• JSTS:Journal of Semiconductor Technology and Science
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• 제14권6호
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• pp.789-796
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• 2014

A CMOS photo detection bias quenching circuit is developed to be used with single photon avalanche photodiodes (SPADs) operating in Geiger mode for the detection of weak optical signals. The proposed bias quenching circuits for the performance improvement reduce the circuit size as well as improve the performance of the quenching operation. They are fabricated in a $0.18-{\mu}m$ standard CMOS technology to verify the effectiveness of this technique with the chip area of only $300{\mu}m^2$, which is about 60 % of the previous reported circuit. Two types of proposed circuits with resistive and capacitive load demonstrated improved performance of reduced quenching time. With a commercial APD by HAMAMATSU, the dead time can be adjusted as small as 50 ns.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제53권4호
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• pp.231-236
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• 2004

A normally open thermopneumaticc-actuated microvalve has been fabricated and their properties are investigated. The advantages of the proposed microvalve are of the low cost fabrication process and the transparent optical property using polydimethylsiloxane (PDMS) and indium tin oxide (ITO) glass. The fabricated microvalves with in-channel configuration are easily integrated with other microfluidic devices on the same substrate. The fabrication process of thermopneumatic-actuated microvalvesusing PDMS is very simple and its performance is very suitable for a disposable lab-on-a-chip. The PDMS membrane deflection increases and the flow rates of the microchannel with microvalvels decrease as the applied power to the ITO heater increases. The powers at flow-off are dependent on the membrane thickness and the applied inlet pressure but are independent of the channel width of microvalves. The flow rate is well controlled by the switching function of ITO heater and the closing/opening times are around 20 sec and 25 sec, respectively.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권1호
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• pp.11-15
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• 2006

We propose an optical and an electrical detection methods for detecting various bio-molecules effectively with microcantilevers. The microcantilevers were fabricated employing surface micromachining technique that has attractive advantages in terms of cost efficiency, simplicity and ability of fabricating in array. The fluid cell system for injection of bio-molecular solution is fabricated using polydimethylsiloxane (PDMS) and a fused silica glass. The microcantilever is deflected with respect to the difference of the surface stress caused by the formation of self-assembled bio-molecules on the gold coated side of the microcantilever. It detected cystamine dihydrochloride and glutaraldehyde molecules and analyzed individual concentrations of the cystamine dihydrochloride solution. We confirm that the deflections of bending-up or bending-down are occurred by the bio-molecule adsorption and microcantilever can be widely used to a ${\mu}-TAS$ and a lab-on-a-chip for a potential detection of various bio-molecules.

• Journal of Welding and Joining
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• 제23권5호
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• pp.55-60
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• 2005

A precise bonding technique, transmission laser bonding using energy transfer, for polymer micro devices is presented. The irradiated IR laser beam passes through the transparent part and absorbed on the opaque part. The absorbed energy is converted into heat and bonding takes place. In order to optimize the bonding quality, the temperature profile on the interface must be obtained. Using optical measurements of the both plates, the absorbed energy can be calculated. At the wavelength of 1100nm $87.5\%$ of incident laser energy was used for bonding process from the calculation. A heat transfer model was applied for obtaining the transient temperature profile. It was found that with the power of 29.5 mW, the interface begins to melt and bond each other in 3 sec and it is in a good agreement with experiment results. The transmission IR laser bonding has a potential in the local precise bonding in MEMS or Lab-on-a-chip applications.

• 한국기계가공학회지
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• 제17권5호
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• pp.111-116
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• 2018

Thermal fusion bonding is a method to enclose open microchannels fabricated on polymer chips for use in lab-on-a-chip (LOC) devices. Polymethyl methacrylate (PMMA) is utilized in various biomedical-microelectromechanical systems (bio-MEMS) applications, such as medical diagnostic kits, biosensors, and drug delivery systems. These applications utilize PMMAs biochemical compatibility, optical transparency, and mold characteristics. In this paper, we elucidate both the conformational entanglement of PMMA molecules at the contact interfacial regime, and the qualitative nature of the thermal fusion bonding phenomena through systematic molecular dynamics simulations.

• Current Optics and Photonics
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• 제6권4호
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• pp.359-366
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• 2022

In this paper, we present a new design for angle-sensitive pixels (ASPs). The proposed ASPs take advantage of subwavelength compound gratings to capture the light angle, which enables pixel size to reach the wavelength scale of 0.7 ㎛ × 0.7 ㎛. The subwavelength compound gratings are implemented by the wires of the readout circuit inherent to the standard complementary metal-oxide-semiconductor manufacturing process, thus avoiding additional off-chip optics or post-processing. This technique allows the use of two pixels for horizontal or vertical angle detection, and can determine the light's angle in the range from -45° to +45°. The proposed sensor enables surface-profile reconstruction of microscale samples using a lensless imaging system.

• Applied Microscopy
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• 제51권
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• pp.8.1-8.7
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• 2021

Growing demands for comprehending complicated nano-scale phenomena in atomic resolution has attracted in-situ transmission electron microscopy (TEM) techniques for understanding their dynamics. However, simple to safe TEM sample preparation for in-situ observation has been limited. Here, we suggested the optical microscopy based micro-manipulating system for transferring TEM samples. By adopting our manipulator system, several types of samples from nano-wires to plate-like thin samples were transferred on micro-electro mechanical systems (MEMS) chip in a single step. Furthermore, the control of electrostatic force between the sample and the probe tip is found to be a key role in transferring process.

• Current Optics and Photonics
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• 제7권4호
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• pp.463-470
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• 2023

Hydroxygraphene as a kind of functionalized graphene has important applications in composite, photoelectric and biological materials. In the present study, THz and microfluidic technologies were implemented to study the THz transmission characteristics of hydroxygraphene with different concentrations and residence times in magnetic and electric fields. The results show that the THz transmission intensity decreases with the increase in sample concentration and duration of an applied electric field, while it increases by staying longer in the magnetic field. The phenomenon is analyzed and explained in terms of hydrogen bond, conductivity and scattering characteristics. The results establish a foundation for future research on the THz absorption characteristics of liquid graphene based on microfluidic technology in different external environments. It also provides technical support for the application and development of graphene in THz devices.

• 한국광학회지
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• 제23권6호
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• pp.269-273
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• 2012

배광 분포 제어가 용이한 높이 분할방식 반사컵 설계를 수행함에 있어서, 배광 설계시 배광 분포의 설계오차를 줄이기 위하여, LED 칩 표면상의 광량 분포 변화에 따른 반사컵의 배광 특성 변화 경향성을 파악하여 최적 설계에 적용하였다. LED 패키지의 반사컵을 높이에 따라 2단 분할하여 최적 설계한 결과, 교차형과 비교차형의 조합 설계를 통해서 최대 광도와 균일도를 조절하거나 암흑 영역을 없애는 등 다양한 기능성 설계가 가능했다.

• 한국전자파학회논문지
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• 제16권9호
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• pp.957-963
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• 2005

본 논문에서는 TSMC 0.25 ${\mu}m$ CMOS RF-Mixed mode 공정 기술을 이용하여 초고속 광통신 시스템의 수신부에 사용되는 광대역 transimpedance amplifier를 설계하였다. 특히 광대역을 구성하기 위해 cascode와 common-source 구조에 active inductor shunt peaking을 이용하여 설계 및 제작하였으며, 측정 결과 gain 변화 없이 -3 dB 대역폭 특성이 cascode는 0.8 GHz에서 $81\%$ 증가한 1.45 GHz, common-source는 0.61 GHz에서 $48\%$ 증가한 0.9 GHz 결과가 나왔으며, 전체 파워 소비는 바이어스 2.5 V를 기준으로 37 mW와 45 mW이며, transimpedance gain은 61 dB$\Omega$과 61.4 dB$\Omega$을 얻을 수 있었다. 그리고 input noise current density도 상용 TIA와 거의 비슷한 $5 pA/\sqrt{Hz}$와 $4.5 pA/\sqrt{Hz}$를 가지며, out put Return loss는 전 대역에서 -10 dB 이하의 정합 특성을 보였다. 그리고 전체 chip 사이즈는 $1150{\times}940{\mu}m^2$이다.