KIEE International Transactions on Electrophysics and Applications

The Korean Institute of Electrical Engineers (대한전기학회)
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Photo reflectance Measurement in Si$_{3}$N$_{4}$/ Al$_{0.21}$Ga$_{0.79}$ As/GaAs Heterostructure

  • Yu Jae-In (Department of Physics, Yeungnam University) ;
  • Park Hun-Bo (Department of Physics, Yeungnam University) ;
  • Choi Sang-Su (Department of Physics, Yeungnam University) ;
  • Kim Ki-Hong (Department of Physics, Yeungnam University) ;
  • Baet In-Ho (Department of Physics, Yeungnam University)
  • Published : 2005.04.01
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Abstract

Photoreflectance (PR) has been measured to investigate the characterization of the Si$_{3}$N$_{4}$Al$_{0.21}$ Ga$_{0.79}$As/GaAs and Al$_{0.21}$Ga$_{0.79}$As/GaAs heterostructures. In the PR spectrum, the caplayer thickness was 170 nm and Si$_{3}$N$_{4}$ was utilized as the capping material. The C peak is confirmed as the carbon defect with residual impurity originating from the growth process. After annealing, in the presence of the Si$_{2}$N$_{4}$ cap layer, band gap energy was low shifted. This result indicates that the Si$_{3}$N$_{4}$ cap layer controlled evaporation of the As atom.

Keywords

References

  1. F.L. Riley, J. Am. Ceram. Soc. 83(2000) 245 https://doi.org/10.1111/j.1151-2916.2000.tb01182.x
  2. O.P. Agnihotri, S.C. Jain, J. Pootmans, J. Szlufcik, G. Beaucarne, J. Nijs, R. Mertens, Semicond. Sci. Technol. 15(2000) 29
  3. Alvarez, M. Lopez-Lopez, A.G. Rodríguez-Vazquez, V.H. Mendez-García, Microelectronic journal. 34(2003) 521
  4. Chung-Kun Song, KIEE Int. Trans. on EA, Vol. 12C, no. 2, pp. 136-138, 2002
  5. M. Iwamoto, T. Manaka and A Tojima, 'Detection of Tilting Phase Transition in Monolayers at Air-water Interface by Maxwell-displacement current and Optical-Second Harmonic Generation Measurements', KIEE Int. Trans. on EA, Vol. 12C, no. 2, pp. 64-69, 2002
  6. Pollak, F.H., Proc. SPIE., 946(1998) 2
  7. R.E. Nahory, J.L. Shay, Phys. Rev. Lett. 21(1968) 1569 https://doi.org/10.1103/PhysRevLett.21.1569
  8. E.M. Goldys, A. Mitchell, T.L. Tansley, R.J. Egan, A.Clark, Optis Communications. 124(1996) 392 https://doi.org/10.1016/0030-4018(95)00694-X
  9. V. Swaminathan, M.D. Sturge, J. L. Zilko, J. Appl. Phys. 52(1981) 6306 https://doi.org/10.1063/1.328533
  10. J. L. Shay, Phys. Rev. 2(1970) 803 https://doi.org/10.1103/PhysRevB.2.803
  11. P.J. Hughes, B.L. Weiss, T.J.C. Hosea, J. Appl. Phys. 77(1995) 6472 https://doi.org/10.1063/1.359122
  12. B. S. Ooi, A. C. Bryce, J. H. Marsh and J. S. Roberts, Semicond. Sci. Technol. 12 (1997) 121 https://doi.org/10.1088/0268-1242/12/1/020
  13. M. S. Tong, H. S. Kim and Y. Chen, 'Design and Analysis of Double-Layered Microwave Integrated Circuits Using a Finite-Difference Time-Domain Method,' KIEE Int. Trans. On EA, Vol.4-C, No.6, pp. 255-262, 2004
  14. J. Y. Choi, S. G. Kim, J. W. Park, S. J. Park and H. J. Kim, 'A Study on Hair Removal Characteristics Using a Long-pulsed Alexandrite Laser,' KIEE Int. Trans. On EA, Vol.5-C, No.1, pp. 33-38, 2005