Relationships between Carrier Lifetime and Surface Roughness in Silicon Wafer by Mechanical Damage (기계적 손상에 의한 실리콘 웨이퍼의 반송자 수명과 표면 거칠기와의 관계)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.12 no.1
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- pp.27-34
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- 1999