• Journal of the Microelectronics and Packaging Society
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• v.9 no.4
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• pp.17-23
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• 2002

The more productive and stable fabrication can be obtained by applying chemical mechanical polishing (CMP) process to shallow trench isolation (STI) structure in 0.18 $\mu\textrm{m}$ semiconductor device. However, STI-CMP process became more complex, and some kinds of defect such as nitride residue, tern oxide defect were seriously increased. Defects like nitride residue and silicon damage after STI-CMP process were discussed to accomplish its optimum process condition. In this paper, we studied how to reduce torn oxide defects and nitride residue after STI-CMP process. To understand its optimum process condition, We studied overall STI-related processes including trench depth, STI-fill thickness and post-CMP thickness. As an experimental result showed that as the STI-fill thickness becomes thinner, and trench depth gets deeper, more tern oxide were found in the CMP process. Also, we could conclude that low trench depth whereas high CMP thickness can cause nitride residue, and high trench depth and over-polishing can cause silicon damage.

• Journal of the Korean Geotechnical Society
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• v.35 no.5
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• pp.21-30
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• 2019

While the study of the shallow tunnel has been mainly on the longitudinal load transfer and horizontal surface conditions, the study of the ground behavior of shallow tunnel under the slope is not sufficient. Therefore, in this study on the ground behavior around a tunnel due to the sidewall deformation of shallow tunnel under the slope that is excavated in longitudinal direction, a scale-down model test has been performed. The model tunnel has the dimension of 320 mm wide, 210 mm high and 55 mm long with enough material strength in aluminum and the model ground has the uniform ground conditions by 3 types of carbon rods. The model test has been performed with the variables of slopes and the cover depths by controlling the tunnel sidewall deformation, and the change of sidewall-load, load transfer, ground subsidence was monitored and analyzed. According to the increase of the slope, the maximum ground subsidence increased by 20~39% compared to the horizontal surface. The load ratio increased by maximum 20% in the tunnel crown and decreased in sidewall according to the surface slope. The load transfer shows maximum 128% of increase at the cover depth of 1.0D, while at the 1.5D cover depth it shows non-critical difference from horizontal surface. The slope has major effects on load transfer at the cover depth of 1.0D.

• Journal of the Korea institute for structural maintenance and inspection
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• v.24 no.6
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• pp.129-137
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• 2020

In performing the structural analysis, the foundation is considered to be a fixed end as a plastic hinge model. In this study, the displacements of the foundation, pier, and shoe were compared when the foundation modeled as a fixed end, a shallow foundation constructed on bedrock of 2m depth, and a pile foundation constructed in the 10m to 20m depth of bedrock. The shear force was also compared, and the probability of damage was calculated and compared for the critical condition. When calculated as a fixed end, the displacement of the foundation converged to 0mm, but the shallow foundation built on the bedrock with a depth of 2m caused relatively displacement, and the pile foundation constructed to contact the bedrock with a depth of 18m caused a larger displacement. In addition, it was analyzed that the displacement of the foundation, which is the lower structure, affects the displacement of the super structure, but the difference in shear force applied to the foundation was insignificant in the three cases. There was no difference between the shallow foundation and the pile foundation in the influence on the displacement of the top of the pier, but there was a big difference from the analysis assuming as a fixed end.

• Proceedings of the Korea Water Resources Association Conference
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• 2006.05a
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• pp.1935-1939
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• 2006

In this study, the new dispersion-correction terms are added to leap-frog finite difference scheme for the linear shallow-water equations with the purpose of considering the dispersion effects such as linear Boussinesq equations for the propagation of tsunamis. And, dispersion-correction factor is determined to mimic the frequency dispersion of the linear Boussinesq equations. The numerical model developed in this study is tested to the problem that initial free surface displacement is a Gaussian hump over a constant water depth, and the results from the numerical model are compared with analytical solutions. The results by present numerical model are accurate in comparison with the past models.

• JSTS:Journal of Semiconductor Technology and Science
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• v.10 no.4
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• pp.260-264
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• 2010

In this paper, Ni silicide is formed on boron cluster ($B_{18}H_{22}$) implanted source/drains for shallow junctions of nano-scale CMOSFETs and its thermal stability is improved, using vacuum annealing. Although Ni silicide on $B_{18}H_{22}$ implanted Si substrate exhibited greater sheet resistance than on the $BF_2$ implanted one, its thermal stability was greatly improved using vacuum annealing. Moreover, the boron depth profile, using vacuum post-silicidation annealing, showed a shallower junction than that using $N_2$ annealing.

• Proceedings of the Korean Geotechical Society Conference
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• 2000.11a
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• pp.261-268
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• 2000

In this study the bearing capacity of the eccentrically loaded shallow footing is estimated by means of the upper bound method of limit analysis. In the case of applying the upper bound, the results depend on the failure mechanism. So the failure surface is correctly studied through the model test using sand. New method is proposed to estimate the bearing capacity of the eccentrically loaded shallow footing by means of the upper bound method to apply the failure mechanism based on the model test. The propriety of new method is verified by the results of various methods. And the influences of the variables eccentricity, embedment depth, variations of contact width factor by model test using sand are also studied in this paper

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.7
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• pp.1005-1013
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• 2002

Spin-up is a transient flow phenomenon occurring in a container when it starts to rotate from rest or its rotational speed increases from a low to high value. However, most studies on this subject have been for two-dimensional approximation. In this study, spin-up flows in a shallow rectangular container are analysed by using three-dimensional computation. We compared our results with those obtained by others using basically two-dimensional computation. Effect of two parameters, Reynolds number and liquid depth on the flow evolution is studied. We found that 2-D result is not accurate enough, and the vertical velocity distribution should be assumed of a fourth-order polynomial function for a better comparison.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.19 no.4
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• pp.355-360
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• 2007

The process of the nonlinear shallow water wave transformation in a basin of a constant depth is studied. Characteristics of the first breaking of the wave are analyzed in details. The Fourier spectrum and steepness of the nonlinear wave are calculated. It is shown that the spectral amplitudes can be expressed using the wave front steepness, which allows the practical estimations.

• The Journal of the Acoustical Society of Korea
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• v.21 no.5
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• pp.485-493
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• 2002

Broadband interference patterns are studied using ship as an acoustic source in shallow waters with varying bathymetry. Waveguide invariant index (β) indicating the pattern of constructive (or destructive) interference in range-frequency domain is derived in a waveguide with constant bottom slope based on adiabatic mode theory. Using this invariant, changes of the interference patterns resulting from the variation of bottom bathymetry are analyzed. Results of the analytic interpretation is compared with those from sea experiments and numerical simulations.

• Journal of the Korean Geosynthetics Society
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• v.22 no.2
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• pp.1-12
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• 2023

Research on the causes of landslides and prediction of vulnerable areas is being conducted globally. This study aims to predict the effective soil depth, a critical element in analyzing and forecasting landslide disasters, using topographic information. Topographic data from various institutions were collected and assigned as attribute information to a 100 m × 100 m grid, which was then reduced through data grading. The study predicted effective soil depth for two cases: three depths (shallow, normal, deep) and five depths (very shallow, shallow, normal, deep, very deep). Three classification models, including K-Nearest Neighbor, Random Forest, and Deep Artificial Neural Network, were used, and their performance was evaluated by calculating accuracy, precision, recall, and F1-score. Results showed that the performance was in the high 50% to early 70% range, with the accuracy of the three classification criteria being about 5% higher than the five criteria. Although the grading criteria and classification model's performance presented in this study are still insufficient, the application of the classification model is possible in predicting the effective soil depth. This study suggests the possibility of predicting more reliable values than the current effective soil depth, which assumes a large area uniformly.