Abstract
To effectively cope with a complexity of kinematic metrology due to workspace enlargement of the planar stage, the linear induction motor is suggested as its new driving source. Especially, the linear induction motor under uniform plate type of secondary doesn't inherently have a periodical force ripple which is generally shown in the brushless DC motor. But, it presents a poor transient characteristic at zero or low speed zone owing to time delay of flux settling, resulting in slow response. To improve the servo property of linear induction motor and apply successfully it to the precision stage, this paper discusses a modified vector control methodology. The controller has a novel input form, fixed d-axis current, q-axis current and forward-fed DC current, to control thrust force and normal force of the linear induction motor independently. Influence of the newly introduced input and the feasibility of controller are validated experimentally.
