• Title/Summary/Keyword: complex defects

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Particle Removal on Buffing Process After Copper CMP (구리 CMP 후 버핑 공정을 이용한 연마 입자 제거)

  • Shin, Woon-Ki;Park, Sun-Joon;Lee, Hyun-Seop;Jeong, Moon-Ki;Lee, Young-Kyun;Lee, Ho-Jun;Kim, Young-Min;Cho, Han-Chul;Joo, Suk-Bae;Jeong, Hae-Do
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.1
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    • pp.17-21
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    • 2011
  • Copper (Cu) had been attractive material due to its superior properties comparing to other metals such as aluminum or tungsten and considered as the best metal which can replace them as an interconnect metal in integrated circuits. CMP (Chemical Mechanical Polishing) technology enabled the production of excellent local and global planarization of microelectronic materials, which allow high resolution of photolithography process. Cu CMP is a complex removal process performed by chemical reaction and mechanical abrasion, which can make defects of its own such as a scratch, particle and dishing. The abrasive particles remain on the Cu surface, and become contaminations to make device yield and performance deteriorate. To remove the particle, buffing cleaning method used in post-CMP cleaning and buffing is the one of the most effective physical cleaning process. AE(Acoustic Emission) sensor was used to detect dynamic friction during the buffing process. When polishing is started, the sensor starts to be loaded and produces an electrical charge that is directly proportional to the applied force. Cleaning efficiency of Cu surface were measured by FE-SEM and AFM during the buffing process. The experimental result showed that particles removed with buffing process, it is possible to detect the particle removal efficiency through obtained signal by the AE sensor.

Physical Characterization of GaAs/$\textrm{Al}_{x}\textrm{Ga}_{1-x}\textrm{As}$/GaAs Heterostructures by Deep Level transient Spectroscopy (DLTS 방법에 의한 GaAs/$\textrm{Al}_{x}\textrm{Ga}_{1-x}\textrm{As}$/GaAs 이종구조의 물성분석에 관한 연구)

  • Lee, Won-Seop;Choe, Gwang-Su
    • Korean Journal of Materials Research
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    • v.9 no.5
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    • pp.460-466
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    • 1999
  • The deep level electron traps in AP-MOCVD GaAs/undoped Al\ulcornerGa\ulcornerAs/n-type GaAs heterostructures have been investigated by means of Deep Level Transient Spectroscopy DLTS). In terms of the experimental procedure, GaAs/undoped Al\ulcornerGa\ulcornerAs/n-type GaAs heterostructures were deposited on 2" undoped semi-insulating GaAs wafers by the AP-MOCVD method at $650^{\circ}C$ with TMGa, AsH3, TMAl, and SiH4 gases. The n-type GaAs conduction layers were doped with Si to the target concentration of about 2$\times$10\ulcornercm\ulcorner. The Al content was targeted to x=0.5 and the thicknesses of Al\ulcornerGa\ulcornerAs layers were targeted from 0 to 40 nm. In order to investigate the electrical characteristics, an array of Schottky diodes was built on the heterostructures by the lift-off process and Al thermal evaporation. Among the key results of this experiment, the deep level electron traps at 0.742~0.777 eV and 0.359~0.680 eV were observed in the heterostructures; however, only a 0.787 eV level was detected in n-type GaAs samples without the Al\ulcornerGa\ulcornerAs overlayer. It may be concluded that the 0.787 eV level is an EL2 level and that the 0.742~0.777 eV levels are related to EL2 and residual oxygen impurities which are usually found in MOCVD GaAs and Al\ulcornerGa\ulcornerAs materials grown at $630~660^{\circ}C$. The 0.359~0.680 eV levels may be due to the defects related with the al-O complex and residual Si impurities which are also usually known to exist in the MOCVD materials. Particularly, as the Si doping concentration in the n-type GaAs layer increased, the electron trap concentrations in the heterostructure materials and the magnitude of the C-V hysteresis in the Schottky diodes also increased, indicating that all are intimately related.ated.

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Improvement of Construction Quality Management through Analyzing Construction Work's Quality Inspection Results (건설공사 품질관리 적정성 확인 점검 결과를 통한 건설 품질관리 개선방안)

  • Jung, Sangki;Park, Jungeun;Cha, Yongwoon;Han, Sangwon;Hyun, Changtaek
    • Korean Journal of Construction Engineering and Management
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    • v.17 no.1
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    • pp.110-118
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    • 2016
  • Construction projects are getting more complex and larger-sized with a high economic growth rate and development of new construction technologies. In addition, interests and demands on standards of construction quality are further increasing. This trend requires more systematic and a higher level of construction quality management. While the government has strengthened the regulations for quality assurance, many quality problems have repeatedly occurred mainly due to lack of recognition for quality management and quality control systems. To address this issue, this paper aims to suggest quality management improvement scheme through analyzing 3,443 nonconforming items identified during inspection of 393 construction sites from March 2012 to October 2014. The quality management improvement scheme suggested in this research is expected to prevent quality problems and defects and thus improve construction performances.

Trend of Physical Modelling For Ground Subsidence And Study of Its Application (지반함몰 모형실험 연구동향 및 적용방안 고찰)

  • Jeong, Seong-Yun;Jeong, Yeong-Hoon;Kim, Dong Soo
    • Journal of Korean Society of Disaster and Security
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    • v.10 no.1
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    • pp.1-10
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    • 2017
  • Recently, increasing cases of ground subsidence in the urban area has become social issue, and related bill has been passed. Ground subsidence occurs through complex combination of various factors, and numerical analysis of this problem is limited thereby. This is why verification of ground subsidence mechanism has been conducted through physical modelling. Previous researches has been focused on modelling ground subsidence caused by utility pipe defects, and there has been insufficient physical modelling study on ground subsidence caused by various reasons such as groundwater flow and excavation activity. Also, most previous physical modelling studies were performed in 1g condition, which cannot take the in-situ stress condition into the evaluation of the ground subsidence mechanism. Therefore, in this study, physical modelling techniques to simulate various conditions is discussed by studying the previous researches on the ground subsidence mechanism through physical modelling. Also, centrifuge modelling test is suggested in this study as the technique to perform more reliable evaluation of ground subsidence mechanism. Lastly, this study suggests to apply the techniques used in the evaluation of ground subsidence mechanism into Ground Stability Assessment.

ORTHODONTIC AND PROSTHODONTIC TREATMENT IN CLEFT LIP AND PALATE PATIENT (순/구개열 환자에서의 교정-보철 치험례)

  • Chang, Weon-Suk;Choi, Yeong-Chul;Lee, Keung-Ho
    • Journal of the korean academy of Pediatric Dentistry
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    • v.27 no.3
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    • pp.388-393
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    • 2000
  • Cleft lip and palate is one of the most common congenital defects in oro-maxillo-facial region. Because most patients undergo surgical repair in early life, the sagittal jaw relationships used to be deteriorated gradually from palate surgery up to adulthood. Also, the maxillary lateral incisor may be absent or atypical-shaped in the cleft site and may not erupt or erupt ectopically, so multidisciplinary dental cares are needed for cleft lip and palate patients. The effects of the cleft lip and alveolus seem to be limited to that part of the dentofacial complex that surrounds the cleft area. In the maxillary arch, the anterior part of the non cleft segment has a tendency to be rotated forward. On the other hand, the cleft segment has a tendency to rotated slightly medially ; hence, the tendency for canines to be edge-to-edge and sometimes in crossbite. Lip and alveolus surgery adequetely correct these problems, with little untoward effect on the skeletal maxillary-mandible relationships. In this report, the patient has a repaired lip and cleft alveolus on the left side with congenital missing on '62, '22, oronasal fistula, and skeletal class III malocclusion which is not affected by lip surgery. Dental treatments for this patient including orthodontic(space supervision, functional regulator in mixed dentition, fixed therapy in permanent dentition) and prosthodontic(removable obturator with key and keyway attachment and Konus crown) therapy were performed to improve the patient's functions and esthetics.

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Enhanced Sensitivity and Long-Term G2/M Arrest in Adriamycin-treated DNA-PK-null Cells are Unrelated to DNA Repair Defects (DNA-PK-null 세포주의 adriamycin 처리에 의한 G2/M 세포주기 변화)

  • Kim, Chung-Hee;Kim, Jong-Soo;Van Cuong, Dang;Kim, Na-Ri;Kim, Eui-Yong;Han, Jin
    • Journal of Life Science
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    • v.13 no.3
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    • pp.241-247
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    • 2003
  • While the DNA-protein kinase (DNA-PK) complex, comprised of DNA-PKcs and Ku80, is primary involved in the repair of DNA double-strand breaks, it is also believed to participate in additional cellular processes. Here, treatment of embryo fibroblasts (MEFs) derived from either wild-type (Wt) or DNA-PKcs-null (DNA-$PKcs^{-/-}$) mice with various stress inducing agents revealed that adriamycin was markedly more cytotoxic for $Ku80^{-/-}MEFs$ and led to their long-term accumulation in the $G_2$/M phase. This differential response was not due to differences in DNA repair, since adrimycin-triggered DNA damage was repaired with comparable efficiency in both Wt and $Ku80^{-/-}MEFs$, but was associated with differences in the expression of important cell cycle regulatory genes. Our results support the notion that Ku80-mediated cytoprotection and $G_2$/M-progression are not only dependent on the cell's DNA repair but also may reflect Ku80's influence on additional cellular processes such as gene expression.

Development of Concrete Quality Inspection and Document Management System Using Mobile and Web Technologies (모바일 기술 및 웹을 활용한 콘크리트 품질시험 및 문서관리 시스템 개발)

  • Kim, Young-Suk;Lee, Jae-Kwon;Jung, Un-Suk
    • Korean Journal of Construction Engineering and Management
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    • v.9 no.4
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    • pp.193-205
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    • 2008
  • Quality is an important keyword representing the corporate competitiveness and image in today' s construction industry. Especially in concrete construction, any problems or defects in fresh concrete can significantly degrade the entire quality and performance of the facility built. Thus, adequate quality inspection and testing must be exercised over the fresh concrete, if concrete with the required strength, durability and appearance is to be obtained. The testing of concrete delivered to the construction job site involves testing of fresh concrete and performing strength tests on hardened concrete. The principal tests conducted on fresh concrete include the slump test and tests for air and salt content. The temperature of fresh concrete should be checked out hot or cold weather concreting. The 7-day and 28-day strength of hardened concrete are also determined by compression tests on usually cylinder samples. However, it is very complex and time-consuming process requiring a lot of efforts to document those on-site concrete testing results and to accumulate their historical data. The primary objective of this study is to suggest a unique PDA and web-based system which enables an on-site quality manager to effectively conduct the concrete inspection and testing, automatically document and accumulate the collected historical data, and promptly obtain the approval from supervisors. Finally, it is anticipated that the effective use of the proposed PDA and web-based system would be able to improve reliability of the concrete quality inspection and testing data as well as significantly reduce the approval process.

Single-Stage Repair of Coarctation of the Aorta and Ventricular Septal Defect in Infants Younger than 6 Months (생후 6개월 이하 환아에서 대동맥 축착증과 심실중격결손의 일차 완전교정)

  • 백만종;김웅한;이영탁;한재진;이창하
    • Journal of Chest Surgery
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    • v.34 no.10
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    • pp.733-744
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    • 2001
  • Background: The optimal therapeutic strategies for patients with coarctation of the aorta(CoA) and ventricular septal defect(VSD) remain controversial. This study was undertaken to determine the outcome and the need for reintervention following single-stage repair of coarctation with VSD in infants younger than 6 months. Material and Method: Thirty three consecutive patients who underwent single-stage repair of CoA with VSD, from January 1995 to December 2000, at Sejong General Hospital were reviewed retrospectively. Mean age and body weight at repair were 54$\pm$37 days(12 days-171 days) and 3.9$\pm$1.1 kg(1.5~6 kg), respectively. The surgical repair of CoA was performed under deep hypothermic circulatory arrest(CA) in the early period of the study and under regional cerebral perfusion through a direct innominate arterial cannulation without CA in the later period. The technique used in the repair of the CoA was resection and extended end-to-end anastomosis(EEEA; n=16) and extended side-to-side anastomosis(ESSA; n=2) in the early period, and resection and extended end-to-side anastomosis(EESA; n= 15) in the later period. The simultaneous closure of VSD was done with a Dacron patch(n= 16) and autologous pericardium(n=17). Aortic arch hypoplasia was present in 29 patients(88%) and its types were distal(n=18), complete(n=5), and complex(n=6)

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Correlation between Microstructure and Mechanical Properties of the Additive Manufactured H13 Tool Steel (적층 제조된 H13 공구강의 미세조직과 기계적 특성간의 상관관계)

  • An, Woojin;Park, Junhyeok;Lee, Jungsub;Choe, Jungho;Jung, Im Doo;Yu, Ji-Hun;Kim, Sangshik;Sung, Hyokyung
    • Korean Journal of Materials Research
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    • v.28 no.11
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    • pp.663-670
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    • 2018
  • H13 tool steels are widely used as metallic mold materials due to their high hardness and thermal stability. Recently, many studies are undertaken to satisfy the demands for manufacturing the complex shape of the mold using a 3D printing technique. It is reported that the mechanical properties of 3D printed materials are lower than those of commercial forged alloys owing to micropores. In this study, we investigate the effect of microstructures and defects on mechanical properties in the 3D printed H13 tool steels. H13 tool steel is fabricated using a selective laser melting(SLM) process with a scan speed of 200 mm/s and a layer thickness of $25{\mu}m$. Microstructures are observed and porosities are measured by optical and scanning electron microscopy in the X-, Y-, and Z-directions with various the build heights. Tiny keyhole type pores are observed with a porosity of 0.4 %, which shows the lowest porosity in the center region. The measured Vickers hardness is around 550 HV and the yield and tensile strength are 1400 and 1700 MPa, respectively. The tensile properties are predicted using two empirical equations through the measured values of the Vickers hardness. The prediction of tensile strength has high accuracy with the experimental data of the 3D printed H13 tool steel. The effects of porosities and unmelted powders on mechanical properties are also elucidated by the metallic fractography analysis to understand tensile and fracture behavior.

Development of a Coupled Eulerian-Lagrangian Finite Element Model for Dissimilar Friction Stir Welding (Coupled Eulerian-Lagrangian기법을 이용한 이종 마찰교반용접 해석모델 개발)

  • Lim, Jae-Yong;Lee, Jinho
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.20 no.2
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    • pp.7-13
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    • 2019
  • This study aims to develop a FE Model to simulate dissimilar friction stir welding and to address its potential for fundamental analysis and practical applications. The FE model is based on Coupled Eulerian-Lagrangian approach. Multiphysics systems are calculated using explicit time integration algorithm, and heat generations by friction and inelastic heat conversion as well as heat transfer through the bottom surface are included. Using the developed model, friction stir welding between an Al6061T6 plate and an AZ61 plate were simulated. Three simulations are carried out varying the welding parameters. The model is capable of predicting the temperature and plastic strain fields and the distribution of void. The simulation results showed that temperature was generally greater in Mg plates and that, as a rotation speed increase, not the maximum temperature of Mg plate increased, but did the temperature of Al plate. In addition, the model could predict flash defects, however, the prediction of void near the welding tool was not satisfactory. Since the model includes the complex physics closely occurring during FSW, the model possibly analyze a lot of phenomena hard to discovered by experiments. However, practical applications may be limited due to huge simulation time.