research on a flat panel display(FPD) has focused on organic light-emitting display(OLED) which has wide angle of view, high contrast ratio and low power consumption. ITO(Indium-Tin-Oxide) films are the most widely used material as a transparent electrode of OLED and also in many other display devices like LCD or PDP. The performance and efficiency of OLED is related to the surface condition of ITO coated glass substrate. The typical surface defect of glass substrate is measured for electric characteristics and physical condition for transmittance and roughness. Since ITO coated glass substrate can be destroyed for inspection about surface roughness, sheet resistance, film thickness and transmittance, precise fabrication condition should be made based on the estimated relationship. In this paper, ITO films were prepared on the commercial glass substrate by the Ion-Plating method changing the partial pressure of gas(Ar, 02) and the chamber temperature between $200^{\circ}C$ and $300^{\circ}C$. The characteristics of films were examined by the 4-point probe, supersonic thickness measurement, transmittance measurement and AFM. We estimated the relationship between processing parameters(Ar gas, O2 gas, Temperature) and properties of ITO films (Sheet Resistance, Film Thickness, Transmittance, Surface Roughness).

Bridge circuit was developed such that the pressure wave in the inkjet can be measured. In order to test the circuit, the microfab single ejector was used. For the experiment, the head was filled with nano silver ink (20wt%). In order to generate waveform voltage for jetting signal, the Agilent 33120 was used in order to generate arbitrary waveform. For the driver, PZD 350 from TREK was used in order to amplify the waveform. Experimental results show that the designed circuit can effectively detect the pressure wave in the inkjet head.

Deformation of the shadow mask is one of the problems encountered during the deposition of organic materials for manufacturing large size organic light emitting diode (OLED). The larger the glass substrate, the larger the shadow mask becomes. As the size of the shadow mask increases, its deformation becomes more severe, thereby making it difficult to deposit organic materials in a precise pattern on a substrate. In this paper, a new method for reducing drooping of the shadow mask for large size OLED vapor depositions is proposed. The proposed shadow mask with cross stripe wires has higher stiffness than the pure shadow mask, which results in reducing drooping of the shadow mask. A commercial FEM program, ANSYS, is used for the evaluation of the proposed shadow mask. The analysis showed that the shadow mask with cross stripe wires have an effect on reducing drooping about 18.6% or more.

The LGP with nanometer structures resulted in enhancement of optical efficiency. Its fundamental mechanism is to recycle the polarized light via one round-trip through QWP(Quarter-Wave Plate) but the maximum efficiency to reach with this method is limited up to 2. To get the larger efficiency than this limited one a LGP with nanometer-patterned grating is suggested. For its optimum design the computer simulation is performed and suggests a grating that the spatial frequency between adjacent patterns is 500nm, its height 250nm, duty cycle 50%, and its cross section is rectangular. On the basis of simulation results the LGP with nanometer-patterned grating is fabricated and its optical properties such as angular intensity distribution and CIE color coordinates are characterized. The angles of transmitted light are nearly the same as the results expected from the generalized Snell's law. Thus the Mathematica code, developed in this experiment, will be applied to designing the optimized LGP. The LGP with nanometer-patterened grating shows the enhancement of transmitted intensity distribution up to 4.9 times.

Tips of probe card were fabricated using MEMS technology. P-type silicon wafer with $SiO_2$ layer was used as a substrate for fabricating the probe card. Ni-Cr and Au used as seed layer for electroplating Ni were deposited on the silicon wafer. Line patterns for probing devices were formed on silicon wafer by electroplating Ni through mold which formed by MEMS technology. Bridge structure was formed by wet-etching the silicon substrate. AZ-1512 photoresist was used for protection layer of back side and DNB-H100PL-40 photoresist was used for patterning of the front side. The mold with the thickness of $60{\mu}m$ was also formed using THB-120N photoresist and probe tip with thickness of $50{\mu}m$ was fabricated by electroplating process.

Feasibility test for radical reactions in organic light emitting diode(OLED) has been applied on OLED consisting of hole transport layer(HTL) and electron transport layer(ETL). Organic molecules such as 4,4',-Bis[N-(1-naphthyl)-N-phenylamino] biphenyl(NPD) and 4,4',4"-tris(3-methylphenylphenylamino)triphenylamine(m-MTDATA) are chosen for hole transport layer(HTL) and Bathocuproine(BCP) for electron transport layer(ETL) in this study. Informations on energy and shape of frontier orbitals and data on radical reactions of simple aromatics from semiconductor($TiO_2$) photocatalysis have provided basis for determining feasibility for radical reactions in OLED. The outcome of our feasibility test would be useful in designing optimum molecule for organic layer with a view to extending the lifetime of OLED.

The kinematics and control problem of a visual alignment system is investigated, which plays a crucial role in the fabrication process of flat panel displays. The first solution is the inverse kinematics of a 4PPR parallel alignment mechanism. It determines the driving distance of each joint to compensate the misalignment between mask and panel. Second, an efficient vision algorithm for fast alignment mark recognition is suggested, where by extracting essential feature points to represent the geometry of a mark, the geometric template matching enables much faster object recognition comparing with the general template matching. Finally, the overall visual alignment process including the kinematic solution, vision algorithm, and joint control is implemented and experimental results are given.

This paper deals with a performance analysis of real-time control systems, which engages DMR(dual modular redundancy) to detect transient errors and checkpointing technique to tolerate transient errors. Transient errors are caused by transient faults and the most significant type of errors in reliable computer systems. Transient faults are assumed to occur according to a Poisson process and to be detected by a dual modular redundant structure. In addition, an equidistant checkpointing strategy is considered. The probability of the successful task completion in a real-time control system where periodic checkpointing operations are performed during the execution of a real-time control task is derived. Numerical examples show how checkpoiniting scheme influences the probability of task completion. In addition, the result of the analysis is compared with the simulation result.

In this paper, we consider the problem of designing decentralized sliding mode static output feedback control laws for a class of large scale systems with mismatched uncertainties. We derive a sufficient condition for the existence of a linear switching surface in terms of constrained linear matrix inequalities(LMIs), and we parameterize the linear switching surfaces in terms of the solution matrices to the given constrained LMI existence conditions. We also give an LMI-based algorithm for designing decentralized switching feedback control laws. Finally, we give a design example in order to show the effectiveness of our method.

To effectively cope with a complexity of kinematic metrology due to workspace enlargement of the planar stage, the linear induction motor is suggested as its new driving source. Especially, the linear induction motor under uniform plate type of secondary doesn't inherently have a periodical force ripple which is generally shown in the brushless DC motor. But, it presents a poor transient characteristic at zero or low speed zone owing to time delay of flux settling, resulting in slow response. To improve the servo property of linear induction motor and apply successfully it to the precision stage, this paper discusses a modified vector control methodology. The controller has a novel input form, fixed d-axis current, q-axis current and forward-fed DC current, to control thrust force and normal force of the linear induction motor independently. Influence of the newly introduced input and the feasibility of controller are validated experimentally.

We propose a new path planning method for autonomous mobile robots. To maximize the utility of mobile robots, the collision-free shortest path should be generated by on-line computation. In this paper, we develop an effective and practical method to generate a good solution by lower computation time. The initial path is obtained from skeleton graph by Dijkstra's algorithm. Then the path is improved by changing the graph and path dynamically. We apply the dynamic programming algorithm into the stage of improvement. Simulation results are presented to verify the performance of the proposed method.

Recently, robot technology is actively going on progress to the field of various services such as home care, medical care, entertainment, and etc. Because these service robots are in use nearby person, they need to be operated safely even though hardware and software faults occur. This paper proposes a Fault-Tolerant middleware for a robot system, which has following two characteristics: supporting of heterogeneous network interface and processing of software components and network faults. The Fault-Tolerant middleware consists of a Service Layer(SL), a Network Adaptation Layer(NAL), a Network Interface Layer(NIL), a Operating System ion Layer(OSAL), and a Fault-Tolerant Manager(FTM). Especially, the Fault-Tolerant Manager consists of 4 components: Monitor, Fault Detector, Fault Notifier, and Fault Recover to detect and recover the faults effectively. This paper implements and tests the proposed middleware. Some experiment results show that the proposed Fault-Tolerant middleware is working well.

This paper presents a new robot calibration algorithm with joint stiffness parameters for the enhanced positioning accuracy of industrial robot manipulators. This work is towards on-going development of an industrial robot calibration software which is able to identify both the kinematic and non-kinematic robot parameters. In this paper, the conventional kinematic calibration and its important considerations are briefly described first. Then, a new robot calibration algorithm which simultaneously identifies both the kinematic and joint stiffness parameters is presented and explained through a computer simulation with a 2 DOF manipulator. Finally, the developed algorithm is implemented to Hyundai HX165 robot and its resulting improvement of the positioning accuracy is addressed.