• 제목/요약/키워드: breakdown structure

검색결과 685건 처리시간 0.03초

$N_2O$ 가스에서 형성된 oxynitride막의 전기적 특성 (Electricial properties of oxynitride films prepared by furnace oxidation in $N_2O$)

  • 배성식;서용진;김태형;김창일;장의구
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 1992년도 추계학술대회 논문집
    • /
    • pp.90-93
    • /
    • 1992
  • In this paper, MOS characteristics of gate dielectrics prepared by furnace oxidation of Si in an $N_2O$ ambient have been studied. Compared with the oxides grown in $O_2$, $N_2O$ oxides show significantly improved breakdown field and low flat band voltage. Also, $N_2O$ oxide is more controllable for ultrathin film growth than $O_2$ oxide. This improvement is caused by nitrogen incorporation into the $N_2O$ oxide. Therefore, the nitrogen-rich-layer at the Si/$SiO_2$ interface formed during $N_2O$ oxidation not only strengthen $N_2O$ oxide structure at the interface and improves the gate dielectric quality, it also acts as a oxidant diffusion barrier that reduces the oxidation rate significantly.

  • PDF

PEO 처리조건에 따른 마그네슘 합금 AZ31과 AZ91의 산화표면피막특성에 대한 연구. I. 전압과 시간의 영향 (Effect of PEO Process Conditions on Oxidized Surface Properties of Mg alloy, AZ31 and AZ91. I. Applied Voltage and Time)

  • 함재호;전민석;김용남;신민철;김광엽;김배연
    • 한국전기전자재료학회논문지
    • /
    • 제29권4호
    • /
    • pp.218-224
    • /
    • 2016
  • The surface of Mg alloy, AZ31 and AZ91, were treated by PEO (plasma electrolytic oxidation) in Na-P system electrolyte, with different applied voltage and time. Thickness, roughness and X-ray crystallographic analysis revealed several results. The more applied time and voltage of PEO treated, the thicker oxidized surface coating layer were covered. And surface roughness increased with the thickness of oxidized layer. It was thought that when oxide layer grew, resistivity and breakdown voltage increased with the thickness of layer, and then, the energy of micro plasma need to be higher then before. So, it made craters and pores of surface become greater, which were responsible for the coarse surface.

새로운 SDB 기술과 대용량 반도체소자에의 응용 (A Modified SDB Technology and Its Application to High-Power Semiconductor Devices)

  • 김은동;박종문;김상철;민원기;이언상;송종규
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 1995년도 추계학술대회 논문집 학회본부
    • /
    • pp.348-351
    • /
    • 1995
  • A modified silicon direct bonding method has been developed alloying an intimate contact between grooved and smooth mirror-polished oxide-free silicon wafers. A regular set of grooves was formed during preparation of heavily doped $p^+$-type grid network by oxide-masking und boron diffusion. Void-free bonded interfaces with filing of the grooves were observed by x-ray diffraction topography, infrared, optical. and scanning electron microscope techniques. The presence of regularly formed grooves in bending plane results in the substantial decrease of dislocation over large areas near the interface. Moreover two strongly misoriented waters could be successfully bonded by new technique. Diodes with bonded a pn-junction yielded a value of the ideality factor n about 1.5 and the uniform distribution of series resistance over the whole area of horded pn-structure. The suitability of the modified technique was confirmed by I - V characteristics of power diodes and reversly switched-on dynistor(RSD) with a working area about $12cm^2$. Both devices demonstrated breakdown voltages close to the calculation values.

  • PDF

탄화규소(4H) 기판의 초고내압용 접합 장벽 쇼트키 다이오드의 특성 모델링 (Characteristics Modeling of Junction Barrier Schottky Diodes for ultra high breakdown voltage with 4H-SiC substrate)

  • 송재열;방욱;강인호;이용재
    • 한국정보통신학회:학술대회논문집
    • /
    • 한국해양정보통신학회 2007년도 추계종합학술대회
    • /
    • pp.200-203
    • /
    • 2007
  • 넓은 에너지 갭의 물질인 탄화규소(4H)기판을 사용하여, 초고내압을 위한 접합장벽 쇼트키 구조의 소자를 설계하여 제작하였다. 측정결과로써 소자의 역방향 I-V 특성은 1000V 이상의 항복전압을 보였고 p-grid의 설계 최적 길이는 $3{\mu}m$ 간격이였다. 이 연구에서는 제작한 소자의 공정 조건 파라미터들을 사용하여 I-V 특성을 모델링 하였고 I-V 특성 파라미터들을 추출하여 실제 소자 파라미터와 비교, 분석하였다.

  • PDF

Al-Cu 합금 전극막 구조를 갖는 사다리형 SAW filter의 RF-고전력 내구성 특성 고찰 (A Study on RF High Power Durability of Al-Cu Alloy Electrodes Used in Ladder-type SAW(surface acoustic wave) Filters)

  • 김남철;이기선;서수정;김지수;김윤동
    • 한국전기전자재료학회논문지
    • /
    • 제14권5호
    • /
    • pp.435-443
    • /
    • 2001
  • As power durable RF SAW filters, AL-(0∼2wt%)Cu alloy multi-layered thin electrodes were deposited on 42° LiTaO$_3$ piezoelectric substrates by magnetron sputtering process, and then ladder-type RF SAW filters, satisfying the electrical specification of CDMA transmission band, were fabricated through optimizing SAW resonator structures. The temperature of film electrodes in SAW filter was increased with RF power, and reached the maxima to cause a failure of SAW filters at the cut-off frequencies of the RF filter band. As RF power increases, the electrodes of Al-Cu alloy showed higher power durability than that of pure Al. The multi-layer laminated film of Al-1wt.% Cu/Cu/Al-1wt%Cu resulted in the best power durability up to 4W of RF power. Every film electrode, however, was destroyed within seconds whenever applying a critical RF power to SAW filters, regardless of the composition and structure of film electrodes. The breakdown of film electrodes under FR power seems to believe due to the fatigue of electrodes caused by repetitive cyclic stress of surface acoustic wave, which is amplified as RF power increases.

  • PDF

나노미터 디지털회로의 노화효과를 보상하기위한 새로운 적응형 회로 설계 (Design of a new adaptive circuit to compensate for aging effects of nanometer digital circuits)

  • 김경기
    • 한국산업정보학회논문지
    • /
    • 제18권6호
    • /
    • pp.25-30
    • /
    • 2013
  • 나노크기 MOSFET 공정에서 회로의 신뢰도에 영향을 미치는 음 바이어스 온도 불안정성(NBTI), 핫 캐리어 주입(HCI), 시간 의존 유전체 파손(TDDB) 등과 같은 노화 현상들에 의해서 회로 성능의 심각한 저하를 가져올 수 있다. 그러므로, 본 논문에서는 디지털회로에서 발생할 수 있는 노화를 극복할 수 있는 적응형 보상 회로를 제안하고자 한다. 제안된 보상회로는 노화에 의해 감소하는 회로 성능을 적응적으로 보상해 주기 위해서 노화 정도에 따라 파워스위치 폭을 조절할 수 있고, 순방향 바디 바이어싱 전압을 걸어줄 수 있는 파워 게이팅 구조를 사용하여서 45nm의 공정기술에서 설계되었다.

모듈러 교각의 BIM 기반 정보 모델 인터페이스 모듈 개발 (Development of BIM Based Information Model Interface Module for a Modular Pier)

  • 김동욱;이광명;남상혁
    • 한국BIM학회 논문집
    • /
    • 제5권1호
    • /
    • pp.1-7
    • /
    • 2015
  • Modular technology has become a major issue of the construction industries to enhance their productivity. Modular bridge construction generally requires the data exchange between the contractors, designers, fabricators and constructors. Therefore, a readily accessible information model interface module based on BIM technology is essential for their communication during a project life-cycle. In this study, BIM based information model interface module for a modular pier was developed. For the information models, the PBS(Product Breakdown Structure) and LOD(Level of Development) were defined. Next, all components of a modular pier were conducted by the parametric modeling technique, and then 3D cell library interface was developed. An nterface module was also developed using VBA(Visua basic Application) for exchanging a data from 3D model library to other softwares such as Microstation, AutoCad and Excel and was connected with MS Access database. The developed information model interface module would improve the design quality of the modular pier and reduce the time and cost for design. Updated 3D information models could be utilized for the fabrication, assembly, and construction process for modular piers.

Si-O 초격자 다이오드의 전기적 특성 (Electrical Characteristics of Si-O Superlattice Diode)

  • 박성우;서용진;정소영;박창준;김기욱;김상용
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
    • /
    • pp.175-177
    • /
    • 2002
  • Electrical characteristics of the Si-O superlattice diode as a function of annealing conditions have been studied. The nanocrystalline silicon/adsorbed oxygen superlattice formed by molecular beam epitaxy (MBE) system. Consequently, the experimental results of superlattice diode with multilayer Si-O structure showed the stable and good insulating behavior with high breakdown voltage. This is very useful promise for Si-based optoelectronic and quantum device as well as for the replacement of silicon-on-insulator (SOI) in ultra high speed and lower power CMOS devices in the future, and it can be readily integrated with silicon ULSI processing.

  • PDF

Spin coating 공정을 이용한 Polymethyl methacrylate (PMMA) 박막의 polymer gate dielectric layer로써의 특성평가 (Properties of Polymethyl methacrylate (PMMA) for Polymer Gate Dielectric Thin Films Prepared by Spin Coating)

  • 나문경;강동필;안명상;명인혜;강영택
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2005년도 춘계학술대회 논문집
    • /
    • pp.29-32
    • /
    • 2005
  • Poly (methyl methacrylate) (PMMA) is one of the promising representive of polymer gate dielectric for its high resistivity and sutible dielectric constant. PMMA (Mw=96700) films were prepared on p-Si by spin coating method. PMMA were coated compactively and flatly as observeed by AFM. MIS(Al/PMMA/p-Si) structure was made and capacitance-voltage (C-V) and current-voltage (I-V) measurements were done with PMMA films for different thermal treatment temperature. PMMA films were showed proper dielectric constant and breakdown voltage. Above the glass transition temperature PMMA films degraded. C-V measured at various frequencies, dielectric constant increased a little. The absence of hysteresis in the C-V characteristics, which eliminate the possibility of mobile charges in the PMMA films. The observed thermal stability, smooth surfaces, dielectric constant, I-V behavior implies PMMA formed by spin coating can be used as an efficient gate dielectric layer in OTFTs.

  • PDF

해양 금속재료의 부식속도와 방식전류에 미치는 유속의 영향 (Effect of flow velocity on corrosion rate and corrosion protection current of marine material)

  • 이승준;한민수;장석기;김성종
    • Corrosion Science and Technology
    • /
    • 제14권5호
    • /
    • pp.226-231
    • /
    • 2015
  • In spite of highly advanced paint coating techniques, corrosion damage of marine metal and alloys increase more and more due to inherent micro-cracks and porosities in coatings formed during the coating process. Furthermore, flowing seawater conditions promote the breakdown of the protective oxide of the materials introducing more oxygen into marine environments, leading to the acceleration of corrosion. Various corrosion protection methods are available to prevent steel from marine corrosion. Cathodic protection is one of the useful corrosion protection methods by which the potential of the corroded metal is intentionally lowered to an immune state having the advantage of providing additional protection barriers to steel exposed to aqueous corrosion or soil corrosion, in addition to the coating. In the present investigation, the effect of flow velocity was examined for the determination of the optimum corrosion protection current density in cathodic protection as well as the corrosion rate of the steel. It is demonstrated from the result that the material corrosion under dynamic flowing conditions seems more prone to corrosion than under static conditions.