Abstract
In this study, we describe the properties of an electro-optical modulator with CPW(coplanar waveguide) electrode fabricated on $LiNvO_3$ optical waveguide, that is applicable to optical communications. These optical modulators have features that use a buffer layer to reduce velocity mismatch between microwaves and optical wave as well as employ CPW to improve impedance and propagation mode mismatch between the electrode and the external circuits. And an annealed proton exchange technique for obtaining low-loss optical waveguides and good reproducibility was employed. Taking into consideration the mentioned background, to achieve the lower driving voltage of optical modulator, we have re-disigned the longer interaction length. And their device properties are discussed also. As a result, fabricated optical modulators of good 10Gps operation and low voltage(5.6V of the halfwave lengfth voltage) at an $1.5{\mu}m$ wavelength are achived with good reproducibility.
