• Transactions of Materials Processing
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• v.13 no.3
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• pp.225-229
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• 2004

Chemical Mechanical Polishing(CMP) process becomes one of the most important semiconductor processes. But the basic mechanism of CMP still does not established. Slurry fluid dynamics that there is a slurry film between a wafer and a pad and contact mechanics that a wafer and a pad contact directly are the two main studies for CMP. This paper based on the latter one, especially on the abrasion wear model. Material Removal Rate(MRR) is calculated using the trajectory length of every point on a wafer during the process time. Both the rotational velocity of a wafer and a pad and the wafer oscillation velocity which has omitted in other studies are considered. For the purpose of the verification of our simulation, we used the experimental results of S.H.Li et al. The simulation results show that the tendency of the calculated MRR using the relative velocity is very similar to the experimental results and that the oscillation effect on MRR at a real CMP condition is lower than 1.5%, which is higher than the relative velocity effect of wafer, and that the velocity factor. not the velocity itself, should be taken into consideration in the CMP wear model.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.1073-1078
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• 2003

This paper presents the vibration characteristics of a cantilever beam in contact with a fluid using a PZT actuator and PVDF film. dynamic behaviors of a flexible beam-water interaction system are examined. The effect of the liquid level on free vibration of the composite beam in a partially liquid-filled circular cylinder is investigated. The coupled system is subject to an undisturbed boundary condition un the fluid domain. In the vibration analysis of a wetted beam. the decoupled analyses between beam and fluid have been conventionally employed by considering first the composite beam vibration in the all and secondly Performing the correction taking account for surrounding fluid effects. That is, this investigation was to look at how natural frequencies, mode shapes. and damping are affected by liquid level variations. The signals from the sensor according to the applied input voltage are digitalized and filtered in order to obtain the dynamic characteristics of the composite beam in contact with fluid. It was found that the coupled natural frequencies decreased with the fluid level for the identical composite beam due to added mass effect. In case of the free-free boundary condition, the natural frequency gently decreased at fluid water level between 20% and 80% in the first tending mode and we found out the bends of stair shape for added mass effect of the fluid.

• Structural Engineering and Mechanics
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• v.63 no.5
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• pp.691-702
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• 2017

Clearances are essential for the assemblage of mechanisms to allow the relative motion between the joined bodies. This clearance exists due to machining tolerances, wear, material deformations, and imperfections, and it can worsen the mechanism performance when the precision and smoothly-working are intended. Energy is a subject which is less paid attention in the area of clearance. The effect of the clearance on the energy of a flexible slider-crank mechanism is investigated in this paper. A clearance exists in the joint between the slider and the coupler. The contact force model is based on the Lankarani and Nikravesh model and the friction force is calculated using the modified Coulomb's friction law. The hysteresis damping which has been included in the contact force model dissipates energy in clearance joints. The other source for the energy loss is the friction between the journal and the bearing. Initial configuration and crank angular velocity are changed to see their effects on the energy of the system. Energy diagrams are plotted for different coefficients of friction to see its influence. Finally, considering the coupler as a flexible body, the effect of flexibility on the energy of the system is investigated.

• Korea Journal of Hospital Management
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• v.24 no.2
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• pp.23-37
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• 2019

The purpose of this study was to investigate the effect of fairness, culture, and service points on organizational management to maximize the ability of organizational members. The subjects of the survey were selected from major hospitals, small and medium hospitals. A total of 500 questionnaires were distributed, but 404 (80.8%) were used for the final analysis. The SPSS WIN 20 program was used to analyze the collected data. The following conclusions were obtained. First, in this study, organizational fairness did not show any general difference, and fairness was obtained with relatively high scores. In terms of improving organizational culture, size of hospital there is a statistically significant difference. the larger the organization, the more the organizational culture needs to be improved. Organizational fairness were significant differences in service encounter points and size of hospital. Second, the correlation between fairness, organizational culture improvement, service contact point and management performance showed a very positive correlation. Third, fairness has no effect on business performance. However, in this study, organizational culture improvement and service contact points are statistically significant and positive (+) influence on dependent variable management performance. Therefore, in order to improve the organizational culture of the hospital, it is necessary for the CEO to the vision, core, to discuss and make a reasonable plan. In order to actively cope with rapidly changing hospital environment, it will be necessary to positively support the of new medical market and the increase of market share.

• Journal of Surface Science and Engineering
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• v.51 no.6
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• pp.337-343
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• 2018

The present study investigated the effect of heat treatment process on the surface wettability of an Al-Si-Mg alloy. After solution-treated at $525^{\circ}C$ and aged at $160^{\circ}C$, the alloy showed high hardness due to the formation of precipitates. In addition, surface wettability was improved in such a way that the contact angle of distilled water droplet on the flat surface decreased to $37.6{\sim}42.1^{\circ}$ after the heat treatment. The surface energy predicted by Owens-Wendt equation also confirmed the increase of surface energy after the heat-treatment. However, when the surface roughness increased, the positive effect of the heat treatment on wettability diminished due to the geometrical factors of the rough surface.

• Korean Journal of Applied Biomechanics
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• v.29 no.3
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• pp.167-172
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• 2019

Objective: The aim of this study was to investigate the effect of midsole hardness of running shoe on muscle fatigue and impact force during distance running. Method: Ten healthy college recreational runners who were performing distance running at least three times a week participated in this experiment. They were asked to run for 15 minutes in the treadmill at 10 km/h with running shoes having three different types of midsole hardness (Soft, Medium, Hard). EMG signal and insole pressure were collected during the first and last one minute for each running trials. Data were analyzed using a one-way analysis of variance (ANOVA) with repeated measures. Results: Midsole hardness did not affect the consistency of stride length. For the median frequency of the EMG signal, only VL was affected by midsole hardness; that of medium was greater than other midsoles (p<.05). The loading rate of impact forces increased by midsole hardness (p<.01). Conclusion: Although soft midsole could attenuate impact forces at heel contact, it might have a negative effect on the fatigue of muscle which could decelerate the body after heel contact. Therefore, it is necessary to select the optimum hardness of midsole carefully for both reduction impact forces and muscle fatigue.

• Textile Coloration and Finishing
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• v.34 no.2
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• pp.102-108
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• 2022

The physicochemical properties of stainless steel fibers which were modified by oxygen plasma treatment were analyzed through microscopy and XPS analysis. The wettability of the surface of the stainless steel fiber was observed by measuring water contact angle to find out the effect of the plasma treatment time on the surface characteristics of the stainless steel fiber. In addition, in order to understand the effect of oxygen plasma treatment on the deterioration of the stainless steel fiber properties, the physical properties due to plasma treatment was investigated by measuring the weight reduction, tensile strength, elongation, tensile modulus of the stainless steel fibers according to the treatment time. As a result, the stainless steel fiber surface was etched by the oxygen plasma and the surface became more wettable by the introduction of hydrophilic functional groups. However the physical properties of the stainless steel fiber were not significantly deteriorated even if the surface of the stainless steel fiber made hydrophilic.

• Journal of the Society of Naval Architects of Korea
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• v.60 no.1
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• pp.20-30
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• 2023

In this paper, the Energy Flow Finite Element Analysis (EFFEA) was performed to predict the acoustic and vibrational responses of complicated plate structures considering improved Fluid-Structure Interaction (FSI). For this, a new power transfer relationship was derived at the area junction where two different fluids are in contact on both sides of the plate. In order to increase the reliability of EFFEA of complicated plate structures immersed in a high-density fluid, the corrected flexural wavenumber and group velocity considering fluid-loading effect were derived. As the specific acoustic impedance of the fluid in contact with the plate increases, the flexural wavenumber of the plate increases. As a result, the flexural group velocity is reduced, and the spatial damping effect of the flexural energy density is increased. Additionally, for the EFFEA of arbitary-shaped built-up structures, the energy flow finite element formulation for the acoustic tetrahedral element was newly performed. Finally, for validation of the derived theory and developed software, numerical applications of complicated plate structures submerged in seawater or air were successfully performed.

• Journal of Physiology & Pathology in Korean Medicine
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• v.33 no.6
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• pp.341-348
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• 2019

The purpose of this study was to investigate the efficacy of Torreyae semen extract against antimicrobial and allergic contact dermatitis to explore its utility as a herbal resource. To this end, the antibacterial effects of Torreyae Semend extracted with hot water and ethanol (30%, 60%, 90%) were investigated using Staphylococcus aureus, Staphylococcus epidermidis, pseudomonas aeruginosa, and Propionibacterium acnes. And observed the anti-atopic dermatitis efficacy with a mouse model that allergic contact dermatitis induced by DNCB. Experimental results showed that the antibacterial activity against S. epidermidis and P. aeruginosa was significantly higher in the hot water extract of Torreyae Semen. We observed that the extracts of 30% ethanol and hot water of Torreyae Semen inhibited growth in a concentration-dependent manner in P. acnes & S. epidermidis. We observed that the administration of hot water extracts and 30% ethanol extract of Torreyae Semen significantly reduce the thickness of ear & back and gross skin condition compared to the control group in the mice with allergic contact dermatitis. As a result of H & E histological staining, it was observed that the Torreyae Semen extraction group had markedly reduced epidermis and skin thickness, granules, and keratinization compared to the control group. The groups administrated with Torreyae Semen hot water extracts had decreased TNF-α and IL-10 contents compared with the control group. As a result, Torreyae Semen may be used as a useful herbal resource because it has a certain level of antibacterial and anti-atopic effects.

• Resources Recycling
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• v.24 no.1
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• pp.21-27
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• 2015

The present study describes the process of producing low oxygen content alloy powder from Ti-6Al-4V and Ti-8Al-1Mo-1V (AMS 4972) alloy scraps using hydrogenation-dehydrogenation (HDH) and deoxidation in solid state (DOSS) processes. Each prepared powder was deoxidized with Ca contact and non-contact method to compare the deoxidation capability. It is known that the non-contact deoxidation method, using Ca vapor above the melting temperature $T_m$ of Ca, has greater deoxidation capability. However, Oxygen contents in Ti-6Al-4V and Ti-8Al-1Mo-1V powder after non-contact deoxidation method were higher than those after contact deoxidation method. Therefore, we investigate the effect of Al - the richest alloy element in theses Ti based metals - on the deoxidation processes.