• Title/Summary/Keyword: 다결정 실리콘 박막트랜지스터

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Analysis of the Electirical Characteristics on n-channel LDD structured poly-Si TFT's (LDD 구조를 가지는 n-채널 다결정 실리콘 박막 트랜지스터의 전기적 특성 분석)

  • 김동진;강창수
    • Journal of the Institute of Electronics Engineers of Korea TE
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    • v.37 no.2
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    • pp.12-16
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    • 2000
  • The electrical characteristics of n-channel LDD structured poly-Si TFT's have been systematically investigated. It have been found that the LDD regions act as the effect of series resistance and reducing the electric field. Kink effect is disappeared and off current is greatly reduced, while on current is slightly reduced. On/off current ratio graph shows that LDD device's switching characteristic is better than that of conventional device. As a result of study, it is concluded that the effect of electric field's reduction is more dominant than that of series resistance.

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Electrical characteristics of polysilicon thin film transistors with PNP gate (PNP 게이트를 가지는 폴리 실리콘 박막 트랜지스터의 전기적 특성)

  • 민병혁;박철민;한민구
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.33A no.3
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    • pp.96-106
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    • 1996
  • One of the major problems for poly-Si TFTs is the large off state leakage current. LDD (lightly doped drain) and offset gated structures have been employed in order to reduce the leakage current. However, these structures also redcue the oN current significantly due to the extra series resistance caussed by the LDD or offset region. It is desirable to have a device which would have the properties of the offset gated structure in the OFF state, while behaving like a fully gated device in the oN state. Therefore, we propose a new thin film transistor with pnp junction gate which reduce the leakage curretn during the OFF state without sacrificing the ON current during the ON state.

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Characteristics of Polysilicon Thin Film Transistor with LDD Structure (LDD 구조의 다결성 실리콘 박막 트랜지스터의 특성)

  • 황한욱;황성수;김용상
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.7
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    • pp.522-526
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    • 1998
  • We have fabricated a LDD structured polysilicon thin film transistor with low leakge current and the optimized LDD length has been obtained. The device performance is improved is improved by hydrogen passivation process. The on.off current ratio of poly0Si TFT s with $0.5{\mu}m$ and $1.0{\mu}m$ LDD length is much higher than that of conventional structured device due to the decrease of leakege current. The optimized LDD length may be $0.5{\mu}$ from the experimental data such as on/off current ratio, threshold voltage and hydrogenation effect.

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Technology Issues on Oxide and Organic TFTs for AMOLED Display

  • Jang, Jin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.75-75
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    • 2012
  • 박막 트랜지스터(TFT: Thin-Film-Transistor)는 미래 산업에 여러 가지로 사용 가능한 소자이기 때문에, 많은 연구가 진행되고 있고 그 성능이 계속 향상되고 있다. 특히, 평판 디스플레이인 AMLCD, AMOLED, 전자 종이 등이 모두 유리 혹은 플라스틱 기판에 향성된 TFT 어레이를 이용하고 있다. 현재 상업화에 응용되는 TFT는 비정질 실리콘과 저온 다결정 실리콘이며, 유기반도체 및 산화물 반도체 TFTs에 대한 연구가 매우 활발히 진행되고 있다. 본 발표에서는 산화물 반도체 TFT와 유기 반도체 TFT 기술 및 AMOLED에의 응용 기술 이슈에 대해 논의할 예정이다.

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Analysis of the Leakage Current in Poly Si TFTs (다결정 실리콘 박막트랜지스터의 누설전류 해석)

  • Lee, In-Chan;Ma, Tae-Young;kim, Sang-Hyun
    • Proceedings of the KIEE Conference
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    • 1992.07b
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    • pp.801-802
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    • 1992
  • Poly Si TFTs have been fabricated from low temperature annealed a-Si films. I-V and C-V characteristics in the off-state region were measured. Analytical model for the leakage current in the off-state was suggested. In the measurement, capacitance increased abruptly with Increasing gate and drain voltage. This phenomena is attributed to the leakage current.

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Robustic design of poly-Si TFT for LCD using statistical design of experiment (통계적 실험계획법을 이용한 액정표시기용 다결정 실리콘 박막트랜지스터의 최적화 설계)

  • 이현중;배경진;이종근;박세근
    • Proceedings of the IEEK Conference
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    • 1998.06a
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    • pp.507-510
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    • 1998
  • Performance of AMLCD pixels depends on the electrical characteristics of thin film transistor switches. The high quality of LCD can be obtained by minimizing the process and device variations of TFT. The effect of process and device factors on poly-Si TFT characteristics are calculated by ATHENA and ATLAS, and the optimized design windows based on statistical design of experiment are suggested for high performance 20 inch LCD are suggested for high performance 20 inch LCD monitors.

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Radiation Resistance Evaluation of Thin Film Transistors (박막트랜지스터의 방사선 내구성 평가)

  • Seung Ik Jun;Bong Goo Lee
    • Journal of the Korean Society of Radiology
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    • v.17 no.4
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    • pp.625-631
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    • 2023
  • The important requirement of industrial dynamic X-ray detector operating under high tube voltage up to 450 kVp for 24 hours and 7 days is to obtain significantly high radiation resistance. This study presents the radiation resistance characteristics of various thin film transistors (TFTs) with a-Si, poly-Si and IGZO semiconducting layers. IGZO TFT offering dozens of times higher field effect mobility than a-Si TFT was processed with highly hydrogenated plasma in between IGZO semiconducting layer and inter-layered dielectric. The hydrogenated IGZO TFT showed most sustainable radiation resistance up to 10,000Gy accumulated, thus, concluded that it is a sole switching device in X-ray imaging sensor offering dynamic X-ray imaging at high frame rate under extremely severe radiation environment such as automated X-ray inspection.

Design of Poly-Silicon Thin Film Transistor Circuits for Driving Liquid Crystal Display and Analysis of Characteristics of the Devices (액정표시기 구동을 위한 다결정 실리콘 박막 트랜지스터 회로의 설계 및 기초소자 특성분석)

  • 허성회;한철희
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.31A no.3
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    • pp.39-46
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    • 1994
  • CMOS LCD driving circuits using poly-Si TFT have been designed and basic blocks including test patterns have been fabricated. Column driver drives the pixels by block because polu-Si TFT can not operate at the speed of video signal. Row driver has mode selection circuit which can select a mode between interlacing mode and non-interlacing mode. Experimental results show shift register can operate at 1MHz colck frequency with 4pF load.

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Degradation of Polycrystalline Silicon Thin Film Transistor by Inducing Stress (스트레스 인가에 의한 다결정 실리콘 박막 트랜지스터의 열화 특성)

  • 백도현;이용재
    • Proceedings of the IEEK Conference
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    • 2000.06b
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    • pp.322-325
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    • 2000
  • N-channel poly-Si TFT, Processed by Solid Phase Crystalline(SPC) on a glass substrate, has been investigated by measuring its electrical properties before and after electrical stressing. It is observed that the threshold voltage shift due to electrical stress varies with various stress conditions. Threshold voltages measured in 1.5$\mu\textrm{m}$ and 3$\mu\textrm{m}$ poly-Si TFTs are 3.3V, 3.V respectively. With the threshold voltage shia the degradation of transconductance(G$\_$m/) and subthreshold swing(S) is also observed.

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A Study on the Reason of the Changes of MILC Poly-Si TFT's Characteristics by Electrical Stress (전기적 스트레스에 의한 MILC poly-Si TFT 특성변화 원인에 관한 연구)

  • Kim, Gi-Bum;Kim, Tae-Kyung;Lee, Byung-Il;Joo, Seung-Ki
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.12
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    • pp.29-34
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    • 2000
  • The effects of electrical stress on MILC(Metal Induced Lateral Crystallization) poly-Si TFT were studied. After the electrical stress was applied on the TFT’s which were fabricated by MILC process, off-state(VG<0V) current was reduced by $10^2{\sim}10^4$ times. However, when the device on which electrical stress was applied was annealed in furnace, the off-state current increased as annealing temperature increased. From the dependence of off-state current on the post-annealing temperature, activation energy of the trap states in MILC poly-Si thin films was calculated to be 0.34eV.

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