Robustic design of poly-Si TFT for LCD using statistical design of experiment

통계적 실험계획법을 이용한 액정표시기용 다결정 실리콘 박막트랜지스터의 최적화 설계

  • 이현중 (인하대학교 전자재료공학과) ;
  • 배경진 (인하대학교 전자재료공학과) ;
  • 이종근 (인하대학교 전자재료공학과) ;
  • 박세근 (인하대학교 전자재료공학과)
  • Published : 1998.06.01

Abstract

Performance of AMLCD pixels depends on the electrical characteristics of thin film transistor switches. The high quality of LCD can be obtained by minimizing the process and device variations of TFT. The effect of process and device factors on poly-Si TFT characteristics are calculated by ATHENA and ATLAS, and the optimized design windows based on statistical design of experiment are suggested for high performance 20 inch LCD are suggested for high performance 20 inch LCD monitors.

Keywords