The change of electric and optical properties by high density $O_2$ plasma treatment of deposited GZO Thin Film on Polyimide substrate
(Polyimide 기판 위에 증착된 GZO 박막의 고밀도 $O_2$ 플라즈마 처리에 따른 전기적, 광학적 특성 변화)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2008.06a
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- pp.162-163
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- 2008