• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.9
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• pp.488-493
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• 2004

In this paper, we present the fabrication of copper electrode array and test of electrochemical discharge machining(ECDM) for glass machining. An array of 72 Cu electrodes is used to machine Borofloat33 glass. The height and diameter of a Cu electrode are 400 $\mu\textrm{m}$ and 100 $\mu\textrm{m}$ respectively. It is fabricated by ICP-RIE, Au-Au thermo-compression bonding, and copper electroplating. Borofloat33 glass is machined by the fabricated copper electrode array in 60 seconds at 55 V. The surface roughness of the machined glass is measured and the machined glass is anodically bonded with silicon.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.2023-2025
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• 2002

We have fabricated a novel vertical trench-Hall device sensitive to the magnetic field parallel to the sensor chip surface. The vertical trench-Hall device is built on SOI wafer which is produced by silicon direct bonding technology using bulk micromachining, where buried $SiO_2$ layer and surround trench define active device volume. Sensitivity up to 350 V/AT is measured.

• Proceedings of the KACD Conference
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• 2001.11a
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• pp.585.2-585
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• 2001

The purpose of this study was to evaluate the microtensile bond strength of sixth-generation adhesives according to various dentin surface treatments and to observe the interface between resin(Z-100TM) and dentin by SEM. This study employed forty-five non-caries extracted human molars and three adhesive systems were used; All-Bond 2(AB), One-Up Bond F(OU), AQ-Bond(AQ).; group 1, 2, 3 were used AB and were respectively treated by smearing(S), ultrasonic cleansing(US), etching(E).(omitted)

• Transactions of the Korean Society of Automotive Engineers
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• v.1 no.3
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• pp.109-117
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• 1993

A carbon/epoxy composite drive shaft used for the power transmission of the automobiles with steel joints. Compared with the metallic drive shaft, the composite one has the weight saving of 50% with equivalent torsional strength and fatigue characteristics. In this study, the filament winding technique for the composite tube and composite/metal joining technique are estabilished. The performance test of the drive shaft is carried out. The optimal condition of the surface roughness of the steel adherend was $1.5{{\mu}m}$ to $2.5{{\mu}m}$, and the optimal condition of the bonding thickness was 0.15mm. Maximum torque and torsional stiffness of the composite drive shaft manufactured by filament winding process were found to be $210kg{\cdot}m$ and $18.5kg{\cdot}m/deg$, respectively.

• Progress in Superconductivity
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• v.1 no.1
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• pp.47-50
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• 1999

An Ag/Ni bi-layer sheet was fabricated by the combination of powder metallurgy, diffusion bonding, cold rolling and texture annealing processes. After heat treating the cold rolled thin Ag/Ni bi-layer sheet at $900^{\circ}C$ for 4h, the excellent cube texture was developed on nickel surface. Qualitative chemical analysis using EPMA showed that inter diffusions of Ni and Ag in Ag/Ni bi-layer composite were negligible. It showed that Ag can be used as a chemical barrier for Ni and vice versa.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.7
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• pp.45-51
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• 2000

지난 세기부터 MEMS 제작 기술을 이용하여 만들어진 시스템들을 의학이나 생물학적인 용도로 응용하기 위한 많은 연구가 활발히 이루어져 왔다. 기술적인 측면에서 이러한 연구들은 MEMS 분야의 초창기에 강조되어 온 표면 및 몸체 미세 가공 기술(surface ＆ bulk micromachining)과 같은 미세 구조물 제작 기술의 발전에 힘입은 바 크다. 그러나 MEMS 기술이 점차 발전되어 오면서, 가공 기술이 고도화되고 미세 시스템의 구조가 점차 복잡해짐에 따라, 많은 연구들이 단순한 가공기술을 넘어 미세 시스템을 조립하고 집적화할 수 있는 기술, 접합 (bonding) 기술, 패키징 (packaging) 기술, 3차원 형상의 제작 기술, 실리콘(silicon)이나 유리(glass)가 아닌 다른 재료를 이용한 미세 가공 기술 등의 개발을 중심으로 이루어지고 있다.(중략)

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.223-224
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• 2006

In this study, we have investigated the micromachining of PZT to fabricate interdigitated electrodes of electro active material actuator using Nd:YAG laser We have observed groove shapes of PZT with changing beam power, scanning speed, gas, and so on to find optimum conditions of the laser processing for PZT grooves. As a result, this method has been applied to the laser micromachining for grooves in PZT surface, and we could have optimum parameters of Nd:YAG laser Finally it was shown that the laser micromachining of PZT can substitute fer bonding, etching and deposition processes in fabricating electro active material actuator embedded with interdigitated electrodes.

• Proceedings of the Korea Technical Association of the Pulp and Paper Industry Conference
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• 2000.04a
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• pp.39-46
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• 2000

In pulp and papermaking process, enzymatic treatment of pulp fibres has been a topic of increasing interest in last decade. Lots of patents, papers and research reports were published on the application of enzymes in the fields of enzymatic bleaching, deinking, slime control, pitch control, waste water treatment and fibre modification. Cellulase and hemicellulase are the principal enzymes used for the modification of fibre property. This study was carried out for determinating the behaviors of enzyme to pulp fibres. A commercial enzyme, Denimax BT which is consisted with cellulase and hemicellulase, was treated to the kraft pulp produced from domestic hardwood mixtures. Results were mainly concentrated on the behaviors of freeness, drainability and fines content of fibres, and physical properties of paper with enzyme treatment. The freeness levels and dewatering ability were developed, and the fines contents were decreased. The creation of fines were controlled by the method of pre-enzyme treatment prior to fibre beating. The mechanical strength of paper, like tensile, burst, tear strength and folding endurance, were remarkably improved by the pre-enzyme treatment.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.14 no.5
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• pp.80-86
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• 2005

High velocity oxy-fuel thermally sprayed coating of the WC-Co cermet material is a well-established process for modifying the surface properties of the structural components exposed to the corrosive and wear attacks. The hard WC phase in the coating resists to the wear while the soft metallic Co increases the adhesive and cohesive bonding properties. The coating properties deposited by the HVOF process are greatly dependent on the feedstock materials and processing parameters. The effects of the feedstock material and process coating parameters including the in-flight particle parameters and resultant coating microstructures were observed in this paper.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.5 s.98
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• pp.40-47
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• 1999

In CMP for semiconductor wafer films, the acceptable within-chip planarity, within-wafer and wafer-to-wafer nonuniformity could be achieved by conditioning. The role of conditioning is to remove continuously polishing residues from pad and to maintain the initial pad surface pores. To reach these requirements, the diamond grits disk has been considered as a conventional conditioner. However, we have investigated many defects as scratch on wafers out of diamond grits shedding, contaminations from bonding materials, and pad pore subsidences by over-conditioning. So, this paper studies the effect of ultrasonic vibration in CMP conditioning as a representative. The effect of ultrasonic vibration was certified through ILD, Metal CMP.