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SAW 센서의 제작 및 독성화학물질 감도특성 연구

A study on the fabrication of polymer-coated SAW sensors and their sensing properties for some toxic chemical compounds

  • 임양례 (경북대학교 전자전기컴퓨터학부) ;
  • 박병황 (국방과학연구소) ;
  • 최선경 (국방과학연구소) ;
  • 송갑득 (상주대학교 전자전기공학부) ;
  • 이덕동 (경북대학교 전자전기컴퓨터학부)
  • Lim, Y.R. (School of Electrical Engineering and Computer Science, Kyungpook National University) ;
  • Park, B.H. (Agency for Defense Development the Repubic of Korea) ;
  • Choi, S.K. (Agency for Defense Development the Repubic of Korea) ;
  • Song, K.D (School of Electronic and Electrical Engineering, Sangju National University) ;
  • Lee, D.D. (School of Electrical Engineering and Computer Science, Kyungpook National University)
  • 발행 : 2008.03.31

초록

Polymer-coated film SAW sensors have been fabricated and their sensing properties for toxic chemicals have been extensively investigated. Four types of the toxic chemical compounds of hydrogen cyanide(AC), carbonyl dichloride(CG), pinacolyl methylfluorophosphonate(GD), 2,2'-dichlorodiethylthio ether(HD) were used as target gases. SAW sensors using five different kinds of polymers were used to detect toxic chemicals and their gas sensing characteristics were investigated. The polymers used as the sensing materials were polyisobutylene(PIB), polyepichlorohydrin(PECH), polydimethylsiloxane(PDMS), polybutadiene(PBD) and polyisoprene(PIP). The recommendable mixing ratio of PIB, PECH, PDMS, PBD and PIP to solvents were 1:30, 1:40, 1:10, 1:30 and 1:30, respectively. The sensing characteristics of the SAW sensors were measured by using E-5061A network analyzer.

키워드

참고문헌

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