• 한국진공학회지
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• 제10권2호
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• pp.234-240
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• 2001

본 연구에서는 Mg을 첨가한 Cu-alloy에 의해 TiN의 확산방지능력을 향상시키고자 하였다. Cu(Mg) 박막은 대기노출시킨 TiN박막위에 증착되었으며 열처리시 Cu 박막내의 Mg은 TiN의 표면에 있는 산소와 반응하여 매우 얇은(~100 $\AA$) MgO를 형성하게되고 MgO에 의해 TiN의 확산방지능력은 Cu(4.5 at.%Mg)의 경우 $800^{\circ}C$까지 향상됨을 알 수 있었다. 그러나 Cu(Mg) a]toy는 TiN위에서 접착특성이 좋지 않기 때문에 TiN을 $O_2$plasma 처리하였으며 $O_2$ plasma 처리후 $300^{\circ}C$ 진공열처리를 통해 접착력이 크게 향상되는 것을 알 수 있었다. 이는 $O_2$ plasma 처리에 의해 TiN표면에 Mg과 반응할 수 있는 산소의 양이 증가하는 데 기인하며 이에 따라 Mg의 계면이동이 크게 증가되어 치밀한 MgO가 형성됨을 확인하였다. 그리고 $O_2$ plasma 처리시 RF power를 증가시키면 계면으로 이동하는 Mg의 양이 오히려 감소하였고 이것은 TiN의 표면이 $TiO_2$로 변하여 Mg과 결합할 수 있는 산소의 양이 상대적으로 감소하였기 때문인 것으로 생각된다. 또한 접착층으로서 Si을 50$\AA$ 증착하여 접착력을 크게 향상시켰으며 Si 증착에 의한 TiN의 확산방지능력은 감소되지 않는 것을 알 수 있었다.

• 전자공학회논문지A
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• 제32A권11호
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• pp.35-43
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• 1995

To obtain high quality of $Ta_{2}O_{5}$ film, two dielectric layers of $Si_{3}N_{4}$ and $Ta_{2}O_{5}$ were subsequently formed on Si wafer. Silicon nitride films were thermally grown in 10 Torr ammonia ambient by R.F induced heating system. The thickness of thermally grown $Si_{3}N_{4}$ film was able to be controlled in the range of tens $\AA$ due to the self-limited growth property. $Ta_{2}O_{5}$ film of 200$\AA$ thickness was then deposited on the as-grown $Si_{3}N_{4}$ film about 25$\AA$ thickness by sputtering method and annealed at $900^{\circ}C$in $O_{2}$ ambient for 1hr. Stoichiometry film was prepared by the annealing in oxygen ambient. Despite the high temperature anneal process, silicon oxide layer was not grown at the interface of the layered films because of the oxidation barrier effect of Si$_{3}$N$_{4}$ film. The fabricated $Ta_{2}O_{5}$/$Si_{3}N_{4}$ film showed low leakage current less than several nA and high dielectric breakdown strength.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.234.2-234.2
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• 2014

Organic light emitting diode (OLED) is considered as the next generation flat panel displays due to its advantages of low power consumption, fast response time, broad viewing angle and flexibility. For the flexible application, it is essential to develop thin film encapsulation (TFE) to protect oxidation of organic materials from oxidative species such as oxygen and water vapor [1]. In many TFE research, the inorganic film by atomic layer deposition (ALD) process demonstrated a good barrier property. However, extremely low throughput of ALD process is considered as a major weakness for industrial application. Recently, there has been developed a high throughput ALD, called 'spatial ALD' [2]. In spatial ALD, the precursors and reactant gases are supplied continuously in same chamber, but they are separated physically using a purge gas streams to prevent mixing of the precursors and reactant gases. In this study, the $Al_2O_3$ thin film was deposited by spatial ALD process. We characterized various process variables in the spatial ALD such as temperature, scanning speed, and chemical compositions. Water vapor transmission rate (WVTR) was determined by calcium resistance test and less than $10-^3g/m^2{\cdot}day$ was achieved. The samples were analyzed by x-ray photoelectron spectroscopy (XPS) and field emission scanning electron microscope (FE-SEM).

• Bulletin of the Korean Chemical Society
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• 제30권2호
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• pp.423-428
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• 2009

The comparative study of three calix[4]heterocycles (calix[4]pyrrole, calix[4]furan, and calix[4]thiophene) has been theoretically performed by using high-level density functional theory (DFT) at the MPWB1K/6-311G$^{**}$//B3LYP/6- 311G$^{**}$ level. The effect of different hetero-atoms (nitrogen, oxygen, and sulfur) placed in the heterocycles on the conformational flexibility, thermodynamic stability order, cavity sizes, charge distributions, and binding propensities are examined. The thermodynamic stability differences between the conformers are found to be much greater in calix[4]pyrrole compared to those in calix[4]furan and calix[4]thiophene. Relatively larger NH group and higher dipole of a pyrrole ring in calix[4]pyrrole contribute to the higher energy barrier for the conformational conversions and relatively rigid potential energy surface compared to the case of calix[4]furan and calix[4]thiophene. The computational results herein provide theoretical understanding of the conformational flexibility and the thermodynamic nature which can be applied to understand the complexation behavior of the three calix[4]heterocycles.

• 한국표면공학회지
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• 제45권3호
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• pp.117-122
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• 2012

ZTO/GZO double layered films were prepared on unheated non-alkali glass substrates. ZTO films were deposited by RF/DC hybrid magnetron co-sputtering using ZnO (RF) target and $SnO_2$ (DC) targets, and then GZO films were deposited by DC magnetron sputtering using an GZO ($Ga_2O_3$:5.57 wt%) target. These films were post-annealed at temperature of 200, $300^{\circ}C$ in air and vacuum ambient for 30 min. In the case of post-annealing in air, ZTO/GZO double layer showed relatively low resistivity change, compared to GZO single layer. Furthermore, ZTO/GZO double layer revealed low WVTR, compared to GZO single layer. Therefore, it can be confirmed that ZTO film doing a role with barrier for water or oxygen diffusion.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 학술대회 및 기술세미나 논문집 디스플레이 광소자
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• pp.78-80
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• 2006

The hybrid thin-film (HTF) passivation layer composed of the Ultra Violet (UV) curable acrylate layer and MS-31 (MgO:$SiO_2$=3:1wt%) layer was adopted in organic light emitting device (OLEO) to protect organic light emitting materials from penetrations of oxygen and water vapors. The results showed that the HTF layer possessed a very low WVTR value of lower than $0.007gm/m^{2+}day$ at $37.8^{\circ}C$ and 100% RH. This value was within the limited range of the sensitivity of WVTR measurements. And the lifetime of the HTF passivated device became almost three times longer than that of the bare device. The HTF on the OLEO was found to be very effective in protect what from the penetrations of oxygen and moisture.

• 폴리머
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• 제25권5호
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• pp.691-698
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• 2001

에폭시 (diglycidyl ether of bisphenol A: DGEBA), 경화제 (dicyandiamide; DICY), 촉매 (benzyl dimethyl amine : BDMA), 그리고 유기치환된 실리케이트 (organically modified mica type silicate: OMTS)를 용융법 및 용액법을 이용해 나노복합체를 제조하였고, $170^{\circ}C$에서 시간에 따라 경화 반응을 진행하면서 X선 회절분석기 (XRD)와 소각 X선 산란장치 (SAXS)를 이용하여 구조 변화를 관찰하였다. 용융법으로 제조된 치료의 경우 박리된 구조를 관찰할 수 없었으나 용액법에 의해 제조된 경우 박리된 구조를 관찰할 수 있었다. 이는 OMTS 층 내ㆍ외부의 경화 속도차이 때문인 것으로 생각된다. 박리된 에폭시 나노복합체의 OMTS 첨가량에 따른 기계적 물성을 동적기계적 분석기 (DMA)를 이용해 측정한 결과 OMTS의 첨가량이 증가할수록 모둘러스는 증가하였으나 유리전이온도는 큰 차이가 없었다. OMTS 첨가량에 따른 열적 성질을 열중량분석기(TGA)와 한계산소지수 (LOI)를 이용해 측정한 결과 OMTS양이 증가할수록 OMTS 판의 차단효과로 인해 열분해 시작 온도와 LOI 값이 증가하였다.

• 한국포장학회지
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• 제22권2호
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• pp.27-32
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• 2016

본 연구에서는 분말 마와 절편 마의 품질 변화를 확인하기 위해 알코올 전처리시 농도와 그 시간에 따른 차이를 비교하고, 색차, 무게, 수분함량, 당도, 부패율 변화를 측정하였다. 절편 마의 알코올 전처리는 5%, 10% 농도의 알코올을 이용하여 각각 5초, 10초씩 침지시켰으며, 포장재는 OPP ($30{\mu}m$), PET ($30{\mu}m$), ON ($30{\mu}m$)를 사용하였다. 분말 마는 저온저장을 하였을 때 품질의 변화 없이 유지되었으며 상온저장에서는 약 5일 이후 품질이 변화되었다. 또한 분말 마는 유통 중 수분의 차단을 위해 수분 차단성을 고려한 포장재 사용이 필요한 것으로 나타났으며, 절편 마의 품질유지효과는 저온저장에서 ON 필름이 가장 효과적인 것으로 나타났다. 따라서 분말 마와 절편 마의 갈변 억제를 위해서 저온저장에서 산소투과도가 낮은 소재를 사용할 경우 품질저하를 줄일 수 있을 것으로 판단된다.

• 폴리머
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• 제37권5호
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• pp.618-624
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• 2013

Trimellitic anhydride chloride와 hydroquinone을 이용하여 hydroquinone bis(trimellitate anhydride)(HQ-TA)를 합성하였다. 합성된 HQ-TA와 6가지의 다양한 디아민들을 사용하여 전구체 polyamic acid(PAA)를 합성한 후, 열적-및 화학적-이미드화 반응을 거쳐 에스터 그룹을 가지는 폴리이미드(polyimide, PI) 필름을 합성하였다. PI 합성은 구조적으로 다양한 방향족 디아민을 사용하였다. 각 디아민 구조에 따른 유리전이온도($T_g$)는 167-$215^{\circ}C$를 보였고, 초기분해온도(${T_D}^i$)는 $364-451^{\circ}C$를 나타내었다. 가장 향상된 열팽창 계수(coefficient of thermal expansion, CTE)와 가스차단성은 TFB(3.23 $ppm/^{\circ}C$)와 4,4-ODA(< $10^{-2}cc/m^2/day$) 단량체를 각각 사용하였을 때 보였다. PI 필름의 투과도는 500 nm에서 65-89%를 보였으며, 노란색 정도를 나타내는 황색지수(yellow index, YI)는 3.01-69.52를 보였다.

• Corrosion Science and Technology
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• 제14권2호
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• pp.99-105
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• 2015

The structures of reinforced concrete have been extensively increased with rapid development of industrial society. Futhermore, these reinforced concretes are easy to expose to severe corrosive environments such as seawater, contaminated water, acid rain and seashore etc.. Thus, corrosion problem of steel bar embedded in concrete is very important in terms of safety and economical point of view. In this study, specimens having six different coating thickness (W/C:0.5) were prepared and immersed in flowing seawater for five years to evaluate the effect of coating thickness and immersion time on corrosion property. The polarization characteristics of these embedded steel bars were investigated using electrochemical methods such as corrosion potential, anodic polarization curve, and impedance. At the 20-day immersion, the corrosion potentials exhibited increasingly nobler values with coating thickness. However, after 5-yr. immersion their values were shifted in the negative direction, and the relationship between corrosion potential and coating thickness was not shown. Although 5-yr. immersion lowered corrosion potential, 5-yr. immersion did not increase corrosion rate. In addition, after 5-yr. immersion, the thinner cover thickness, corrosion current density was decreased with thinning coating thickness. It is due to the fact that ease incorporation of water, dissolved oxygen and chloride ion into a steel surface caused corrosion and hence, leaded to the formation of corrosion product. The corrosion product plays the role as a corrosion barrier and increases polarization resistance. The corrosion probability evaluated depending on corrosion potential may not be a good method for predicting corrosion probability. Hence, the parameters including cover thickness and passed aged years as well as corrosion potential is suggested to be considered for better assessment of corrosion probability of reinforced steel exposed to partially or fully in marine environment for long years.