• 제목/요약/키워드: gate-oxide breakdown

검색결과 103건 처리시간 0.027초

Characterization of a Solution-processed YHfZnO Gate Insulator for Thin-Film Transistors

  • Kim, Si-Joon;Kim, Dong-Lim;Kim, Doo-Na;Kim, Hyun-Jae
    • Journal of Information Display
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    • 제11권4호
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    • pp.165-168
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    • 2010
  • A solution-processed multicomponent oxide, yttrium hafnium zinc oxide (YHZO), was synthesized and deposited as a gate insulator. The YHZO film annealed at $600^{\circ}C$ contained an amorphous phase based on the results of thermogravimetry, differential thermal analysis, and X-ray diffraction. The electrical characteristics of the YHZO film were analyzed by measuring the leakage current. The high dielectric constant (16.4) and high breakdown voltage (71.6 V) of the YHZO films resulted from the characteristics of $HfO_2$ and $Y_2O_3$, respectively. To examine if YHZO can be applied to thin-film transistors (TFTs), indium gallium zinc oxide TFTs with a YHZO gate insulator were also fabricated. The desirable characteristics of the YHZO films when used as a gate insulator show that the limitations of the general binary-oxide-based materials and of the conventional vacuum processes can be overcome.

Extended Trench Gate Superjunction Lateral Power MOSFET for Ultra-Low Specific on-Resistance and High Breakdown Voltage

  • Cho, Doohyung;Kim, Kwangsoo
    • ETRI Journal
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    • 제36권5호
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    • pp.829-834
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    • 2014
  • In this paper, a lateral power metal-oxide-semiconductor field-effect transistor with ultra-low specific on-resistance is proposed to be applied to a high-voltage (up to 200 V) integrated chip. The proposed structure has two characteristics. Firstly, a high level of drift doping concentration can be kept because a tilt-implanted p-drift layer assists in the full depletion of the n-drift region. Secondly, charge imbalance is avoided by an extended trench gate, which suppresses the trench corner effect occurring in the n-drift region and helps achieve a high breakdown voltage (BV). Compared to a conventional trench gate, the simulation result shows a 37.5% decrease in $R_{on.sp}$ and a 16% improvement in BV.

Gated Diode의 항복전압에 관한 해석적 표현 (Analytical Expressions for the Breakdown Voltage of Gated Diodes)

  • 윤상복;최연익
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제49권5호
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    • pp.299-301
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    • 2000
  • Analytical expression for the breakdown voltage of the gated diodes were derived as f function of doping concentration and gate voltage, and verified by numerical simulations using ATLAS. The analytical results are in good agreement with simulation results within 5% error when the gate voltage changes from -50V to 130V in case of ND = $1\times1015 cm^{-3}$ and within 10% error when the doping concentration is changed from $5\times1014 cm^{-3}\; to\; 2\times1015 cm6{-3}$, respectively.

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질화와 재산화 조건에 따른 모스 소자의 전기적 특성변화 (Electrical properties variations of nitrided, reoxided MOS devices by nitridation condition)

  • 이정석;이용재
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 1998년도 하계종합학술대회논문집
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    • pp.343-346
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    • 1998
  • Ultra-thin gate oxide in MOS devices are subjected to high-field stress during device operation, which degrades the oxide and exentually causes dielectric breakdown. In this paper, we investigate the electrical properties of ultra-thin nitrided oxide (NO) and reoxidized nitrided oxide(ONO) films that are considered to be promising candidates for replacing conventional silicon dioxide film in ULSI level integration. We study vriations of I-V characteristics due to F-N tunneling, and time-dependent dielectric breakdown (TDDB) of thin layer NO and ONO depending on nitridation and reoxidation condition, and compare with thermal $SiO_{2}$. From the measurement results, we find that these NO and ONO thin films are strongly depending on its condition and that optimized reoxided nitrided oxides (ONO) films show superior dielectric characteristics, and breakdown-to-change ( $Q_{bd}$ ) performance over the NO films, while maintaining a similar electric field dependence compared to NO layer.

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저온 래디컬 산화법에 의한 고품질 초박막 게이트 산화막의 성장과 이를 이용한 고성능 실리콘-게르마늄 이종구조 CMOS의 제작 (High Quality Ultrathin Gate Oxides Grown by Low-Temperature Radical Induced Oxidation for High Performance SiGe Heterostructure CMOS Applications)

  • 송영주;김상훈;이내응;강진영;심규환
    • 한국전기전자재료학회논문지
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    • 제16권9호
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    • pp.765-770
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    • 2003
  • We have developed a low-temperature, and low-pressure radical induced oxidation (RIO) technology, so that high-quality ultrathin silicon dioxide layers have been effectively produced with a high reproducibility, and successfully employed to realize high performace SiGe heterostructure complementary MOSFETs (HCMOS) lot the first time. The obtained oxide layer showed comparable leakage and breakdown properties to conventional furnace gate oxides, and no hysteresis was observed during high-frequency capacitance-voltage characterization. Strained SiGe HCMOS transistors with a 2.5 nm-thick gate oxide layer grown by this method exhibited excellent device properties. These suggest that the present technique is particularly suitable for HCMOS devices requiring a fast and high-precision gate oxidation process with a low thermal budget.

얇은 게이트 산화막 $30{\AA}$에 대한 박막특성 개선 연구 (A study on Improvement of $30{\AA}$ Ultra Thin Gate Oxide Quality)

  • 엄금용
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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    • pp.421-424
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    • 2004
  • As the deep sub-micron devices are recently integrated high package density, novel process method for sub $0.1{\mu}m$ devices is required to get the superior thin gate oxide characteristics and reliability. However, few have reported on the electrical quality and reliability on the thin gate oxide. In this paper I will recommand a novel shallow trench isolation structure for thin gate oxide $30{\AA}$ of deep sub-micron devices. Different from using normal LOCOS technology, novel shallow trench isolation have a unique 'inverse narrow channel effects' when the channel width of the devices is scaled down shallow trench isolation has less encroachment into the active device area. Based on the research, I could confirm the successful fabrication of shallow trench isolation(STI) structure by the SEM, in addition to thermally stable silicide process was achiever. I also obtained the decrease threshold voltage value of the channel edge and the contact resistance of $13.2[\Omega/cont.]$ at $0.3{\times}0.3{\mu}m^2$. The reliability was measured from dielectric breakdown time, shallow trench isolation structure had tile stable value of $25[%]{\sim}90[%]$ more than 55[sec].

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염소(Chlorine)가 도입된 $SiO_2/Si$ 계면을 가지는 게이트 산화막의 특성 분석 (Characterization of Gate Oxides with a Chlorine Incorporated $SiO_2/Si$ Interface)

  • 유병곤;유종선;노태문;남기수
    • 한국진공학회지
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    • 제2권2호
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    • pp.188-198
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    • 1993
  • 두께가 6~10 nm인 게이트 산화막의 계면에 염소(Cl)를 도입시킨 n-MOS capacitor 및 n-MOSFET을 제잘하여 물성적인 방법(SIMS, ESCA)과 전기적인 방법에 의해서 소자의 특성을 분석, 평가하였다. Last step TCA법을 이용하여 성장시킨 산화막은 No TCA법으로 성장시킨 것보다 mobility가 7% 정도 증가하였고, 결함 밀도도 감소하였다. Time-zero-dielectric-breakdown(TZDB)으로 측정한 결과, Cl를 도입한 막의 파괴 전계(breakdon field)는 18 MV/cm인데, 이것은 Cl을 도입하지 않은 것보다 약 0.6 MV/cm 정도 높은 값이다. 또한 time-dependent-dielectric-breakdown(TDDB) 결과로부터 수명이 20년 이상인 것으로 평가되었고, hot carrier 신뢰성 측정으로부터 평가한 소자의 수명도 양호한 것으로 나타났다. 이상의 결과에서 Cl을 계면에 도입시킨 게이트 산화막을 가진 소자가 좋은 특성을 나타내고 있으므로 Last step TCA법을 종래의 산화막 성장 방법 대신에 사용하면 MOSFET 소자의 새로운 게이트 절연막 성장법으로서 대단히 유용할 것으로 생각된다.

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자기 정열과 수소 어닐링 기술을 이용한 고밀도 트랜치 게이트 전력 DMOSFET의 전기적 특성 분석 (Analysis of Electrical Characteristics of High-Density Trench Gate Power DMOSFET Utilizing Self-Align and Hydrogen Annealing Techniques)

  • 박훈수;김종대;김상기;이영기
    • 한국전기전자재료학회논문지
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    • 제16권10호
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    • pp.853-858
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    • 2003
  • In this study, a new simplified technology for fabricating high density trench gate DMOSFETs using only three mask layers and TEOS/nitride spacer is proposed. Due to the reduced masking steps and self-aligned process, this technique can afford to fabricate DMOSFETs with high cell density up to 100 Mcell/inch$^2$ and cost-effective production. The resulting unit cell pitch was 2.3∼2.4${\mu}$m. The fabricated device exhibited a excellent specific on-resistance characteristic of 0.36m$\Omega$. cm$^2$ with a breakdown voltage of 42V. Moreover, time to breakdown of gate oxide was remarkably increased by the hydrogen annealing after trench etching.

W-polycide 게이트 구조에서 텅스텐 실리사이드 증착 방법에 따른 게이트 산화막의 내압 특성 (Breakdown Characteristics of Gate Oxide with W-Silicide Deposition Methodes of W-polycide Gate Structures)

  • 정회환;정관수
    • 한국진공학회지
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    • 제4권3호
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    • pp.301-305
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    • 1995
  • 습식 분위기로 성장한 게이트 산화막 위에 다결정 실리콘(poly-Si)과 텅스텐 폴리사이드(WSix/poly-Si)게이트 전극을 형성하여 제작한 금속-산화물-반도체(metal-oxide-semiconductor:MOS)의 전기적 특성을 순간 절연파괴(time zero dielectric breakdown: TZDB)로 평가하였다. 텅스텐 폴리사이드 게이트 전극에 따른 게이트 산화막의 평균 파괴정계는 다결정 실리콘 전극보다 1.93MV/cm 정도 낮았다. 텅스텐 폴리사이드 게이트 전극에서 게이트 산화막의 B model(1-8 MV/cm)불량률은 dry O2 분위기에서 열처리함으로써 증가하였다. 이것은 열처리함으로써 게이트 전극이 silane(SiH4)에 의한 것보다 B mode 불량률이 감소하였다. 그것은 dichlorosilane 환원에 의한 텅스텐 실리사이드내의 불소 농도가 silane에 의한 것보다 낮기 때문이다.

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산화막의 질화, 재산화에 의한 계면트랩밀도 특성 변화 (Characteristics Variation of Oxide Interface Trap Density by Themal Nitridation and Reoxidation)

  • 백도현;이용재
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 1999년도 춘계종합학술대회
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    • pp.411-414
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    • 1999
  • 70 ${\AA}$-thick oxides nitridied at various conditions were reoxidized at pemperatures of 900$^{\circ}C$ in dry-O$_2$ ambients for 5~40 mininutes. The gate oxide interface porperties as well as the oxide substrate interface properties of MOS(Metal Oxide Semiconductor) capacitors with various nitridation conditions, reoxidation conditions and pure oxidation condition were investigated. We stuided I$\sub$g/-V$\sub$g/ characteristics, $\Delta$V$\sub$g/ shift under constant current stress from electrical characteristics point of view and breakdown voltage from leakage current point of view of MOS capacitors with SiO$_2$, NO, RNO dielectrics. Overall, our experimental results show that reoxidized nitrided oxides show inproved charge trapping porperites, I$\sub$g/-V$\sub$g/ characteristics and gate $\Delta$V$\sub$g/ shift. It has also been shown that reoxidized nitridied oxide's leakage currented voltage is better than pure oxide's or nitrided oxide's from leakage current(1${\mu}$A) point of view.

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