• Title/Summary/Keyword: Bonding pressure

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ANALYSIS OF THE EFFECT OF HYDROXYL GROUPS IN SILICON DIRECT BONDING USING FT-IR (규소 기판 접합에 있어서 FT-IR을 이용한 수산화기의 영향에 관한 해석)

  • Park, Se-Kwang;Kwon, Ki-Jin
    • Journal of Sensor Science and Technology
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    • v.3 no.2
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    • pp.74-80
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    • 1994
  • Silicon direct bonding technology is very attractive for both silicon-on-insulator devices and sensor fabrication because of its thermal stress free structure and stability. The process of SDB includes hydration of silicon wafer and heat treatment in a wet oxidation furnace. After hydration process, hydroxyl groups of silicon wafer were analyzed by using Fourier transformation-infrared spectroscopy. In case of hydrophilic treatment using a ($H_{2}O_{2}\;:\;H_{2}SO_{4}$) solution, hydroxyl groups are observed in a broad band around the 3474 $cm^{-1}$ region. However, hydroxyl groups do not appear in case of diluted HF solution. The bonded wafer was etched by using tetramethylammonium hydroxide etchant. The surface of the self etch-stopped silicon dioxide is completely flat, so that it can be used as sensor applications such as pressure, flow and acceleration, etc..

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Flip Chip Process on CNT-Ag Composite Pads for Stretchable Electronic Packaging (신축성 전자패키징을 위한 CNT-Ag 복합패드에서의 플립칩 공정)

  • Choi, Jung Yeol;Oh, Tae Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.20 no.4
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    • pp.17-23
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    • 2013
  • As a basic research to develop stretchable electronic packaging technology, CNT-Ag composite pads were formed on top of Cu/Sn chip bumps and flip-chip bonded using anisotropic conductive adhesive. Average contact resistances of the flip-chip joints were measured with respect to bonding pressure and presence of the CNT-Ag composite pads. When Cu/Sn chip bumps with CNT-Ag composite pads were flip-chip bonded to substrate Cu pads at 25MPa or 50 MPa, contact resistance was too high to measure. The specimen processed by flip-chip bonding the Cu/Sn chip bumps with CNT-Ag composite pads to the substrate Cu pads exhibited an average contact resistance of $213m{\Omega}$. On the other hand, the flip-chip specimens processed by bonding Cu/Sn chip bumps without CNT-Ag composite pads to substrate Cu pads at 25MPa, 50MPa, and 100MPa exhibited average contact resistances of $370m{\Omega}$, $372m{\Omega}$, and $112m{\Omega}$, respectively.

Joining Technology of Flat Panel Photobioreactor Case (평판형 광생물반응기 케이스 접합 기술)

  • Ahn, Dong-Gyu;Lee, Ho Jin;Ahn, Yeong-Su
    • Journal of the Korean Society for Precision Engineering
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    • v.30 no.2
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    • pp.154-163
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    • 2013
  • Adhesive bonding and plastic welding have been widely used to join two plastic materials together. The goal of this paper is to determine a proper joining technology of a pair of flat panel (FP) photobioreactor (PBR) case. The material of the FP PBR case is polycarbonate (PC) plate. Two types of adhesion, including acryl adhesive and two-part epoxy adhesive, as well as two types of plastic welding technology, including ultrasonic welding and thermal welding, are employed for joining of PC plates. In order to influence of the adhesion and welding conditions on the joining characteristics of the PC plates in operational conditions of the FP PBR case, the morphology in the vicinity of the joined region as well as the water and pressure resistance characteristic are investigated. In addition, the variation of the bonding strength of the joined region and deformation behaviors in the vicinity of the joined region according to the adhesion and welding conditions is examined via the lap-shear test. From the results of basic experiments, proper joining technologies are chosen. Using the chosen joining technologies, the FP PBR case are fabricated to perform full-scale durability experiment. The results of the full-scale durability experiment have been shown that the chosen joining technologies can be applicable to fabricate the FP PBR case.

Development of Bonding Dispenser and Press Machine to Regenerate Retainer Ring for Semiconductor CMP Process (반도체 CMP 공정용 리테이너 링 재생을 위한 본딩 디스펜서 및 프레스 머신 개발)

  • Hyoung-Keun Park
    • The Journal of the Korea institute of electronic communication sciences
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    • v.19 no.3
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    • pp.507-514
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    • 2024
  • In the semiconductor manufacturing line, continuous efforts are being made to reduce the cost of products produced, and the demand for this is accelerating in the chemical mechanical polishing(CMP) process, and a representative example of these cost reduction items is the 5-Zone Ring. After about 150 hours of use in the CMP process, the thickness of the ring decreases to less than 1 mm and must be replaced with a new product. Therefore, in this study, bonding dispensers and press machines with a dispensing amount error of 10g±0.8% or less and a pressure uniformity of ±1.8% or less were developed to reduce semiconductor manufacturing costs by repeatedly regenerating worn parts of the retainer ring, and to minimize environmental pollution caused by industrial waste treatment.

The Study on the Dry Floor Tile Unit System used Resin Mat (수지매트를 이용한 바닥타일 건식공법 시스템에 관한 연구)

  • 김성식;임남기;정병훈;정재영;정상진
    • Journal of the Korea Institute of Building Construction
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    • v.1 no.2
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    • pp.185-190
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    • 2001
  • The purpose of this study is the development of practical Dry floor tile unit method that settle the defect of a wet method and designed for resin mat. With use of PE resin which is confirmed the basic property, it is developed that resin mat, joint-sealing compound with fixed form and space management to Dry floor tile unit method. The result of this study is below. 1) To acquire above the 4kgf/$\textrm{cm}^2$ - construction specification criterion, the bonding space that between resin mat and tile has to occupy the 50% of resin mat module space(10,000$\textrm{cm}^2$). 2) Criteria of bonding part plane is below. simpleness of metal form. productivity, uniform quality after injection molding cooling, easy cutting for remain space management, adhesive property, construction ability, transformation of a severed piece under pressure and so on. 3) To get the shape that could protect the interfacial breakdown, it is designed that resin mat and tile are unified after the bond input. 4) Adapted joint-sealing compound is the material of urethane kinds wedge form. Resin mat has the water passageway that could drain the water. 5) To manage the severed piece of tile, the resin mat is likely to divide the half and the quarter and the plastic drainage is developed in the severed piece.

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High Thermal Conductivity Silicon Nitride Ceramics

  • Hirao, Kiyoshi;Zhou, You;Hyuga, Hideki;Ohji, Tatsuki;Kusano, Dai
    • Journal of the Korean Ceramic Society
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    • v.49 no.4
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    • pp.380-384
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    • 2012
  • This paper deals with the recent developments of high thermal conductivity silicon nitride ceramics. First, the factors that reduce the thermal conductivity of silicon nitride are clarified and the potential approaches to realize high thermal conductivity are described. Then, the recent achievements on the silicon nitride fabricated through the reaction bonding and post sintering technique are presented. Because of a smaller amount of impurity oxygen, the obtained thermal conductivity is substantially higher, compared to that of the conventional gas-pressure sintered silicon nitride, while the microstructures and bending strengths are similar to each other between these two samples. Moreover, further improvement of the thermal conductivity is possible by increasing ${\beta}/{\alpha}$ phase ratio of the nitrided sample, resulting in a very high thermal conductivity of 177 W/($m{\cdot}K$) as well as a high fracture toughness of 11.2 $MPa{\cdot}m^{1/2}$.

Raman Scattering Investigation of Polycrystalline 3C-SiC Thin Films Deposited on $SiO_2$ by APCVD using HMDS (CVD로 성장된 다결정 3C-SiC 박막의 라만특성)

  • Yoon, Kyu-Hyung;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.197-198
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    • 2009
  • This paper describes the Raman scattering characteristics of polycrystalline (poly) 3C-SiC films, which were deposited on the thermally oxidized Si(100) substrate by the atmosphere pressure chemical vapor deposition (APCVD) method according to growth temperature. TO and LO phonon modes to 2.0m thick poly 3C-SiC deposited at $1180^{\circ}C$ were measured at 794.4 and $965.7\;cm^{-1}$ respectively. From the intensity ratio of $I_{(LO)}/I_{(TO)}$ 1.0 and the broad full width half maximum (FWHM) of TO modes, itcan be elucidated that the crystallinity of 3C-SiC forms polycrystal instead of disordered crystal and the crystal defect is small. At the interface between 3C-SiC and $SiO_2$, $1122.6\;cm^{-1}$ related to C-O bonding was measured. Here poly 3C-SiC admixes with nanoparticle graphite with the Raman shifts of D and G bands of C-C bonding 1355.8 and $1596.8\;cm^{-1}$. Using TO mode of 2.0 m thick poly 3C-SiC, the biaxial stress was calculated as 428 MPa.

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Spin-coated ultrathin multilayers and their micropatterning using microfluidic channels

  • Hongseok Jang;Kim, Sangcheol;Jinhan Cho;Kookheon Char
    • Korea-Australia Rheology Journal
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    • v.15 no.1
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    • pp.1-7
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    • 2003
  • A new method is introduced to build up organic/organic multilayer films composed of cationic poly(allylamine hydrochloride) (PAH) and negatively charged poly (sodium 4-styrenesulfonate) (PSS) using the spinning process. The adsorption process is governed by both the viscous force induced by fast solvent elimination and the electrostatic interaction between oppositely charged species. On the other hand, the centrifugal and air shear forces applied by the spinning process significantly enhances desorption of weakly bound polyelectrolyte chains and also induce the planarization of the adsorbed polyelectrolyte layer. The film thickness per bilayer adsorbed by the conventional dipping process and the spinning process was found to be about 4 ${\AA}$ and 24 ${\AA}$, respectively. The surface of the multilayer films prepared with the spinning process is quite homogeneous and smooth. Also, a new approach to create multilayer ultrathin films with well-defined micropatterns in a short process time is Introduced. To achieve such micropatterns with high line resolution in organic multilayer films, microfluidic channels were combined with the convective self-assembly process employing both hydrogen bonding and electrostatic intermolecular interactions. The channels were initially filled with polymer solution by capillary pressure and the residual solution was then removed by the .spinning process.

Effect of Process Parameters and Kraft Lignin Additive on The Mechanical Properties of Miscanthus Pellets

  • Min, Chang Ha;Um, Byung Hwan
    • Journal of the Korean Wood Science and Technology
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    • v.45 no.6
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    • pp.703-719
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    • 2017
  • Miscanthus had a higher lignin content (19.5 wt%) and carbohydrate (67.6 wt%) than other herbaceous crops, resulting in higher pellet strength and positive effect on combustion. However, miscanthus also contains a high amount of hydrophobic waxes on its outer surface, cuticula, which limits the pellet quality. The glass transition of lignin and cuticula were related to forming inter-particle bonding, which determined mechanical properties of pellet. To determine the effects of surface waxes, both on the pelletizing process and the pellet strength were compared with raw and extracted samples through solvent extraction. In addition, to clarify the relationship between pellet process parameters and bonding mechanisms, the particle size and temperature are varied while maintaining the moisture content of the materials and the die pressure at constant values. Furthermore, kraft lignin was employed to determine the effect of kraft lignin as an additive in the pellets. As results, the removal of cuticula through ethanol extractions improved the mechanical properties of the pellet by the formation of strong inter-particle interactions. Interestingly, the presence of lignin in miscanthus improves its mechanical properties and decreases friction against the inner die at temperatures above the glass transition temperature ($T_g$) of lignin. Consequently, it could found that the use of kraft lignin as an additive in pellet reduced friction in the inner die upon reaching its glass transition temperature.

LCD Driver IC Assembly Technologies & Status

  • Shen, Geng-shin
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2002.09a
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    • pp.21-30
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    • 2002
  • According the difference of flex substrate, (reel tape), there are three kind assembly types of LCD driver IC is COG, TCP and COF, respectively. The TCP is the maturest in these types for stability of raw material supply and other specification. And TCP is the major assembly type of LCD driver IC and the huge demand from Taiwan's large TFT LCD panel house since this spring. But due to its package structure and the raw material applied in this package, there is some limitation in fine pitch application of this package type, (TCP). So, COF will be very potential in compact and portable application comparison with TCP in the future. There are three kinds assembly methods in COF, one is ACF by using the anisotropic conductive film to connect the copper lead of tape and gold bump of IC, another is eutectic bonding by using the thermo-pressure to joint the copper lead of tape and gold bump of IC, and last is NCP by using non-conductive paste to adhere the copper lead of tape and gold bump of IC. To have a global realization, this paper will briefly review the status of Taiwan's large TFT panel house, the internal driver IC design house, and the back-end assembly house in the beginning. The different material property of raw material, PI tape is also compared in the paper. The more detail of three kinds of COF assembly method will be described and compared in this paper.

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