Effects of Oxygen on the Properties of Mg-doped Zinc Tin Oxide Films Prepared by rf Magnetron Sputtering (rf 마그네트론 스퍼터링으로 증착한 Mg-doped Zinc Tin Oxide막의 특성에 미치는 산소의 영향)
-
- Journal of the Korean Institute of Electrical and Electronic Material Engineers
- /
- v.26 no.5
- /
- pp.373-379
- /
- 2013