• 제목/요약/키워드: heterostructure

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Optical Properties of Column -II Nitride Semiconductors (III족 질화물반도체의 분광학적 성질)

  • 김선태;문동찬
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1995.05a
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    • pp.47-49
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    • 1995
  • We report the spectroscopic properties of column-III nitrifies of GaN, GaInN, and AlGaN. The column-III nitride semiconductors are promising materials to realize the current-injection-type blue-and ultraviolet (UV)-light-emitting devices with high performance. To acheive the lasing with low threshold, the devices are must constructed to double heterostructure by succesive epitaxial growth technique, and we must confine the carriers in the potential barrier and optical confinement in wave guide between barrier and active layers has different refractive index. The refractive index of column-III nitride semiconductors, however, are rarely reported. The measured refractive index was 2.9, and the observed characteristic peak near the enrgy gap was analysed using a dielectric function and may due to excitonic contribution.

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Chatacterization of GaAs/AlGaAs optical phase modulator fabricated by self-aligned process (자기정렬공정에 의한 GaAs/AlGaAs 광위상변조기의 제작 및 특성 측정)

  • 김병성;정영철;변영태;박경현;김선호;임동건
    • Korean Journal of Optics and Photonics
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    • v.7 no.3
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    • pp.287-294
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    • 1996
  • An optical phase modulator is fabricated in GaAs/AlGaAs doble heterostructure wafer grown by MOCVD. A self-aligned process, in which the same photoresist pattern is used for both the waveguide etching and the insulation layer formation, is developed and is found to be very useful, Fabry-Perot interference technique is applied to the measurement and the phase modulation efficiency is measured to be 22.5$^{\circ}$/Vmm at 1.31 ${\mu}{\textrm}{m}$ for TE polarization.

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Forming Gas Post Metallization Annealing of Recessed AlGaN/GaN-on-Si MOSHFET

  • Lee, Jung-Yeon;Park, Bong-Ryeol;Lee, Jae-Gil;Lim, Jongtae;Cha, Ho-Young
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.15 no.1
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    • pp.16-21
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    • 2015
  • In this study, the effects of forming gas post metallization annealing (PMA) on recessed AlGaN/GaN-on-Si MOSHFET were investigated. The device employed an ICPCVD $SiO_2$ film as a gate oxide layer on which a Ni/Au gate was evaporated. The PMA process was carried out at $350^{\circ}C$ in forming gas ambient. It was found that the device instability was improved with significant reduction in interface trap density by forming gas PMA.

Radiation Hardness Evaluation of GaN-based Transistors by Particle-beam Irradiation (방사선빔 조사를 이용한 질화갈륨 기반 트랜지스터의 내방사선 특성 연구)

  • Keum, Dongmin;Kim, Hyungtak
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.66 no.9
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    • pp.1351-1358
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    • 2017
  • In this work, we investigated radiation hardness of GaN-based transistors which are strong candidates for next-generation power electronics. Field effect transistors with three types of gate structures including metal Schottky gate, recessed gate, and p-AlGaN layer gate were fabricated on AlGaN/GaN heterostructure on Si substrate. The devices were irradiated with energetic protons and alpha-particles. The irradiated transistors exhibited the reduction of on-current and the shift of threshold voltage which were attributed to displacement damage by incident energetic particles at high fluence. However, FET operation was still maintained and leakage characteristics were not degraded, suggesting that GaN-based FETs possess high potential for radiation-hardened electronics.

Effects of Heterostructure Electrodes on the Reliability of Ferroelectric PZT Thin Film (강유전체 PZT박막의 신뢰도에 미치는 헤테로구조 전극의 영향에 대한 연구)

  • Lee, Byoung-Soo;Lee, Bok-Hee;Lee, Duch-Chool
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.52 no.1
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    • pp.14-19
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    • 2003
  • The effect of the Pt electrode and the $Pt-IrO_2$ hybrid electrode on the performance of ferroelectric device was investigated. The modified Pt thin films with non-columnar structure significantly reduced the oxidation of TiN diffusion barrier layer, which rendered it possible to incorporate the simple stacked structure of Pt/TiN/poly-Si plug. When a $Pt-IrO_2$ hybrid electrode is applied, PZT thin film properties are influenced by the thickness and the partial coverage of the electrode layers. The optimized $Pt-IrO_2$ hybrid electrode significantly enhanced the fatigue properties of the PZT thin film with minimal leakage current.

Efficiency enhancement mechanism in organic light-emitting devices with multiple heterostructures acting as a hole transport layer

  • Han, S.M.;Lee, K.S.;Choo, D.C.;Kim, T.W.;Seo, J.H.;Kim, Y.K.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08b
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    • pp.1451-1453
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    • 2007
  • The electrical and the optical properties of organic light-emitting devices (OLEDs) with or without multiple heterostructures acting as a hole transport layer were investigated. The efficiency enhancement mechanism in the OLEDs with multiple heterostructures is described on the basis of the electrical and the optical results.

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Fabrication and Characteristics of Tunable Butt-Coupled Sampled-grating Distributed Bragg Reflector (SG-DBR) Laser Diodes (파장가변 Sampled-grating Distributed Bragg Reflector (SG-DBR) 레이저 다이오드 제작)

  • 이지면;오수환;고현성;박문호
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.1
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    • pp.16-20
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    • 2004
  • We present the fabrication and performance of wavelength tunable butt coupled (BT) sampled-grating (SG) distributed bragg reflector (DBR) - planar buried heterostructure (PBH) laser diodes (LD). The fabricated LD showed the high optical output power due to the high coupling efficiency between active and passive components by the BT coupling methods. The series resistance and diode ideality factor of LD were measured to be 3.7 $\Omega$ and 1.35, respectively. The average threshold current was 25 ㎃. The output powers of BT-SG DBR-PBH-LD were obtained to be as high as 12.3 and 24.56 ㎽ at 100 and 200 ㎃, respectively. The maximum wavelength tuning range was about 31 nm and the side mode suppression ratio was about 37 dB.

Method of converting schrodinger equation for heterostructures with a positon-dependent effective mass to the equation with a position-independent effective mass and its appliations (이종 구조에서 위치의 함수로 표시된 효과질량을 포함하는 Schrodinger 방정식을 위치에 무관한 효과질량을 포함하는 방정식으로 변환하는 방법 및 그 응용)

  • Lee, Byoung-Ho;Lee, Wook
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.33A no.7
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    • pp.223-229
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    • 1996
  • a simpel coordinate transformaton method is suggested that converts Schr$\"{o}$dinger's equation involving a position-dependent effective mass in a heterostructure to an equation involving a positon-independent effective mass. This method enables the conceptual study of the effect of the positon-dependent effective mass inserted between the divergence operator and the gradient operator in Schr$\"{o}$dinger's equation. It is also shown that the characteristics such as a transmission coefficient in various heterostructures involving a position-dependent effective masses can be obtained iwth ease by the suggested method.

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Photo reflectance Measurement in Si$_{3}$N$_{4}$/ Al$_{0.21}$Ga$_{0.79}$ As/GaAs Heterostructure

  • Yu Jae-In;Park Hun-Bo;Choi Sang-Su;Kim Ki-Hong;Baet In-Ho
    • KIEE International Transactions on Electrophysics and Applications
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    • v.5C no.2
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    • pp.54-57
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    • 2005
  • Photoreflectance (PR) has been measured to investigate the characterization of the Si$_{3}$N$_{4}$Al$_{0.21}$ Ga$_{0.79}$As/GaAs and Al$_{0.21}$Ga$_{0.79}$As/GaAs heterostructures. In the PR spectrum, the caplayer thickness was 170 nm and Si$_{3}$N$_{4}$ was utilized as the capping material. The C peak is confirmed as the carbon defect with residual impurity originating from the growth process. After annealing, in the presence of the Si$_{2}$N$_{4}$ cap layer, band gap energy was low shifted. This result indicates that the Si$_{3}$N$_{4}$ cap layer controlled evaporation of the As atom.

Investigation of Ohmic Contact for $n^+$-GaN/AlGaN/GaN HFET ($n^+$-GaN/AlGaN/GaN HFET 제작을 위한 오믹접촉에 관한 연구)

  • 정두찬;이재승;이정희;김창석;오재응;김종욱;이재학;신진호;신무환
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.2
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    • pp.123-129
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    • 2001
  • The optimal high temperature processing conditions for the formation of Ohmic contact of Ti/Al/Pt/Au multiple layers were established for the fabrication of n$^{+}$-GaN/AlGaN/GaN HFET device. Contact resistivity as low as 3.4x10$^{-6}$ ohm-$\textrm{cm}^2$ was achieved by the annealing of the sample at 100$0^{\circ}C$ for 10 sec. using the RTA (Rapid Thermal Annealing) system. The fabricated HFET (Heterostructure Field Effect Transistor) with a structure of n'-GaN/undoped AlGaN/undoped GaN exhibited a low knee voltage of 3.5 V and a maximum source-drain current density of 180 mA/mm at Vg=0V.V.

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