Current Optics and Photonics

Optical Society of Korea (한국광학회)
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Angle-sensitive Pixels Based on Subwavelength Compound Gratings

  • Meng, Yunlong (School of Electronic Science and Engineering, Nanjing University) ;
  • Hu, Xuemei (School of Electronic Science and Engineering, Nanjing University) ;
  • Yang, Cheng (School of Electronic Science and Engineering, Nanjing University) ;
  • Shen, Xinyu (School of Electronic Science and Engineering, Nanjing University) ;
  • Cao, Xueyun (School of Electronic Science and Engineering, Nanjing University) ;
  • Lin, Lankun (School of Electronic Science and Engineering, Nanjing University) ;
  • Yan, Feng (School of Electronic Science and Engineering, Nanjing University) ;
  • Yue, Tao (School of Electronic Science and Engineering, Nanjing University)
  • Received : 2022.03.17
  • Accepted : 2022.05.12
  • Published : 2022.08.25
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Abstract

In this paper, we present a new design for angle-sensitive pixels (ASPs). The proposed ASPs take advantage of subwavelength compound gratings to capture the light angle, which enables pixel size to reach the wavelength scale of 0.7 ㎛ × 0.7 ㎛. The subwavelength compound gratings are implemented by the wires of the readout circuit inherent to the standard complementary metal-oxide-semiconductor manufacturing process, thus avoiding additional off-chip optics or post-processing. This technique allows the use of two pixels for horizontal or vertical angle detection, and can determine the light's angle in the range from -45° to +45°. The proposed sensor enables surface-profile reconstruction of microscale samples using a lensless imaging system.

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Acknowledgement

This study was supported by the National Key Research and Development Program of China (Grant No. 2016YFA0202102).

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