• 제목/요약/키워드: DOE 기법

검색결과 56건 처리시간 0.028초

반경험적인 실험설계 기법을 이용한 CMP 공정 변수의 최적화 (Optimization of CMP Process Parameter using Semi-empirical DOE (Design of Experiment) Technique)

  • 이경진;김상용;서용진
    • 한국전기전자재료학회논문지
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    • 제15권11호
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    • pp.939-945
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    • 2002
  • The rise throughput and the stability in the device fabrication can be obtained by applying chemical mechanical polishing (CMP) process in 0.18 $\mu\textrm{m}$ semiconductor device. However, it still has various problems due to the CMP equipment. Especially, among the CMP components, process variables are very important parameters in determining the removal rate and non-uniformity. In this paper, we studied the DOE (design of experiment) method in order to get the optimized CMP equipment variables. Various process parameters, such as table and head speed, slurry flow rate and down force, have investigated in the viewpoint of removal rate and non-uniformity. Through the above DOE results, we could set-up the optimal CMP process parameters.

DOE(Design of Experiment)기법을 통한 CMP 공정 변수의 최적화 (Optimization of CMP Process parameter using DOE(Design of Experiment) Technique)

  • 이경진;박성우;박창준;김기욱;정소영;김철복;최운식;김상용;서용진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 일렉트렛트 및 응용기술
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    • pp.228-232
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    • 2002
  • The rise throughput and the stability in the device fabrication can be obtained by applying chemical mechanical polishing(CMP) process in 0.18 ${\mu}m$ semiconductor device. However it does have various problems due to the CMP equipment. Especially, among the CMP components, process variables are very important parameters in determining removal rate and non-uniformity. In this paper, We studied the DOE(design of experiment) method for the optimized CMP process. Various process variations, such as table and head speed, slurry flow rate and down force, have investigated in the viewpoint of removal rate and non-uniformity. Through the above DOE results, we could set-up the optimal process parameters.

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정지비행시 헬리콥터 로터 블레이드의 공력해석 및 최적화 (AERODYNAMIC ANALYSIS AND OPTIMIZATION STUDY OF THE HELICOPTER ROTOR BLADE IN HOVERING FLIGHT)

  • 제상언;정현주;김도준;조창열;명노신;박찬우;조태환
    • 한국전산유체공학회:학술대회논문집
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    • 한국전산유체공학회 2007년도 춘계 학술대회논문집
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    • pp.125-129
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    • 2007
  • In this paper a method for the design optimization for helicopter rotor blade in hover is studied Numerical analysis of aerodynamic characteristics of the flow around a rotor blade is analysed by usign panel method and CFD code based on Navier-Stokes equation. The result is validated by comparing with existing experimental result. Optimization methods RSM(Response Surface Method) and DOE(Design of Experiments) are applied in combination. The object functions are power, twist angle, taper ratio, and thrust. The optimized result showed a decrease of 17% of the power required.

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Road Noise 개선을 위한 CAE 기반 DFSS Study (CAE-based DFSS Study for Road Noise Reduction)

  • 권우성;유봉준;김병훈;김인동
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2011년도 춘계학술대회 논문집
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    • pp.735-741
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    • 2011
  • In the early phase of vehicle development, CAE is conducted as tool for vehicle performance assessment. To maintain acceptable road noise performance, solution for reduced vehicle sensitivity is required. Chassis interface dynamic stiffness characteristics are key component to isolating vibration and noise of road from the vehicle interior. This research provide how to set up the optimized dynamic characteristics under noise effect through DFSS study. CAE-based DOE is performed to build prediction math model, CMS process involves DOE to achieve very fast run times while giving results very comparable. Minimized $95^{th}$ percentile of performance distribution is applied to minimize vehicle sensitivity and road noise levels variation during the optimization process. Finally, the results of optimization were reviewed for performance and robustness.

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로드 노이즈 개선을 위한 전산응용해석 기반 DFSS 연구 (CAE-based DFSS Study for Road Noise Reduction)

  • 권우성;유봉준;김병훈;김인동
    • 한국소음진동공학회논문집
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    • 제21권7호
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    • pp.674-681
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    • 2011
  • In the early phase of vehicle development, CAE is conducted as tool for vehicle performance assessment. To maintain acceptable road noise performance, solution for reduced vehicle sensitivity is required. Chassis interface dynamic stiffness characteristics are key component to isolating vibration and noise of road from the vehicle interior. This research provide how to set up the optimized dynamic characteristics under noise effect through DFSS study. CAE-based DOE is performed to build prediction math model, CMS process involves DOE to achieve very fast run times while giving results very comparable. Minimized 95th percentile of performance distribution is applied to minimize vehicle sensitivity and road noise levels variation during the optimization process. Finally, the results of optimization were reviewed for performance and robustness.

DLE(Dry Low Emission) 연소기 예혼합기의 혼합성능 예측에 대한 시험 평가 (Test and Evaluation for the Mixing Quality in the Premixer of DLE Combustor)

  • 최장수;박동준;우유철
    • 한국추진공학회지
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    • 제2권2호
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    • pp.99-107
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    • 1998
  • ASE120 엔진 연소기에 쓰이는 벤츄리(venturi)형 예혼합기의 혼합성능을 시험 평가하였다. 이 시험에서는 가스연료 대신 찬공기를 주입하고 혼합공기의 온도를 측정함으로 혼합정도를 계산하였다. DOE 기법을 사용하여 시험변수 matrix를 구성하고 시험결과를 분석하여 최적의 변수조합을 가지는 형상을 도출하였다. 선정된 형상에 대하여 확인시험이 수행되었다.

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