The test equipment becomes more important with the development of semiconductor industry. MEMS probe is an important testing component to detect the defects from the generated electric signal when it contacts the metal pad of semiconductor devices. Ni-Pd alloy has been paid attention to as a candidate of MEMS probe material because of its high surface hardness and relatively low resistivity. In this study, electroplated Ni-Pd alloy has been prepared by using ethylene diamine as a complexing agent. Solid solution alloy coating could be formed when concentration of palladium chloride and current density were in the ranges of 1~5 mM and $0.2{\sim}1.5A/dm^2$, respectively. The increase of current density brought about an decrease in palladium content, which made both of lattice parameter and grain size smaller. As a result of grain refinement, high hardness could be obtained. However, surface cracking was observed due to residual stress when the current density was above $1.3A/dm^2$. When effects of heat treatment temperature on hardness and sheet resistance were investigated, the accompanied grain growth decreased both of them. The decrease of hardness remained stable at a temperature of $200^{\circ}C$. The sheet resistance was drastically reduced at $100^{\circ}C$. After that, it was found to become constant.

The thermal barrier coating (TBC) for inner wall of liquid-fuel rocket combustor consists of NiCrAlY as bonding layer and $ZrO_2$ as a top layer. In most case, the plasma spray coating is used for TBC process and this process has inherent possibility of cracking due to large difference in thermal expansion coefficients among bonding layer, top layer and metal substrate. In this paper, we suggest crack-free TBC process by using a precise electrodeposition technique. Electrodeposited Ni-P/Cr double layer has similar thermal expansion coefficient to the Cu alloy substrate resulting in superior thermal barrier performance and high temperature oxidation resistance. We studied the effects of phosphorous concentrations (2.12 wt%, 6.97 wt%, and 10.53 wt%) on the annealing behavior ($750^{\circ}C$) of Ni-P samples and Cr double layered electrodeposits. Annealing temperature was simulated by combustion test condition. Also, we conducted SEM/EDS and XRD analysis for Ni-P/Cr samples. The results showed that the band layers between Ni-P and Cr are Ni and Cr, and has no formed with heat treatment. These band layers were solid solution of Cr and Ni which is formed by interdiffusion of both alloy elements. In addition, the P was not found in it. The thickness of band layer was increased with increasing annealing time. We expected that the band layer can improve the adhesion between Cr and Ni-P.

In this experiment, post-nitriding treatment was performed at $400^{\circ}C$ on AISI 316 stainless steel which was plasma carburized previously at $430^{\circ}C$ for 15 hours. Plasma nitriding was implemented on AISI 316 stainless steel at various gas compositions (25% $N_2$, 50% $N_2$ and 75% $N_2$) for 4 hours. Additionally, during post nitriding Ar gas was used with $H_2$ and $N_2$ to observe the improvement of surface properties. After treatment, the behavior of the hybrid layer was investigated by optical microscopy, X-ray diffraction, and micro-hardness testing. Potentiodynamic polarization test was also used to evaluate the corrosion resistance of the samples. Meanwhile, it was found that the surface hardness increased with increasing the nitrogen gas content. Also small percentage of Ar gas was introduced in the post nitriding process which improved the hardness of the hardened layer but reduced the corrosion resistance compared with the carburized sample. The experiment revealed that AISI 316L stainless steel showed better hardness and excellent corrosion resistance compared with the carburized sample, when 75% $N_2$ gas was used during the post nitriding treatment. Also addition of Ar gas during post nitriding treatment degraded the corrosion resistance of the sample compared with the carburized sample.

The cost for maintenance (replacement cost) of Ni-superalloy components in plant industry is very expensive because of high unit price of INCONEL 718. A development of repairing technology using kinetic spray process can be very helpful for reducing the maintenance cost. However, it is very difficult to produce well-deposited INCONEL 718 layer showing high interfacial bond strength via kinetic spraying. Thus, INCONEL 718 was deposited on SCM 440 substrate and the interfacial properties were investigated, in order to elucidate the cause of hindrance to the bonding between INCONEL 718 layer and SCM 440 substrate. As a result, it was revealed that the dominant obstacle to the interfacial bonding was excessive compressive residual stress accumulated in the coating layer, resulting from low plastic-deformation susceptibility of INCONEL 718. Nevertheless, the bonding state was enhanced by the post heat-treatment through relieving the residual stress and generating a diffusion/metallurgical bonding between the INCONEL 718 deposit and SCM 440 substrate.

The purpose of this study was to investigate effects of TiN coating on the fatigue fracture of dental implant system with various cyclic loads. TiN coated abutment screw, the fixture, and abutment of internal hex type were prepared for fatigue test. The fatigue test was carried out according to ISO 14801:2003(E) using tensile and compression tester with repeated load from 30% to 80% of static fracture force. Morphology and fractured surface was observed by field emission scanning electron microscope(FE-SEM) and energy dispersive X-ray spectroscope(EDS). The fracture cycle drastically decreased as repeated load increased. Especially, in the case of TiN-coated abutment screw, fracture cycle increased compared to non-coated abutment screw. The fatigue crack was propagated fast as repeated load increased. The plastic deformation region decreased, whereas, cleavage fracture region increased as repeated load increased.

Indium tin zinc oxide (ITZO) thin films were deposited on glass and quartz substrates by RF magnetron sputtering. The substrate temperature varied from $100^{\circ}C$ to $400^{\circ}C$. The structural and optical properties of thin films were investigated by X-ray diffraction (XRD), Field Emission Scanning electron microscopy (FESEM) and UV-Visible transmission spectra. It has been found from X-ray diffraction patterns that increasing the substrate temperature, the amorphous structure changes into polycrystalline structure. The FESEM results showed that all ITZO thin films have a smooth surface. The average optical transmittance (400 - 800 nm) was 82% and 80% at all films deposited at $200^{\circ}C$. The band gap energy ranges 3.41 to 3.57eV and 2.81 to 3.44eV with a maximum value at $200^{\circ}C$ all substrates temperature.

Nanocrystalline diamond(NCD) coated aluminium plates were prepared and applied as heat sinks for LED modules. NCD films were deposited on 1 mm thick Al plates for times of 2 - 10 h in a microwave plasma chemical vapor deposition reactor. Deposition parameters were the microwave power of 1.2 kW, the working pressure of 90 Torr, the $CH_4/Ar$ gas ratio of 2/200 sccm. In order to enhance diamond nucleation, DC bias voltage of -90 V was applied to the substrate during deposition without external heating. NCD film was identified by X-ray diffraction and Raman spectroscopy. The Al plates with about 300 nm thick NCD film were attached to LED modules and thermal analysis was carried out using Thermal Transient Tester (T3ster) in a still air box. Thermal resistance of the module with NCD/Al plate was 3.88 K/W while that with Al plate was 5.55 K/W. The smaller the thermal resistance, the better the heat emission. From structure function analysis, the differences between junction and ambient temperatures were $12.1^{\circ}C$ for NCD/Al plate and $15.5^{\circ}C$ for Al plate. The hot spot size of infrared images was larger on NCD/Al than Al plate for a given period of LED operation. In conclusion, NCD coated Al plate exhibited better thermal spreading performance than conventional Al heat sink.

Pd-functionalized ${\beta}-Bi_2O_3$ nanowires are synthesized by thermal evaporation of Bi powder using VLS mechanism followed by Pd coating and annealing. In this study, sensing properties of Pd-functionalized ${\beta}-Bi_2O_3$ nanowires sensor to selected concentrations of $NO_2$ gas were examined. Scanning electron microscopy showed that the nanowires with diameters in a range of 100 - 200 nm and lengths of up to a few tens of micrometers. Transmission electron microscopy and X-ray diffraction confirmed that the products corresponded to the nanowires of ${\beta}-Bi_2O_3$ crystals and Pd nanoparticles. Pd-functionalized ${\beta}-Bi_2O_3$ nanowires sensor showed an enhanced sensing performance to $NO_2$ gas compared to as-synthesized ${\beta}-Bi_2O_3$ nanowires sensor. As synthesized and Pd-functionalized ${\beta}-Bi_2O_3$ nanowire sensors showed responses of 178% - 338% and 196% - 535% at $300^{\circ}C$, respectively, to 0.05 - 2 ppm $NO_2$. In addition, the underlying mechanism of the enhancement of the sensing properties of ${\beta}-Bi_2O_3$ nanowires by Pd-functionalization is discussed.

Multiwall carbon nanotubes are synthesized by using VLS mechanism for the application to $H_2$ gas sensor. MWCNT is not suitable for hydrogen gas sensor due to its low response to the gas. To enhance the gas sensing performance, multiwall carbon nanotubes are coated with $TiO_2$ nanoparticles. Scanning electron microscopy and Transmission electron microscopy showed that the synthesized MWCNT were well dispersed with the diameter and wall thickness of approximately 10-30nm and 5nm, respectively. The MWCNT sensor showed the sensitivities of 1.33-9.5% for the $H_2$ concentration of 100-5000ppm at room temperature. These sensitivities are significantly improved to 6.64-46.65% by coating $TiO_2$ nanoparticles to the MWCNT sensor. The mechanisms of $H_2$ gas sensing improvement of the MWCNT sensor coated with $TiO_2$ nanoparticles are discussed.

Rare-earth zirconates, such as $La_2Zr_2O_7$ and $Gd_2Zr_2O_7$, have been investigated as one of the candidates for replacing conventional yttria-stabilized zirconia (YSZ) for thermal barrier coating (TBC) applications at higher turbine inlet temperatures. In this study, double-ceramic-layer (DCL) TBCs of YSZ 1st layer and $La_2Zr_2O_7$ top coat layer are fabricated by suspension plasma spray with serial liquid feeders. Microstructures, hardness profiles, and thermal durability of DCL-TBCs are also characterized. Fabricated DCL-TBCs of YSZ/$La_2Zr_2O_7$ exhibit excellent properties, such as adhesion strength (>25 MPa) and electrical thermal fatigue (~1429 cycles), which are comparable with TBCs fabricated by atmospheric plasma spray.

We investigated the diffusion behaviors, electrical properties, microstructures, and composition of In-Ga-Zn-O (IGZO) oxide thin films deposited by radio frequency reactive magnetron sputtering with increasing annealing temperatures. The samples were deposited at room temperature and then annealed at 300, 400, 500, 600 and $700^{\circ}C$ in air ambient for 2 h. According to the results of time-of-flight secondary ion mass spectrometry and X-ray photoelectron spectroscopy, no diffusion of In, Ga, and Zn components were observed at 300, 400, 500, $600^{\circ}C$, but there was a diffusion at $700^{\circ}C$. However, for the sample annealed at $700^{\circ}C$, considerable diffusion occurred. Especially, the concentration of In and Ga components were similar at the IGZO thin film but were decreased near the interface between the IGZO and glass substrate, while the concentration of Zn was decreased at the IGZO thin film and some Zn were partially diffused into the glass substrate. The high-resolution transmission electron microscopy results showed that a phase change at the interface between IGZO film and glass substrate began to occur at $500^{\circ}C$ and an unidentified crystalline phase was observed at the interface between IGZO film and glass substrate due to a rapid change in composition of In, Ga and Zn at $700^{\circ}C$. The best values of electron mobility of $15.5cm^2/V{\cdot}s$ and resistivity of $0.21{\Omega}cm$ were obtained from the sample annealed at $600^{\circ}C$.

The aim of this paper is to determine the proper heat treatment temperature for SDSS tube production without ${\sigma}$-phase precipitation. When Mother steel tube was heat treated at $800^{\circ}C$ temperature, relatively a large amount of ${\sigma}$-phase precipitated and grain refinement of ferrite phase occurred simultaneously. However, in Pilgered and Drawn steel tubes, grain refinement of the ferrite phase did not occur and a small amount of ${\sigma}$-phase precipitated. For all three types of steel tubes, the pitting potential was reduced to 2/5 or less compared with the untreated one and corrosion also occurred in the salt spray test due to the precipitation of ${\sigma}$-phase. When heat treatment temperature was $900^{\circ}C$, grain refinement of the ferrite phase occurred and very little ${\sigma}$-phase precipitated in Pilgered and Drawn steel tubes. But when heat treatment was done at $1,000^{\circ}C$ temperature, all three types of steel tubes had a similar corrosion properties of that of untreated one and also corrosion did not occur in the salt spray test, as ${\sigma}$-phase did not precipitate. Therefore, the optimum heat treatment temperature range is determined to be more than $1000^{\circ}C$ for the SDSS at which corrosion does not occur.

Recently, the production of oil and gas at the arctic ocean and offshore has been growing. Accordingly, S500 steel with the high tensile strength and excellent toughness has been used and flux cored wire that can be welded to the S500 has been required. In this study, we carried out observation of microstructures, mechanical properties and CTOD (crack tip openning displacement) in the weld zone that GMA (gas metal arc) welded with different component of $TiO_2$ flux core wire (the main components, rutile or Ti-slag) for S500 steel. Weld zone produced with Ti-slag flux cored wire has formed a enough acicular ferrite and shown excellent impact toughness at $-40^{\circ}C$, tensile strength at room temperature and CTOD at $-20^{\circ}C$. As a result, the developed flux cored wire was suitable for S500 steel.

In this paper, arc Zn thermal spray coating was carried out on the SS400 steel, and then various electrochemical characteristics and surface damage behavior of Zn thermal spray coating layer were analyzed. As the results, the potential of Zn thermal spray coating layer presented driving voltage above 300 mV compare to that of SS400 steel. The passivity characteristic in anodic polarization curve was not presented. It was adequate to as sacrificial anode material. In the surface damage after galvanostatic experiments, uniform corrosion tendency of Zn thermal spray coating layer was clearly observed with acceleration of the dissolution reaction. In conclusion, Zn thermal spray coating could be determined to represent the corrosion protection effect by stable sacrificial anodic cathodic protection method in seawater because it had sufficient driving voltage and uniform corrosion damage tendency for the SS400 steel.

In this paper, arc thermal spray coating was conducted onto the SS400 steel using Inconel 625 wires in order to improve the durability of marine steel structures, and then investigated cavitation damage behavior of Inconel 625 coating layer in sea water. For the Inconel 625 coating layer, surface hardness appeared similar to that of existing high velocity oxy-fuel coating technology with 380~480 HV, but the porosity of about 6 % was larger relatively. During the cavitation experiment, pit damages were originated and grown at the rough surface and pore defect area of Inconel 625 coating layer. And, after the 72 hours of experimental time, weight loss of Inconel 625 coating layer exhibited gradually increasing tendency due to surface damage effect of the undercut.

Stainless steel has poor corrosion resistance in marine environment due to the breakdown of a passive film caused by chloride. It suffers electrochemical corrosion like pitting corrosion, crevice corrosion, and stress corrosion crack (SCC) in marine environment. In general, it indicates that the passive film of $Al_2O_3$ has better corrosion resistance than that of $Cr_2O_3$ in seawater. This paper investigated the damage behavior 304 stainless steel and hot-dip aluminized 304 stainless steel in seawater solution. Various electrochemical experiments were carried out including potential measurement, potentiodynaimic experiment, Tafel analysis and galvanostatic experiment. As a result of anodic polarization experiment, higher pitting damage depth was indicated at 304 stainless steel than hot-dip aluminized 304 stainless steel. In addition, relatively higher corrosion current density was shown at hot-dip aluminized stainless steel as a result of Tafel analysis.

As the size of the semiconductor devices shrinks to nanometer scale, the importance of plasma etching process to the fabrication of nanometer scale semiconductor devices is increasing further and further. But for the nanoscale devices, conventional plasma etching technique is extremely difficult to meet the requirement of the device fabrication, therefore, other etching techniques such as use of multi frequency plasma, source/bias/gas pulsing, etc. are investigated to meet the etching target. Until today, various pulsing techniques including pulsed plasma source and/or pulse-biased plasma etching have been tested on various materials. In this review, the experimental/theoretical studies of pulsed plasmas during the nanoscale plasma etching on etch profile, etch selectivity, uniformity, etc. have been summarized. Especially, the researches of pulsed plasma on the etching of silicon, $SiO_2$, and magnetic materials in the semiconductor industry for further device scaling have been discussed. Those results demonstrated the importance of pulse plasma on the pattern control for achieving the best performance. Although some of the pulsing mechanism is not well established, it is believed that this review will give a certain understanding on the pulsed plasma techniques.