Modified Trench MOS Barrier Schottky (TMBS) Rectifier

  • Moon Jin-Woo (Process Development Group, Product Technology Team) ;
  • Choi Yearn-Ik (School of Electrical and Computer Engineering, College of Information Technology, Ajou University) ;
  • Chung Sang-Koo (Division of Computer, Electronic and Communication Engineering, Yangbian University of Science and Technology)
  • Published : 2005.04.01

Abstract

A trench MOS barrier Schottky (TMBS) rectifier is proposed which utilizes the upper half of the trench sidewall as an active area. The proposed structure improves the forward voltage drop by 20$\%$ in comparison with the conventional one without degradation in breakdown voltage. An analytical model for the field distribution is given and compared with two-dimensional numerical simulations.

Keywords

References

  1. M. Mehrotra and B. J. Baliga, 'Trench MOS Barrier Schottky (TMBS) Rectifier: a Schottky rectifier with higher than parallel plane breakdown voltage', Solid- State Electronics, vol. 38, no. 4, pp.801-806, 1995 https://doi.org/10.1016/0038-1101(94)00166-D
  2. T. Sakai, S. Matsumoto and T. Yachi, 'Experimental investigation of dependence of electrical characteristics on device parameters in trench MOS barrier Schottky diodes', in proceedings of the 8th International Symposium of Power Semiconductor Devices and ICs(ISPSD), pp. 293-296, Kyoto, Japan, 1998
  3. B. J. Lee, S. H. Kim, C. K. Kim, H. k. Shin and Y. S. Kwon, 'Interaction of a Pyridyl-Terminated Carbosiloxane Dendrimer with Metal Ions at the Air-Water Interface,' KIEE Int. Trans. On EA, Vol.3-C, No.6, pp. 216-219, 2003
  4. Sang-Koo Chung and Seung-Youp Han, 'Analytical Model for the Surface Field Distribution of SOI RESURF Devices', IEEE Trans. Electron Devices, vol.45, no. 6, pp. 1374-1376, 1998 https://doi.org/10.1109/16.678582