• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.2026-2028
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• 2002

본 논문에서는 실리콘 기판상의 전송선로 특성을 개선하기 위하여 표면 마이크로머시닝 기술을 이용하여 $10{\mu}m$ 두께의 다공질 실리콘 산화막으로 제조된 기판 위에 에어브리지를 가진 CPW 전송선로와 phase shifter를 제작하였다. 간격이 $30{\mu}m$, 신호선이 $80{\mu}m$인 CPW 에어브리지 전송선의 삽입손실은 4 GHz에서 -0.25 dB이며, 반사손실은 -28.9 dB를 나타내었다. CPW phase shifter의 크기는 S-W-$S_g$ = 100-30-400 ${\mu}m$로 설계되었다. "ㄷ" 모양을 가진 에어브리지의 폭은 $100{\mu}m$. 길이는 400-460-400 ${\mu}m$이다. 낮은 손실을 얻기 위한 Step된 에어브리지를 가진 phase shifter 구조가 step이 없는 에어브리지를 가진 구조보다 삽입손실이 보다 더 향상되었다. 제작된 CPW phase shifter의 위상특성은 28 GHz의 넓은 주파수 범위에서 $180^{\circ}E 의 천이를 타나내었다. 이상과 같은 결과로부터 두꺼운 다공질 실리콘은 고 저항 실리콘 집적회로 공정에서 고성능 저가의 마이크로파 및 밀리미터파 회로 응용에 충분히 활용 될 수 있으리라 기대된다.

• Journal of Advanced Navigation Technology
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• v.9 no.2
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• pp.147-155
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• 2005

In this paper, we propose that three uniform coplanar waveguides(CPWs), such as a conventional, finite grounded(FG), and grounded(G) CPWs, can be coupled with a $TE_{01{\delta}}$ mode dielectric resonator(DR) for a parallel resonant characteristic as a microstrip line coupled with the DR. Coupling characteristics have been investigated by placing the DR on a dielectric support above the CPWs and by moving the DR away from the center of a slot of the CPWs to the ground plane. FEM simulation(HFSS) results in terms of S-parameters agree well with measurement results. Finally, unloaded Q values of the DR coupled with the three uniform CPWs are compared with those of the DR coupled with a microstrip line. The comparison shows that the DR coupled with the three CPWs has higher unloaded Qs than that coupled with a microstrip line and that the GCPW case has the highest unloaded Qs.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.34D no.6
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• pp.1-10
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• 1997

By using the boundary element method, the cahracterization and the circuit modelling of the coplanar waveguide (CPW) discontinuities are performed bvia quasi-static approximation. The capacitive equivalent circuits are obtained by developing the 3-D boundary element method with collocation method. On the triangular patch, the numerical scheme employed the linear basis functions and the analytic solutions of the integrals on the singular points. The capacitive discontinuities of gaps, end-gaps, and open-ends are characterized and the results compared with the conductor backed coplanar waveguides.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.10
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• pp.924-930
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• 1998

In this study, we describe the properties of an electro-optical modulator with CPW(coplanar waveguide) electrode fabricated on $LiNvO_3$ optical waveguide, that is applicable to optical communications. These optical modulators have features that use a buffer layer to reduce velocity mismatch between microwaves and optical wave as well as employ CPW to improve impedance and propagation mode mismatch between the electrode and the external circuits. And an annealed proton exchange technique for obtaining low-loss optical waveguides and good reproducibility was employed. Taking into consideration the mentioned background, to achieve the lower driving voltage of optical modulator, we have re-disigned the longer interaction length. And their device properties are discussed also. As a result, fabricated optical modulators of good 10Gps operation and low voltage(5.6V of the halfwave lengfth voltage) at an $1.5{\mu}m$ wavelength are achived with good reproducibility.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.39 no.4
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• pp.19-25
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• 2002

In this paper, to improve the characteristics of a transmission line on silicon substrate, we fabricated air-bridge interconnected CPW transmission line on a 10-${\mu}{\textrm}{m}$-thick oxidized porous silicon(OPS) substrate using surface micromachining. Air-bridge interconnected CPW of S-W-S = 30-80-30 ${\mu}{\textrm}{m}$has insertion loss of -0.25 ㏈ and return loss of -28.9 ㏈ at 4㎓ And return loss of CPW with stepped compensated air-bridge(S-W-S : 30-100-30 ${\mu}{\textrm}{m}$) is improved -0.98㏈ at 4㎓. The results indicate that the thick OPS provides an approach to incorporate high performance, low cost microwave and millimeter wave circuits in a high-resistivity silicon-based process.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.11 no.8
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• pp.1305-1312
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• 2000

This paper presents the design and implementation of the CPW end-coupled band-pass filter with the finitely backed conductor (FBC). To reduce the large insertion loss in CPW structure, the improvement in loss characteristic through the change of CPW structure is introduced. The CPW filters with narrow bandwidth are suggested and characterized for their microwave performance using the finitely backed conductor. This structure

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.14 no.11
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• pp.1143-1148
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• 2003

The distortion of picosecond pulses caused by dispersion as it propagates along microstripline and CPW(Coplanar waveguide) is investigated and measured using time domain measurement. Especially, this study presents that the distortion of these lines is analyzed and compared considering the relation between the dispersion effect and cut-off frequency(f$\_$TE/) of fundamental TE mode for the substrate of line. To verify theoretical results, several samples of 50 $\Omega$ lines are fabricated on the two kind of substrates with the different values of f$\_$TE/. The propagation characteristics of picosecond Gaussian pulse on thess lines are simply measured using VNA(Vector Network Analyzer) with the time-domain analysis function.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.40 no.5
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• pp.285-289
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• 2003

This paper proposes a 10 ${\mu}{\textrm}{m}$ thick oxide air-bridge structure which can be used as a substrate for RF circuits. The structure was fabricated by anodic reaction, complex oxidation and rnicrornachining technology using TMAH etching. High quality films were obtained by combining low temperature thermal oxidation (50$0^{\circ}C$, 1 hr at $H_2O$/O$_2$) and rapid thermal oxidation (RTO) process (105$0^{\circ}C$, 2 min). This structure is mechanically stable because of thick oxide layer up to 10 ${\mu}{\textrm}{m}$ and is expected to solve the problem of high dielectric loss of silicon substrate in RF region. The properties of the transmission line formed on the oxidized porous silicon (OPS) air-bridge were investigated and compared with those of the transmission line formed on the OPS layers. The insertion loss of coplanar waveguide (CPW) on OPS air-bridge was (about 1 dB) lower than that of CPW on OPS layers. Also, the return loss of CPW on OPS air-bridge was less than about - 20 dB at measured frequency region for 2.2 mm. Therefore, this technology is very promising for extending the use of CMOS circuitry to higher RF frequencies.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.22 no.9
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• pp.1968-1974
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• 1997

In this paper, the spectral domain approach is employed to investigate the characteristics of symmetrical and asymmetrical broadside-coupleed coplanar waveguides(BSC-CPW). These structures have large even(c)-odd(.pi.) mode-velocity ratio, suitable for wide-band and tight-coupling microwave circuit design. Efficient design parameters can be obtained from the effective dielectric constants and characteristic impedances calculated by varying the strip widths and slot widths in the BSC-CPW structure.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.37 no.6
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• pp.64-71
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• 2000

An optical switch composed of identical, equally-spaced $Ti:LiNbO_3$ three-waveguides was designed and fabricated. Patterned Ti was diffused into z-cut $LiNbO_3$ substrates. $SiO_2$ buffer layer was evaporated to reduce the propagation loss of TM mode, and Al electrodes of CPW structure were built on the layer for switching of the guided beam. The optical switching phenomenon was confirmed when a beam of ${\lambda}=1.3{\mu}m$ was launched into the center waveguide and an electric field was applied to detune the three waveguides symmetrically.