• Title/Summary/Keyword: impurity profile

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Calibration Methodology for Transient Enhanced Diffusion of indium

  • Jun Ha, Lee;Gi Ryang, Byeon;Hyeon Chan, Jo;Gwang Seon, Kim
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2003.12a
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    • pp.31-34
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    • 2003
  • We developed a new systematic calibration procedure which was applied to the calibration of the diffusivity, segregation and TED model of the indium impurity. The TED of the indium impurity has been studied using 4 different groups of experimental conditions. Although the indium is susceptible to the TED, the RTA is effective to suppress the TED effect and maintain a steep retrograde profile. Like the boron, the indium shows significant oxidation-enhanced diffusion in silicon and has segregation coefficients at the $Si/SiO_2$ interface much less than 1. In contrast, however, the segregation coefficient of indium decreases as the temperature increases. The accuracy of the proposed technique is validated by SIMS data with errors less than 5% between simulation and experiment.

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Analytical Threshold Voltage Model of Ion-Implanted MOSFET (이온 주입된 Mosfet의 문턱 전압의 해석적 모델)

  • Lee, Hyo-Sik;Jin, Ju-Hyeon;Gyeong, Jong-Min
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.22 no.6
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    • pp.58-62
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    • 1985
  • Analytical threshold voltage model of small size ion-implanted MOSFET's is proposed. Yau's model which is only applicable to MOSFET's with constant doping concentration was modified to handle the MOSFET's with nonuniform channel doping concentration and bird's beak, whereby the short and narrow-channel effect was quantitively described. Threshold voltage model for short-channel MOSFET's was derived by approximating the SUPREM result of channel impurity profile to a 2-step profile, and the narrow width be-haviour was successfully described using thr'weighting factor'to accommodate the doping profile in the bird's beak region.

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The Influence of Impurities in Room Temperature Ionic Liquid Electrolyte for Lithium Ion Batteries Containing High Potential Cathode (고전압 리튬이차전지를 위한 LiNi0.5Mn1.5O4 양극용 전해질로써 상온 이온성 액체 전해질의 불순물 효과에 관한 연구)

  • Kim, Jiyong;Tron, Artur V.;Yim, Taeeun;Mun, Junyoung
    • Journal of the Korean Electrochemical Society
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    • v.18 no.2
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    • pp.51-57
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    • 2015
  • We report the effect of the impurities including water and bromide in the propylmethylpyrrolidinium bis(trifluoromethanesulfonyl)imide (PMPyr-TFSI) on the electrochemical performance of lithium ion batteries. The several kinds of PMPyr-TFSI electrolytes with different amount of impurities are applied as the electrolyte to the cell with the high potential electrode, $LiNi_{0.5}Mn_{1.5}O_4$ spinel. It is found that the impurities in the electrolytes cause the detrimental effect on the cell performance by tracing the cycleability, voltage profile and Coulombic efficiency. Especially, the polarization and Coulombic efficiency go to worse by both impurities of water and bromide, but the cycleability was not highly influenced by bromide impurity unlike the water impurity.

Compatibility Study of Excipients for Pravastatin Tablet (Pravastatin 정제 연구를 위한 첨가제와의 적합성 연구)

  • Kim, Kang Min
    • Journal of Life Science
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    • v.28 no.4
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    • pp.472-477
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    • 2018
  • Pravastatin sodium is a 3-hydroxy-3-methylglutaryl-coenzyme A (HMG-CoA) reductase inhibitor used in the treatment of hypercholesterolemia by reducing cholesterol biosynthesis. Pharmaceutical excipients of commonly used including water, diluents, stabilizers, disintegrants, lubricants and colorants, and were identified for compatibility. All tests were performed by means of physical mixture of pravastatin and the excipients, which were placed in a press-through-pack (PTP) and incubated under accelerated conditions ($40^{\circ}C$ and 75% relative humidity) for 3 months. The blends of pravastatin with all excipients developed white, off white, and light brown powders, which showed no changes upon visual analysis. Accelerated conditions changed the degradation profile of pravastatin calcium in the HPLC system when mixed with different excipients. Although most excipients can have minor effects on pravastatin stability, the major degradation product from pravastatin was lactone. Low-level interaction (assay and impurity) was induced by all excipients except for microcrystalline cellulose and croscarmellose sodium. These excipients increased lactone impurity in 3 months by as much as 0.22% and 0.18% respectively. The total mixture slightly increased the lactone impurity (by 0.43% in 3 months) of pravastatin. There was no change in the assays of all excipients. These results will be helpful in studying tablet size reductions for convenience of use.

Relation of Conduction Path and Subthreshold Swing for Doping Profile of Asymmetric Double Gate MOSFET (비대칭 DGMOSFET의 도핑분포함수에 따른 전도중심과 문턱전압이하 스윙의 관계)

  • Jung, Hakkee
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.18 no.8
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    • pp.1925-1930
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    • 2014
  • This paper has analyzed the relation of conduction path and subthreshold swing for doping profile in channel of asymmetric double gate(DG) MOSFET. Since the channel size of asymmetric DGMOSFET is greatly small and number of impurity is few, the high doping channel is analyzed. The analytical potential distribution is derived from Possion's equation, and Gaussian distribution function is used as doping profile. The conduction path and subthreshold swing are derived from this analytical potential distribution, and those are investigated for variables of doping profile, projected range and standard projected deviation, according to the change of channel length and thickness. As a result, subthreshold swing is reduced when conduction path is approaching to top gate, and that is increased with a decrease of channel length and a increase of channel thickness due to short channel effects.

A Study on 3-D Analytical Model of Ion Implanted Profile (이온 주입된 프로파일의 3-D의 해석적인 모델에 관한 연구)

  • Jung, Won-Chae;Kim, Hyung-Min
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.25 no.1
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    • pp.6-14
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    • 2012
  • For integrated complementary metal oxide semiconductor (CMOS) circuits, the lateral spread for two-dimensional (2-D) impurity distributions are very important for the analyzing the devices. The measured two-dimensional SEM data obtained using the chemical etching-method matched very well with the results of the Gauss model for boron implanted samples. But the profiles in boron implanted silicon were deviated from the Gauss model. The profiles in boron implanted silicon were shown a little bit steep profile in the deep region due to backscattering effect on the near surface from the bombardments of light boron ions. From the simulated 3-D data obtained using an analytical model, the 1-D and 2-D data were compared with the experimental data and could be verified the justification from the experimental data. The data of 3-D model were also shown good agreements with the experimental and the simulated data. It can be used in the 3-D chip design and the analysis of microelectro-mecanical system (MEMS) and special devices.

Fabrication of Silicon Voltage Variable Capacitance Diode-(I) (VVC 다이오드의 시작연구 (I))

  • 정만영;박계영
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.5 no.3
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    • pp.9-24
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    • 1968
  • This report is concerned with the optimum design of hyper-aprupt p-n junctiea silion diode and fabriction of this diode usable for electrical tuning application. Impurity profile in the junction was assumed to clean exponential function. With this assunntion, an optimum criterion for designing standard AM radio tuning capacitor was derived. In the diffusion process, after aluminum and antimony as impurties were deposited in vacuum on a P-type silicon wafer, the diffusion was followed by loading the wafer into the high temperature furnace.

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INVESTIGATIONS ON VARIABLE WELD PENETRATIONS IN GTA WELDING OF AUSTENITIC AND MARTENSITIC STAINLESS STEELS

  • Puybouffat, Sylvain;Chabenat, Alain;Boudot, Cecile;Marya, Surendar
    • Proceedings of the KWS Conference
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    • 2002.10a
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    • pp.752-756
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    • 2002
  • Variable weld bead penetrations related to the base metal chemistry of stainless steels in GTA welding have been under constant investigations due to their industrial implications. It has been proposed that among other elements, the sulfur content of steels determines the weld pool geometry, particularly its penetration. It is suggested that the surface tension temperature gradient of steels becomes positive with appropriate dosing in sulfur and results in inward melt flow, propitious for deeper welds. However, the chemistry of industrial steels is complex due to the presence of multiple minor elements either deliberately added or remnant impurity traces. With this in view, investigations on 41 austenitic and nine martensitic stainless steels were carried to see if there existed any possible relation between the weld profile and some of the designated elements. The results suggest no direct correlation between sulfur or any other major or trace element and weld penetration. At first glance the results are contradictory to what is often asserted.

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Characteristics of N-and P-Channel FETs Fabricated with Twin-Well Structure (Twin-well 구조로 제작된 N채널 및 P채널 FET의 특성)

  • 김동석;이철인;서용진;김태형;김창일;장의구
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1992.05a
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    • pp.86-90
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    • 1992
  • We have studied the characteristics of n-and p-channel FETs with submicron channel length fabricated by twin-well process. Threshold voltage variation and potential distribution with channel ion implantation conditions and impurity profile of n-and p-channel region wee simulated using SUPREM-II and MINIMOS 4.0 simulater, P-channel FET had buried-channel in the depth of 0.15 $\mu\textrm{m}$ from surface by counter-doped boron ion implantation for threshold voltage adjustment. As a result of device measurement, we have obtained good drain saturation characteristics for 3.3 [V] opreation, minimized short channel effect with threshold voltage shift below 0.2[V], high punchthrough and breakdown voltage above 10[V] and low subthreshold value.

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CsX+ SNMS의 Matrix Effect 감소연구

  • 문환구;김동원;한철현;김영남;심태언
    • Proceedings of the Korean Vacuum Society Conference
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    • 1992.02a
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    • pp.17-18
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    • 1992
  • SIMS is an indispensable surface analysis instrument in trace element depth p profiling because of high detection sensitivity and excellent depth r resolution, however, it requires standard sample to do quantitative analysis d due to matrix effect depending on the species of impurities and sample m matricies and on the sputtering rates. A Among the SNMS technology developed to supply the deficiency, we researched i into CsX+ SNMS which improved the resul t quanti tati vely wi thout any extra epuipments. So basic SNMS functions were confirmed through matrix element composition rate a analysis using Si02 layer etc. and adaptability to trace element c concentration analysis was tried. For that purpose we compared SIMS depth profile data for Boron which presented s strong matrix effect on account of Fluorin existence after BF2 ion implantation on silicon substrate with SNMS data. d dynamic range were investigated. A After these experements we concluded that CsX+ SNMS reduced matrix effect and we could apply it to profile impurity elements.

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