• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.2369-2371
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• 2005

MEMS 기술을 이용하여 마이크로 $H_2$ 가스센서를 제작하고 마이크로 히터의 열적 특성과 $H_2$ 가스 농도 변화에 따를 마이크로 가스센서에 대한 감도를 분석하였다. 마이크로 가스센서의 전압 인가에 따른 히터의 온도는 1.0V에서 $250-280^{\circ}C$의 고온 특성을 보였으며, 동작온도 $250^{\circ}C$에서 $H_2$ 가스는 $SnO_2/V_2O_5/Pd$의 감응물질을 도포한 센서의 반응이 우수한 특성을 확인하였다. 동작 온도 $250^{\circ}C$ $H_2$ 농도 5000ppm의 조건에서 $SnO_2/V_2O_5/Pd$의 감응물질을 도포한 가스센서에서 $H_2$ 흡착 반응 시간은 3sec이 탈착 반응 시간은 8-10sec의 결과를 보였다.

• Transactions on Electrical and Electronic Materials
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• 제10권4호
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• pp.135-139
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• 2009

$H_2S$ micro-gas sensors have been developed employing $SnO_2$:CuO composite thin films. The films were prepared by e-beam evaporation of Sn and Cu metals on silicon substrates, followed by oxidation at high temperatures. Results of various studies, such as scanning electron microscopy (SEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) reveal that $SnO_2$ and CuO are mutually non-reactive. The CuO grains, which in turn reside in the inter-granular regions of $SnO_2$, inhibit grain growth of $SnO_2$ as well as forming a network of p-n junctions. The film showed more than a 90% relative resistance change when exposed to $H_2S$ gas at 1 ppm in air at an operating temperature of $350^{\circ}C$ and had a short response time of 8 sec.

• 한국결정성장학회지
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• 제6권2호
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• pp.213-219
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• 1996

$300^{\circ}C$ 이상의 고온에서 동작하는 전통적인 $SnO_{2}$ 또는 ZnO와 같은 전통적인 세라믹 가스 센서보다 훨씬 낮은 온도에서 동작이 가능한 $Pt/MoO_{3}$ 가스 센서를 pellet 형으로 제작하였다. $Pt/MoO_{3}$ 가스 센서의 하고 온도(calcination temperature)에 따른 표면구조의 변화와 결정구조의 변화가 투과전자현미경(transmission electron microscopy)과 X-선 회절시험에 의하여 조사되었다. 투과전자현미경 사진으로부터 하소 온도가 증가할수록 시편에서 $PtCl_{x}$에서 Cl의 양이 줄어드는 것과 Pt위에 $MoO_{3}$의 얇은 막(overlayer)이 형성되어 있다는 것을 보여준다. 가스 흡착 시험 결과 표면구조의 변화에 따라서 시편의 수소 저장 능력이 변화함을 보여주었다. $50^{\circ}C$와 $150^{\circ}C$에서 수소가스 감지도를 측정한 결과 매우 우수한 결과를 보여 주었다.

• 한국재료학회지
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• 제29권5호
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• pp.336-341
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• 2019

The gas adsorption isotherm requires accurate measurement for the analysis of porous materials and is used as an index of surface area, pore distribution, and adsorption amount of gas. Basically, adsorption isotherms of porous materials are measured conventionally at 77K and 87K using liquid nitrogen and liquid argon. The cold volume calibration in this conventional method is done simply by splitting a sample cell into two zones (cold and warm volumes) by controlling the level sensor in a Dewar filled with liquid nitrogen or argon. As a result, BET measurement for textural properties is mainly limited to liquefied gases (i.e. $N_2$ or Ar) at atmospheric pressure. In order to independently investigate other gases (e.g. hydrogen isotopes) at cryogenic temperature, a novel temperature control system in the sample cell is required, and consequently cold volume calibration at various temperatures becomes more important. In this study, a cryocooler system is installed in a commercially available BET device to control the sample cell temperature, and the automated cold volume calibration method of temperature variation is introduced. This developed calibration method presents a reliable and reproducible method of cryogenic measurement for hydrogen isotope separation in porous materials, and also provides large flexibility for evaluating various other gases at various temperature.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 춘계학술대회 논문집
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• pp.93-93
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• 2009

In order to overcome the lack of reactivity with hydrogen gas ($H_2$) and utilize unique properties of Carbon Nano Tubes (CNTs) for the application to hydrogen sensors, there have been intensive works on the surface functionalization of CNTs with various types of nanoparticles including Pd. In the present work, we have investigated the effect of dendrimers and Pd nanoparticles to the hydrogen sensing properties of CNTs by comparing three types of samples: Pd/SWNTs (Sample I), Pd/dendrimer/SWNTs (Sample II) and heat-treated Pd/dendrimers/SWNTs (Sample III). As a result of IV measurement under the $H_2$ and air, sample I was found to have a high sensitivity (25%) to $H_2$, but to have a very slow response time (324 s) and recovery rate. On the other hand, Sample II was found to show much faster response time (3 s) and good recovery rate but lower sensitivity (8.6%) than Sample I which is due to induced dipole moments in the dendrimers. Interestingly, Sample III showed both fast response time (7 s) and high sensitivity (25%), indicating that the pyrolysis of the dendrimers during heat treatment which reduce the distance between the surface of the SWNTs and the functionalized Pd nanoparticles plays a key role in improving the sensitivity. The pyrolysis of the dendrimers in Pd nanoparticle-dendrimer-SWNTs was found to enable a significant electrical conductance modulation upon exposure to extremely low concentrations (10 ppm) of $H_2$ in air. Our results demonstrate that the Pd Nanoparticle-Grafted Single-Walled Carbon Nanotubes(SWNTs) with Dendrimers can be used to detect hydrogen, makingoutstanding properties such as fast response, and recovery time, high sensitivity, low detection limit at room temperature compared with other types of hydrogen sensors.

• 센서학회지
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• 제30권2호
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• pp.94-98
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• 2021

In this study, pure and Co3O4/CoFe2O4-loaded Indium oxide (In2O3) nanofibers were synthesized by the electrospinning of an Indium/Polyvinylpyrrolidone precursor solution containing cobalt and iron bimetallic zeolitic imidazolate frameworks and subsequent heat treatment. The ethanol, toluene, p-xylene, benzene, carbon monodxide, and hydrogen gas sensing characteristics of the solution were measured at 250-400 ℃. 0.5 at%-Co3O4/CoFe2O4-loaded In2O3 nanofibers exhibited extreme response (resistance ratio - 1) to 5 ppm of ethanol (210.5) at 250 ℃ and excellent selectivity over the interfering gases. In contrast, pure In2O3 nanofibers exhibited relatively low responses to all the analyte gases and low selectivity above 250-400 ℃. The superior response and selectivity toward ethanol is explained by the catalytic roles of Co3O4 and CoFe2O4 in gas sensing reaction and the electronic sensitization induced by the formation of p (Co3O4/CoFe2O4)-n (In2O3) junctions.

• 대한금속재료학회지
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• 제47권6호
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• pp.372-377
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• 2009

We report on hysteresis behavior in the electrical resistance-hydrogen concentration of Pd thin films. The variation of the electrical resistance has been investigated during the process of absorption and desorption of hydrogen gas ($H_{2}$) as a function of thickness of Pd thin films. The hysteresis behavior in the electrical resistance with $H_{2}$ concentration was found for Pd thin films and consists of $\alpha$ phase, ${\alpha}+{\beta}$ phase, and $\beta$ phase regions. The sensitivity of Pd thin films with $H_{2}$ concentration was found to follow Sieverts' law in the $\alpha$ phase region. However, the sensitivity was observed to increase abruptly with $H_{2}$ concentration in the ${\alpha}+{\beta}$ phase co-exist region. This is because Pd-H interaction is stronger in the $\beta$ phase than in the $\alpha$ phase and needs a higher concentration gradient as a driving force to desorb. The formation of the $\beta$ phase also was observed to cause the structural change because of the lattice expansion during absorption. The hysteresis height and the trace of structural change were affected by the thickness of the Pd film. As the film becomes thinner, the hysteresis height becomes lower and the amount of delamination on the surface becomes smaller. For films thinner than 20 nm in thickness, the delamination was not found but electrical resistance hysteresis was still observed.

• 공업화학
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• 제30권6호
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• pp.719-725
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• 2019

본 실험에서는 활성탄소섬유에 산소플라즈마 처리를 실시하여 산소작용기 도입 함량에 따른 유독성 화학작용제의 모사 가스인 dimethyl methylphosphonate (DMMP) 감응특성에 대하여 고찰하였다. 산소플라즈마 처리 유량이 증가할수록 활성탄소섬유 표면에 산소가 6.90%에서 최대 36.6%까지 도입되어 DMMP 가스 감응특성에 영향을 미치는 -OH가 증가하였다. 그러나 유량이 증가할수록 산소플라즈마 처리 시 발생한 산소 활성종으로 인하여 활성탄소섬유 표면에 식각이 발생하여 비표면적은 감소하는 경향을 보였다. DMMP 가스센서의 저항변화율은 산소플라즈마 처리 유량이 증가함에 따라 4.2%에서 최대 25.1%까지 증가하였다. 이는 산소플라즈마 처리로 인하여 활성탄소섬유에 발달된 -OH와 DMMP 가스의 수소결합으로 인한 것이라 여겨진다. 따라서 산소플라즈마 처리는 상온에서 유독성화학작용제 가스를 감지하기 위한 중요한 표면처리 방법 중 하나라고 판단된다.

• 센서학회지
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• 제17권2호
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• pp.143-146
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• 2008

Polymer-coated film SAW sensors have been fabricated and their sensing properties for toxic chemicals have been extensively investigated. Four types of the toxic chemical compounds of hydrogen cyanide(AC), carbonyl dichloride(CG), pinacolyl methylfluorophosphonate(GD), 2,2'-dichlorodiethylthio ether(HD) were used as target gases. SAW sensors using five different kinds of polymers were used to detect toxic chemicals and their gas sensing characteristics were investigated. The polymers used as the sensing materials were polyisobutylene(PIB), polyepichlorohydrin(PECH), polydimethylsiloxane(PDMS), polybutadiene(PBD) and polyisoprene(PIP). The recommendable mixing ratio of PIB, PECH, PDMS, PBD and PIP to solvents were 1:30, 1:40, 1:10, 1:30 and 1:30, respectively. The sensing characteristics of the SAW sensors were measured by using E-5061A network analyzer.

• 한국군사과학기술학회지
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• 제27권4호
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• pp.528-534
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• 2024

In continuous research of detecting highly toxic chemical warfare agents to ensure preparedness for the future battlefield, flexible and wearable sensor platforms with high sensitivity are still demanding. Herein we demonstrate a facile fabrication of polypyrrole-based chemiresistors on cellulose paper for the detection of nerve gas simulants. In order to optimize electrical properties of sensor platform, conducting polymer made of polypyrrole were first synthesized on flexible cellulose paper and interdigitated electrodes were formed thereon. Following confirmation of polypyrrole and/or oxime moiety through FT-IR analyses, electrical characteristics were measured in the various ratio of monomers between simple pyrrole and oxime-modified one. Typically for the optimized chemiresistor(2:8 molar ratio of simple pyrrole and oxime-modified one), eleven species of chemical warfare agents were examined and enhanced conductivity(10⁴~10⁵ order) was observed for three simulants(diethyl cyanophosphonate, diisopropyl fluorophosphonate and diethyl chlorophosphonate), which was mainly attributed to intermolecular hydrogen bonding, while no significant responses was recorded against sixteen common volatile organic chemicals.