• Title/Summary/Keyword: bottom gate

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Effects of Oxygen on the Properties of Mg-doped Zinc Tin Oxide Films Prepared by rf Magnetron Sputtering (rf 마그네트론 스퍼터링으로 증착한 Mg-doped Zinc Tin Oxide막의 특성에 미치는 산소의 영향)

  • Park, Ki Cheol;Ma, Tae Young
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.26 no.5
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    • pp.373-379
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    • 2013
  • Mg-doped zinc tin oxide (ZTO:Mg) thin films were prepared on glasses by rf magnetron sputtering. $O_2$ was introduced into the chamber during the sputtering. The optical properties of the films as a function of oxygen flow rate were studied. The crystal structure, elementary properties, and depth profiles of the films were investigated by X-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS), and secondary ion mass spectrometry (SIMS), respectively. Bottom-gate transparent thin film transistors were fabricated on $N^+$ Si wafers, and the variation of mobility, threshold voltage etc. with the oxygen flow rate were observed.

High Performance of Printed CMOS Type Thin Film Transistor

  • You, In-Kyu;Jung, Soon-Won
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2010.05a
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    • pp.17.2-17.2
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    • 2010
  • Printed electronics is an emerging technology to realize various microelectronic devices via a cost-effective method. Here we demonstrated a high performance of p-channel and n-channel top-gate/bottom contact polymer field-effect transistors (FETs), and applications to elementary organic complementary inverter and ring oscillator circuits by inkjet processing. We could obtained high field-effect mobility more than $0.4\;cm^2/Vs$ for both of p-channel and n-channel FETs, and successfully measured inkjet-printed polymer inverters. The performance of devices highly depends on the selection of dielectrics, printing condition and device architecture. Optimized CMOS ring oscillators with p-type and n-type polymer transistors showed as high as 50 kHz operation frequency. This research was financially supported by development of next generation RFID technology for item level applications (2008-F052-01) funded by the ministry of knowledge economy (MKE).

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ONO 구조의 nc-si NVM의 전기적 특성

  • Baek, Gyeong-Hyeon;Jeong, Seong-Uk;Jang, Gyeong-Su;Yu, Gyeong-Yeol;An, Si-Hyeon;Lee, Jun-Sin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.136-136
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    • 2011
  • 반도체 및 전자기기 산업에 있어서 NVM은 아주 중요한 부분을 차지하고 있다. NVM은 디스플레이 분야에 많은 기여를 하고 있는데, 측히 AMOLED에 적용이 가능하여 온도에 따라 변하는 구동 전류, 휘도, color balance에 따른 문제를 해결하는데 큰 역할을 한다. 본 연구에서는 bottom gate 구조의 nc-Si NVM 실험을 진행하였다. P-type silicon substrate (0.01~0.02 ${\Omega}-cm$) 위에 Blocking layer 층인 SiO2 (SiH4:N2O=6:30)를 12.5nm증착하였고, Charge trap layer 층인 SiNx (SiH4:NH3=6:4)를 20 nm 증착하였다. 마지막으로 Tunneling layer 층인 SiOxNy은 N2O (2.5 sccm) 플라즈마 처리를 통해 2.5 nm 증착하였다. 이러한 ONO 구조층 위에 nc-Si을 50 nm 증착후에 Source와 Drain 층을 Al 120 nm로 evaporator 이용하여 증착하였다. 제작한 샘플을 전기적 특성인 Threshold voltage, Subthreshold swing, Field effect mobility, ON/OFF current ratio, Programming & Erasing 특성, Charge retention 특성 등을 알아보았다.

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Deviation of Subthreshold Swing for the Ratio of Top and Bottom Oxide Thickness of Asymmetric Double Gate MOSFET (비대칭 이중게이트 MOSFET의 상하단 산화막 두께비에 따른 문턱전압이하 스윙의 변화)

  • Jung, Hakkee;Jeong, Dongsoo
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2015.10a
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    • pp.849-851
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    • 2015
  • 본 연구에서는 비대칭 이중게이트 MOSFET의 상하단 게이트 산화막 두께 비에 대한 문턱전압이하 스윙 및 전도중심의 변화에 대하여 분석하고자한다. 문턱전압이하 스윙은 전도중심에 따라 변화하며 전도중심은 상하단의 산화막 두께에 따라 변화한다. 비대칭 이중게이트 MOSFET는 상단과 하단의 게이트 산화막 두께를 다르게 제작할 수 있어 문턱전압이하 스윙의 저하 등 단채널효과를 감소시키기에 유용한 소자로 알려져 있다. 본 연구에서는 포아송방정식의 해석학적 해를 이용하여 문턱전압이하 스윙을 유도하였으며 상하단의 산화막두께 비가 전도중심 및 문턱전압이하 스윙에 미치는 영향을 분석하였다. 결과적으로 문턱전압이하 스윙 및 전도중심은 상하단 게이트 산화막 두께 비에 따라 큰 변화를 나타냈다. 또한 채널길이 및 채널두께, 상하단게이트 전압 그리고 도핑분포함수의 변화에 따라 문턱전압이하 스윙 및 전도중심은 상호 유기적으로 변화하고 있다는 것을 알 수 있었다.

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The Study of Nanocrystalline Silicon Bottom-gate Thin Film Transistor Fabricated at Low Temperature for Flexible Display

  • Lee, Youn-Jin;Lee, Kyoung-Min;Hwang, Jae-Dam;No, Kil-Sun;Yoon, Kap-Soo;Yang, Sung-Hoon;Hong, Wan-Shick
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.557-559
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    • 2009
  • We attempted modulation of hydrogen dilution ratio to achieve both the minimal incubation layer and high deposition rate. The incubation layer thickness was estimated by transmission electron microscopy (TEM) and crystallization fraction was measured by Raman spectroscopy.

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The modified HSINFET using the trenched hybrid injector (트렌치 구조의 Hybrid Schottky 인젝터를 갖는 SINFET)

  • 김재형;김한수;한민구;최연익
    • The Transactions of the Korean Institute of Electrical Engineers
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    • v.45 no.2
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    • pp.230-234
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    • 1996
  • A new trenched Hybrid Schottky INjection Field Effect Transistor (HSINFET) is proposed and verified by 2-D semiconductor device simulation. The feature of the proposed structure is that the hybrid Schottky injector is implemented at the trench sidewall and p-n junction injector at the upper sidewall and bottom of a trench. Two-dimensional simulation has been performed to compare the new HSINFET with the SINFET, conventional HSINFET and lateral insulated gate bipolar transistor(LIGBT). The numerical results shows that the current handling capability of the proposed HSINFET is significantly increased without sacrificing turn-off characteristics. The proposed HSINFET exhibits higher latch-up current density and much faster switching speed than the lateral IGBT. The forward voltage drop of the proposed HSINFET is 0.4 V lower than that of the conventional HSINFET and the turn-off time of the trenched HSINFET is much smaller than that of LIGBT.

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E-feedback System Using QR Cod Tag (QR 코드 태그를 이용한 전자 피드백 시스템)

  • Ahmed, Hamdi A.;Jang, Jong-Wook
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2017.10a
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    • pp.282-283
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    • 2017
  • A government or non-governmental organization give service to their customer. Each organization have different hierarch levels. Service satisfaction surveys have become an important tool for government planners, as important in the perceived quality of service lead to great delivery of public service. When a customer gives feedback at a bottom level of organization, it is so difficult reach to higher official in time. This paper argue that, Quick Response (QR) code open up the possibility of conducting public service satisfaction at lower cost and the way feedback is directly routed to the relevant party according to their hierarchical level and gate real time feedback using specific smart phone application.

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Investigation on Electrical Property of Amorphous Oxide SiZnSnO Semiconducting Thin Films (비정질 산화물 SiZnSnO 반도체 박막의 전기적 특성 분석)

  • Byun, Jae Min;Lee, Sang Yeol
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.32 no.4
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    • pp.272-275
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    • 2019
  • We investigated the electrical characteristics of amorphous silicon-zinc-tin-oxide (a-SZTO) thin films deposited by RF-magnetron sputtering at room temperature depending on the deposition time. We fabricated a thin film transistor (TFT) with a bottom gate structure and various channel thicknesses. With increasing channel thickness, the threshold voltage shifted negatively from -0.44 V to -2.18 V, the on current ($I_{on}$) and field effect mobility (${\mu}_{FE}$) increased because of increasing carrier concentration. The a-SZTO film was fabricated and analyzed in terms of the contact resistance and channel resistance. In this study, the transmission line method (TLM) was adopted and investigated. With increasing channel thickness, the contact resistance and sheet resistance both decreased.

Deviation of Threshold Voltage and Conduction Path for the Ratio of Top and Bottom Oxide Thickness of Asymmetric Double Gate MOSFET (비대칭 DGMOSFET의 상하단 산화막 두께비에 따른 문턱전압 및 전도중심의 변화)

  • Jung, Hakkee
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2014.10a
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    • pp.765-768
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    • 2014
  • 본 연구에서는 비대칭 이중게이트 MOSFET의 상하단 게이트 산화막 두께 비에 대한 문턱전압 및 전도중심의 변화에 대하여 분석하고자한다. 비대칭 이중게이트 MOSFET는 상하단 게이트 산화막의 두께를 다르게 제작할 수 있어 문턱전압이하 영역에서 전류를 제어할 수 있는 요소가 증가하는 장점이 있다. 상하단 게이트 산화막 두께 비에 대한 문턱전압 및 전도중심을 분석하기 위하여 포아송방정식을 이용하여 해석학적 전위분포를 구하였다. 이때 전하분포는 가우스분포함수를 이용하였다. 하단게이트 전압, 채널길이, 채널두께, 이온주입범위 및 분포편차를 파라미터로 하여 문턱전압 및 전도중심의 변화를 관찰한 결과, 문턱전압은 상하단 게이트 산화막 두께 비에 따라 큰 변화를 나타냈다. 특히 채널길이 및 채널두께의 절대값보다 비에 따라 문턱전압이 변하였으며 전도중심이 상단 게이트로 이동할 때 문턱전압은 증가하였다. 또한 분포편차보단 이온주입범위에 따라 문턱전압 및 전도중심이 크게 변화하였다.

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Hydraulic Investigation of Pyokkolche Reservoir (벽골제의 수공학적 고찰)

  • Lee, Jang-U
    • Journal of Korea Water Resources Association
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    • v.31 no.4
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    • pp.397-406
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    • 1998
  • The Pyokkolche Reservoir was constructed as a major public project of the ancient agricultural society, 1600 years ago. From a hydraulic point of view, it is considered to have been carried out with a distinguished technology. It should be in particular noticed that for a consecutive banking the main stream was diverted and drained to the Yonpo stream and the dam with same sea levels on its top along the whole length was built in a nearly straight line in spite of the different sea levels between both ends on the bottom. These suggest that the carrying out artifice and surveying technigue of those days were considerably excellent. However, the insufficient plan and design at the time of the construction, the temporary management and the repeated repair works in the later ages caused the Pyokkolche to lose its function. The Changsaenggeo and Kyungjanggeo gate sites being the facilities for sluices composed of a simple span and a vertical lift hand-operated sing a pully. The advantage of the geographical characteristics at both ends of the main dam was scientifically taken to these sites which also functioned as a spillway against a flood. The gate site of Suyogeo must have been located in an entrance to Suwolri, the northern end of the Pyokkolche and Yutonggeo is presumed to have been located on the right of Sangsori, the southern end of the Pyokklche. Keywords : Pyokkolche Reservoir, construction technology, gate site location.

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