• Title/Summary/Keyword: ion mass doping

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Examination of Diffusion Process for High-speed Avalanche Photodiode Fabrication

  • Ilgu Yun;Hyun, Kyujg-Sook;Kwon, Yong-Hwan;Pyun, Kwang-Eui
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.11
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    • pp.954-958
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    • 2000
  • The characterization of zinc diffusion processes applied for high-speed avalanche photodiodes has been examined. The different diffusion process conditions for InP test structures were explored. The zinc diffusion profiles, such as the diffusion depth and the zinc dopant concentration, were examined using secondary ion mass spectrometry with varying the process variables and material parameters. It is observed that the diffusion profiles are severly impacted on the process parameters, such as the amount of Zn$_3$P$_2$ source and the diffusion time, as well as material parameters, such as doping concentration of diffusion layer. These results can be utilized for the high-speed avalanche photodiode fabrication.

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Diffusion Model of Aluminium for the Formation of a Deep Junction in Silicon (실리콘에서 깊은 접합의 형성을 위한 알루미늄의 확산 모델)

  • Jung, Won-Chae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.33 no.4
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    • pp.263-270
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    • 2020
  • In this study, the physical mechanism and diffusion effects in aluminium implanted silicon was investigated. For fabricating power semiconductor devices, an aluminum implantation can be used as an emitter and a long drift region in a power diode, transistor, and thyristor. Thermal treatment with O2 gas exhibited to a remarkably deeper profile than inert gas with N2 in the depth of junction structure. The redistribution of aluminum implanted through via thermal annealing exhibited oxidation-enhanced diffusion in comparison with inert gas atmosphere. To investigate doping distribution for implantation and diffusion experiments, spreading resistance and secondary ion mass spectrometer tools were used for the measurements. For the deep-junction structure of these experiments, aluminum implantation and diffusion exhibited a junction depth around 20 ㎛ for the fabrication of power silicon devices.

Study of Zinc Diffusion Process for High-speed Avalanche Photodiode Fabrication

  • Ilgu Yun;Hyun, Kyung-Sook;Pyun, Kwang-Eui
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.731-734
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    • 2000
  • The characterization of Zinc diffusion processes applied fur high-speed avalanche photodiodes has been examined. The different diffusion process conditions for InP test structures were explored. The Zinc diffusion profiles, such as the diffusion depth and the Zinc dopant concentration, were examined using secondary ion mass spectrometry with varying the process variables and material parameters. It is observed that the diffusion profiles are severely impacted on the process parameters, such as the amount of Zn$_3$P$_2$source and the diffusion time, as well as material parameters, such as doping concentration of diffusion layer. These results can be utilized for the high-speed avalanche photodiode fabrication.

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Effect of Ancillary Ligand, Phenyl group, on the Emission Spectrum of Pt(II) Complex Useful for Organic Light-Emitting Device (유기전기발광소자에 사용될 수 있는 백금 착물에 대해 보조리간드 phenyl 기가 발광스펙트럼에 미치는 영향)

  • Lee, Seung-Hee;Lee, Ho-Joon
    • Journal of the Korean Applied Science and Technology
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    • v.25 no.2
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    • pp.265-268
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    • 2008
  • Among the efforts to increase the efficiency of organic light-emitting device (OLED), there is a way: doping phosphorescent materials. As a phosphorescent material, complexes of heavy transition metal, platinum, were synthesized. $Cl^-$ ion and phenyl group were used as ancillary ligands with 2-(2-pyridyl)benzimidazole (pbi) as a chromophore. The complexes were analysed by FAB-mass spectrometer and absorption and emission spectra were obtained. A phenyl group was able to shift the emission band of the complex even if it's not a chromorphore.

Effect of Particle Size and Doping on the Electrochemical Characteristics of Ca-doped LiCoO2 Cathodes

  • Hasan, Fuead;Kim, Jinhong;Song, Heewon;Lee, Seon Hwa;Sung, Jong Hun;Kim, Jisu;Yoo, Hyun Deog
    • Journal of Electrochemical Science and Technology
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    • v.11 no.4
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    • pp.352-360
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    • 2020
  • Lithium cobalt oxide (LiCoO2, LCO) has been widely used as a cathode material for Li-ion batteries (LIBs) owing to its excellent electrochemical performance and highly reproducible synthesis even with mass production. To improve the energy density of the LIBs for their deployment in electro-mobility, the full capacity and voltage of the cathode materials need to exploited, especially by operating them at a higher voltage. Herein, we doped LCO with divalent calcium-ion (Ca2+) to stabilize its layered structure during the batteries' operation. The Ca-doped LCO was synthesized by two different routes, namely solid-state and co-precipitation methods, which led to different average particle sizes and levels of dopant's homogeneity. Of these two, the solid-state synthesis resulted in smaller particles with a better homogeneity of the dopant, which led to better electrochemical performance, specifically when operated at a high voltage of 4.5 V. Electrochemical simulations based on a single particle model provided theoretical corroboration for the positive effects of the reduced particle size on the higher rate capability.

Li:Al cathode layer and its influence on interfacial energy level and efficiency in polymer-based photovoltaics

  • Park, Sun-Mi;Jeon, Ji-Hye;Park, O-Ok;Kim, Jeong-Won
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.72-72
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    • 2010
  • Recent development of organic solar cell approaches the level of 8% power conversion efficiency by the introduction of new materials, improved material engineering, and more sophisticated device structures. As for interface engineering, various interlayer materials such as LiF, CaO, NaF, and KF have been utilized between Al electrode and active layer. Those materials lower the work function of cathode and interface barrier, protect the active layer, enhance charge collection efficiency, and induce active layer doping. However, the addition of another step of thin layer deposition could be a little complicated. Thus, on a typical solar cell structure of Al/P3HT:PCBM/PEDOT:PSS/ITO glass, we used Li:Al alloy electrode instead of Al to render a simple process. J-V measurement under dark and light illumination on the polymer solar cell using Li:Al cathode shows the improvement in electric properties such as decrease in leakage current and series resistance, and increase in circuit current density. This effective charge collection and electron transport correspond to lowered energy barrier for electron transport at the interface, which is measured by ultraviolet photoelectron spectroscopy. Indeed, through the measurement of secondary ion mass spectroscopy, the Li atoms turn out to be located mainly at the interface between polymer and Al metal. In addition, the chemical reaction between polymer and metal electrodes are measured by X-ray photoelectron spectroscopy.

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Effect of Hydrogen on Mechanical S tability of Amorphous In-Sn-O thin films for flexible electronics (수소 첨가에 의한 비정질 ITO 박막의 기계적 특성 연구)

  • Kim, Seo-Han;Song, Pung-Geun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.56-56
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    • 2018
  • Transparent conductive oxides (TCOs) have attracted attention due to their high electrical conductivity and optical transparency in the visible region. Consequently, TCOs have been widely used as electrode materials in various electronic devices such as flat panel displays and solar cells. Previous studies on TCOs focused on their electrical and optical performances; there have been numerous attempts to improve these properties, such as chemical doping and crystallinity enhancement. Recently, due to rapidly increasing demand for flexible electronics, the academic interest in the mechanical stability of materials has come to the fore as a major issue. In particular, long-term stability under bending is a crucial requirement for flexible electrodes; however, research on this feature is still in the nascent stage. Hydrogen-incorporated amorphous In-Sn-O (a-ITO) thin films were fabricated by introducing hydrogen gas during deposition. The hydrogen concentration in the film was determined by secondary ion mass spectrometry and was found to vary from $4.7{\times}10^{20}$ to $8.1{\times}10^{20}cm^{-3}$ with increasing $H_2$ flow rate. The mechanical stability of the a-ITO thin films dramatically improved because of hydrogen incorporation, without any observable degradation in their electrical or optical properties. With increasing hydrogen concentration, the compressive residual stress gradually decreased and the subgap absorption at around 3.1 eV was suppressed. Considering that the residual stress and subgap absorption mainly originated from defects, hydrogen may be a promising candidate for defect passivation in flexible electronics.

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Study on the Electrical Properties of Amorphous HfInZnO TFTs Depending on Sputtering Power (비정질 하프늄인듐징크옥사이드 산화물 반도체의 공정 파워에 따른 트랜지스터의 전기적 특성 연구)

  • Yoo, Dong-Youn;Chong, Eu-Gene;Kim, Do-Hyung;Ju, Byeong-Kwon;Lee, Sang-Yeol
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.8
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    • pp.674-677
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    • 2011
  • The dependency of sputtering power on the electrical performances in amorphous HIZO-TFT (hafnium-indium-zinc-oxide thin film transistors) has been investigated. The HIZO channel layers were prepared by using radio frequency (RF) magnetron sputtering method with different sputtering power at room temperature. TOF-SIMS (time of flight secondary ion mass spectrometry) was performed to confirm doping of hafnium atom in IZO film. The field effect mobility (${\mu}FE$) increased and threshold voltage ($V_{th}$) shifted to negative direction with increasing sputtering power. This result can be attributed to the high energy particles knocking-out oxygen atoms. As a result, oxygen vacancies generated in HIZO channel layer with increasing sputtering power resulted in negative shift in Vth and increase in on-current.

Chemical Prelithiation Toward Lithium-ion Batteries with Higher Energy Density (리튬이온전지 고에너지밀도 구현을 위한 화학적 사전리튬화 기술)

  • Hong, Jihyun
    • Journal of the Korean Electrochemical Society
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    • v.24 no.4
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    • pp.77-92
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    • 2021
  • The energy density of lithium-ion batteries (LIBs) determines the mileage of electric vehicles. For increasing the energy density of LIBs, it is necessary to develop high-capacity active materials that can store more lithium ions within constrained weight. The rapid progress made in cathode technology has realized the utilization of the near-theoretical capacity of cathode materials. In contrast, commercial LIBs have still exploited graphite as active material in anodes since the 1990s. The most promising way to increase anodes' capacity is to mix high-capacity and long-cycle-life silicon oxides (SiOx) with graphite. However, the low initial Coulombic efficiency (ICE) of SiOx limits its content below 15 wt%, impeding the capacity increase in anodes. To address this issue, various prelithiation techniques have been proposed, which can improve the ICE of high-capacity anode materials. In this review paper, we introduce the principles and expected effects of prelithiation techniques reported so far. According to the reaction mechanisms, the strategies are categorized. Mainly, we focus on the recent progress of solution-based chemical prelithiation methods with commercial viability, of which lithiation reaction occurs homogeneously at liquid-solid interfaces. We believe that developing a cost-effective and mass-scalable prelithiation process holds the key to dominating the anode market for next-generation LIBs.

Direct-Aluminum-Heating-Induced Crystallization of Amorphous Silicon Thin Film (비정질 실리콘 박막의 알루미늄 직접 가열 유도 결정화 공정)

  • Park, Ji-Young;Lee, Dae-Geon;Moon, Seung-Jae
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.36 no.10
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    • pp.1019-1023
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    • 2012
  • In this research, a novel direct-aluminum-heating-induced crystallization method was developed for the purpose of application to solar cells. By applying a constant current of 3 A to an aluminum thin film, a 200-nm-thick amorphous silicon (a-Si) thin film with a size of $1cm{\times}1cm$ can be crystallized into a polycrystalline silicon (poly-Si) thin film within a few tens of seconds. The Raman spectrum analysis shows a peak of 520 $cm^{-1}$, which verifies the presence of poly-Si. After removing the aluminum layer, the poly-Si thin film was found to be porous. SIMS analysis showed that the porous poly-Si thin film was heavily p-doped with a doping concentration of $10^{21}cm^{-3}$. Thermal imaging shows that the crystallization from a-Si to poly-Si occurred at a temperature of around 820 K.