• Journal of Power Electronics
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• 제17권2호
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• pp.561-569
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• 2017

Power converter design requires simulation accuracy. In addition to the requirement of accurate models of power semiconductor devices, this paper highlights the role of considering a very good description of the converter circuit layout for an accurate simulation of its electrical behavior. This paper considers a simple experimental circuit including one switching cell where a MOSFET transistor controls the diode under test. The turn-off transients of the diode are captured, over which the circuit wiring has a major influence. This paper investigates the necessity for accurate modeling of the experimental test circuit wiring and the MOSFET transistor. It shows that a simple wiring inductance as the circuit wiring representation is insufficient. An adequate model and identification of the model parameters are then discussed. Results are validated through experimental and simulation results.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1993년도 추계학술대회 논문집
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• pp.29-34
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• 1993

In this paper, we used one-dimensional process simulator, SUPREM-II, and two-dimensional device simulator, MINIMOS 4.0 to extract optimal process parameter that can minimize degradation of device characteristics caused by process parameter variation in the case of short channel nMOSFET and pMOSFET device. From this simulation, we have derieved the relationship between process parameter and device characteristics. Here we have presented a method to extract process parameters from design trend curve(DTC) obtained by process and device simulations. We parameters to verify the validity of the DTC method. The experimental result of 0.8 $\mu\textrm{m}$ channel length devices that have been fabricated with optimal that reduces short channel effects, that is, good drain current-voltage characteristics, low body effects and threshold voltage of 1.0 V, high punchthrough and breakdown voltage of 12 V, low subthreshold swing(S.S) values of 105 mV/decade.

• 전자공학회논문지A
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• 제30A권2호
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• pp.53-63
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• 1993

Device degradations by the Fowler-Nordheim tunneling have been studide. The changes of device characteristics such as the threshold voltage, subthreshold slope, I-.or. curves have been measured after bidirectionally stressing n-channel MOSFET's and p-channel MOSFET's. Also the interface states have been directly measured by the charge pumping methodIt is shown that the change of interface states is determined by the number of hole carriers tunneling the gate oxide and electrons which are trapped in the gate oxide. Also, in this paper, we propose a model for device lifetime limited by the increase of interface states.

• 전자공학회논문지A
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• 제28A권9호
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• pp.736-742
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• 1991

N$^{+}$poly gate NMOSFETs and p$^{+}$ poly gate (surface type) PMOSFETs with three different gate oxides(SiO2, NO, and ONO) were fabricated. The rapid thermal nitridation and reoxidation techniques have been applied to gate oxide formation. The current drivability of the ONO NMOSFET shows larger values than that of the SiO2 NMOSFET. The snap-back occurs at a lower drain voltage for SiO$_2$ cases for ONO NMOSFET. Under the maximum substrate current bias conditions, hot-carrier effects inducting threshold voltage shift and transconductance degradation were investigated. The results indicate that ONO films exhibit less degradation in terms of threshold voltage shift. It was confirmed that the ONO samples achieve good improvement of hot-carrier immunity. In a SiO$_2$ SC-PMOSFET, with significant boron penetration, it becomes a depletion type (normally-on). But ONO films show excellent impurity barrier properties to boron penetration from the gate.

• JSTS:Journal of Semiconductor Technology and Science
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• 제10권1호
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• pp.20-27
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• 2010

Modeling is essential to simulate the operation of integrated circuit (IC) before its fabrication. Seeing a large number of Metal-Oxide-Silicon Field-Effect-Transistor (MOSFET) models available, it has become important to understand them and compare them for their pros and cons. The task becomes equally difficult when the complexity of these models becomes very high. The paper reviews the mainstream models with their physical relevance and their comparisons. Major short-channel and quantum effects in the models are outlined. Emphasis is set upon the latest compact models like BSIM, MOS Models 9/11, EKV, SP etc.

• Journal of Electrical Engineering and Technology
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• 제9권4호
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• pp.1355-1359
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• 2014

In the proposed work a 2D analytical modeling of single halo Triple material Surrounding Gate (SH-TMSG) MOSFET is developed. The Surface potential and Electric Field has been derived using parabolic approximation method and the simulation results are analyzed. The essential substantive is provided which elicits the deterioration of short channel effects and the results of the analytical model are delineated and compared with MEDICI simulation results and it is well corroborated.

• 한국시뮬레이션학회논문지
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• 제11권1호
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• pp.23-30
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• 2002

An STI(Shallow Trench Isolation) by using a CMP(Chemical Mechanical Polishing) process has been one of the key issues in the device isolation[1] In this paper we fabricated N, P-MOSFEET tall analyse hump characteristics in various rounding oxdation thickness(ex : Skip, 500, 800, 1000$\AA$). As a result we found that hump occurred at STI channel edge region by field oxide recess. and boron segregation(early turn on due to boron segregatiorn at channel edge). Therefore we improved that hump occurrence by increased oxidation thickness, and control field oxide recess( 20nm), wet oxidation etch time(19HF,30sec), STI nitride wet cleaning time(99HF, 60sec+P 90min) and fate pre-oxidation cleaning time (U10min+19HF, 60sec) to prevent hump occurring at STI channel edge.

• 한국정보전자통신기술학회논문지
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• 제16권4호
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• pp.173-179
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• 2023

본 논문에서는 4세대 VNAND 공정으로 만들어진 Peri 소자의 스트레스 영역 별 time-dependent dielectric breakdown(TDDB) 열화 메커니즘을 분석하고, 기존의 수명 예측 모델보다 더 넓은 신뢰성 평가 영역에서 신속성과 정확성을 향상시킬 수 있는 수명 예측 보완 모델을 제시하였다. SiON 절연층 nMOSFET에서 5개의 Vstr 조건에 대해 각 10번의 constant voltage stress(CVS) 측정 후, stress-induced leakage current(SILC) 분석을 통해 저전계 영역에서의 전계 기반 열화 메커니즘과 고전계 영역에서의 전류 기반 열화 메커니즘이 주요함을 확인하였다. 이후 Weibull 분포로부터 time-to-failure(TF)를 추출하여 기존의 E-모델과 1/E-모델의 수명 예측 한계점을 확인하였고, 각 모델의 결합 분리 열화 상수(k)를 추출 및 결합하여 전계 및 전류 기반의 열화 메커니즘을 모두 포함하는 병렬식 상호보완 모델을 제시하였다. 최종적으로 실측한 TDDB 데이터의 수명을 예측할 시, 기존의 E-모델과 1/E-모델에 비해 넓은 전계 영역에서 각 메커니즘을 모두 반영하여 높은 스트레스에서 신속한 신뢰성 평가로 더 정확한 수명을 예측할 수 있음을 확인하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.301.2-301.2
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• 2014

집적회로의 밀도가 높이기 위해 단일 소자의 크기를 줄이는 과정에서 발생하는 소자의 성능 저하를 줄이기 위해 새로운 구조 및 구성 물질을 변경하는 연구가 활발하게 진행되고 있다. 기존의 평면 구조를 변형한 3차원 구조의 n-channel FinFet는 소자의 구성 물질을 바꾸지 않고도 쇼트 채널효과와 누설전류를 줄일 수 있다. 다양한 구조의 유전 물질을 응용한 n-channel FinFEET은 기존의 n-channel FinFET보다 소자의 크기를 줄일 수 있는 가능성을 제시하고 있다. FinFETs에 관한 많은 연구가 진행되어 왔지만, 유전체 물질을 이용한 n-channel FinFETs의 구조에 대한 연구는 매우 적다. 본 연구는 FinFET의fin channel 영역에 유전 물질을 삽입하여 그 영향을 분석한 연구이다. FinFET의 fin channel 영역에 유전 물질을 삽입하여 평면 구조의 MOSFET에서 fully depletion SOI 구조와 같은 동작을 하도록 만들었다. 유전 물질을 삽입한 FinFET 소자의 전기적 특성을 3차원 TCAD 시뮬레이션을 툴을 이용하여 계산하였다. 유전 물질을 삽입한 n-channel FinFET에서 전자 밀도와 측면 전계의 영향이 기존의 FinFET보다 좋은 특성을 확인하였다. 또한 유전물질을 삽입한 FinFETs은 subthershold swing, 누설전류, 소비전력을 줄여 주었다. 이러한 결과는 n-Channel FinFETs의 성능을 향상시키는데 많은 도움이 될 것이다.

• 센서학회지
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• 제28권3호
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• pp.152-156
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• 2019

An ultraviolet (UV) image sensor is an extremely important optoelectronic device used in scientific and medical applications because it can detect images that cannot be obtained using visible or infrared image sensors. Because photodetectors and transistors are based on different materials, conventional UV imaging devices, which have a hybrid-type structure, require additional complex processes such as a backside etching of a GaN epi-wafer and a wafer-to-wafer bonding for the fabrication of the image sensors. In this study, we developed a monolithic GaN UV passive pixel sensor (PPS) by integrating a GaN-based Schottky-barrier type transistor and a GaN UV photodetector on a wafer. Both individual devices show good electrical and photoresponse characteristics, and the fabricated UV PPS was successfully operated under UV irradiation conditions with a high on/off extinction ratio of as high as $10^3$. This integration technique of a single pixel sensor will be a breakthrough for the development of GaN-based optoelectronic integrated circuits.