• 한국세라믹학회지
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• 제38권10호
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• pp.871-875
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• 2001

Cobalt silicidation at sidewall spacer edge of Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs) with post annealing treatment for capacitor forming process has been investigated as a function of dopant species. Cobalt silicidation of nMOSFET with n-type Lightly Doped Drain (LDD) and pMOSFET with p-type LDD produces a well-developed cobalt silicide with its lateral growth underneath the sidewall spacer. In case of pMOSFET with n-type LDD, however, a void is formed at the sidewall spacer edge with no lateral growth of cobalt silicide. The void formation seems to be due to a retarded silicidation process at the LDD region during the first Rapid Thermal Annealing (RTA) for the reaction of Co with Si, resulting in cobalt mono silicide at the LDD region. The subsequent second RTA converts the cobalt monosilicide into cobalt disilicide with the consumption of Si atoms from the Si substrate, producing the void at the sidewall spacer edge in the Si region. The void formed at the sidewall spacer edge serves as a resistance in the current-voltage characteristics of the pMOSFET device.

• Macromolecular Research
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• 제12권5호
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• pp.437-442
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• 2004

We have fabricated a polymeric waveguide by using a hot embossing technique and have investigated its propagation loss. The replication of waveguide channels through the use of a hot embossing technique is of interest as a single-step process that could deliver surface roughnesses far smaller than the wavelength. We have evaluated experimentally that the sidewall roughness has a dominant effect on insertion losses of the multimode polymeric waveguide. The propagation loss of the waveguide decreased dramatically upon decreasing the sidewall roughness of the channel. We have confirmed that the preparation of waveguides having nanometer-scale sidewall roughness and 0.1 dB/cm propagation loss is possible when using the hot embossing technique.

• Earthquakes and Structures
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• 제17권6호
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• pp.611-621
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• 2019

Precast concrete structure has many advantages, but the assembled seam will affect potentially the overall seismic performance of structure. Based on the sidewall joint located in the bottom of assembled monolithic subway station, the main objectives of this study are, on one hand to present an experimental campaign on the seismic behavior of precast sidewall joint (PWJ) and cast-in-place sidewall joint (CWJ) subjected to low-cycle repeated loading, and on the other hand to explore the effect of shape and position of assembled seam on load carrying capacity and crack width of precast sidewall joint. Two full-scale specimens were designed and tested. The important index of failure pattern, loading carrying capacity, deformation performance and crack width were evaluated and compared. Based on the test results, a series of different height and variably-shape of assembled seam of precast sidewall joint were considered. The test and numerical investigations indicate that, (1) the carrying capacity and deformation capacity of precast sidewall and cast-in-place sidewall were very similar, but the crack failure pattern, bending deformation and shearing deformation in the plastic hinge zone were different obviously; (2) the influence of the assembled seam should be considered when precast underground structures located in the aquifer water-bearing stratum; (3) the optimal assembled seam shape and position can be suggested for the design of precast underground concrete structures according to the analysis results.

• JSTS:Journal of Semiconductor Technology and Science
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• 제13권6호
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• pp.662-667
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• 2013

The effect of fluorine ions, which can be reacted with boron in high-doped BPSG, is investigated on the contact sidewall wiggling profile in semiconductor process. In the semiconductor device, there are many contacts on $p^+/n^+$ source and drain region. However these types of wiggling profile is only observed at the $n^+$ contact region. As a result, we find that the type of plug implantation dopant can affect the sidewall wiggling profile of contact. By optimizing the proper fluorine gas flow rate, both the straight sidewall profile and the desired electrical characteristics can be obtained. In this paper, we propose a fundamental approach to improve the contact sidewall wiggling profile phenomena, which mostly appear in high-doped BPSG on next-generation DRAM products.

• 한국항해항만학회지
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• 제38권6호
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• pp.561-565
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• 2014

This paper is mainly concerned with the interaction effects between two vessels and sidewall with a mound. Experimental study on hydrodynamic forces between ship and sidewall with a mound was already shown in the previous paper, measured by varying the distances between ship and sidewall. The ship maneuvering simulation was conducted to find out the minimum safe distance between vessels, which is needed to avoid sea accident in confined waters. From the inspection of this investigation, it indicates the following result. When and if one vessel passes the other vessel through the proximity of sidewall with a mound, the spacing between two vessels is needed for the velocity ratio of 1.2, compared to the case of 1.5. Also, for the case of ship-size estimation, the ship maneuvering motion is more affected by interaction effects for the overtaken small vessel, compared to the overtaking large vessel.

• 한국전기전자재료학회논문지
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• 제17권2호
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• pp.212-216
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• 2004

In this paper, we have fabricated a triode field emitter using carbon nanotubes (CNTs) directly grown by thermal chemical vapor deposition(CVD) method as an electron omission source. Vertically aligned CNTs have been grown in the center of the gate hole, to the size of 1.5 ${\mu}{\textrm}{m}$ in diameter, with help of a sacrificial layer of a type generally used in metal tip process. By the method of tilling the substrate, we made CNTs emitters both with and without SiO$_2$layer, a sidewall protector, deposited on sidewall of gate. After that we researched the electrical characteristics about two types of emitters. In effect, a sidewall protector can enhance the electrical characteristics by suppressing the problem of short circuits between the gate and the CNTs. The leakage current of an emitter with a sidewall protector is approximately sevenfold lower than that of an emitter without it at a gate voltage of 100 V.

• JSTS:Journal of Semiconductor Technology and Science
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• 제17권2호
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• pp.192-198
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• 2017

In this paper, we propose a novel double gate vertical channel tunneling field effect transistor (DVTFET) with a dielectric sidewall and optimization characteristics. The dielectric sidewall is applied to the gate region to reduced ambipolar voltage ($V_{amb}$) and double gate structure is applied to improve on-current ($I_{ON}$) and subthreshold swing (SS). We discussed the fin width ($W_S$), body doping concentration, sidewall width ($W_{side}$), drain and gate underlap distance ($X_d$), source doping distance ($X_S$) and pocket doping length ($X_P$) of DVTFET. Each of device performance is investigated with various device parameter variations. To maximize device performance, we apply the optimum values obtained in the above discussion of a optimization simulation. The optimum results are steep SS of 32.6 mV/dec, high $I_{ON}$ of $1.2{\times}10^{-3}A/{\mu}m$ and low $V_{amb}$ of -2.0 V.

• 항공우주시스템공학회지
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• 제10권3호
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• pp.39-43
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• 2016

In this paper, a wind-tunnel test is accomplished to investigate the roll characteristics of a variable-span wing flying inside a channel. The factors that affect the roll characteristics of the wing were identified by analyzing the measured data; accordingly, when the wing is flying without both the ground and sidewall effects, the asymmetric wing extension causes the roll moment. Both the ground and the sidewall can increase the roll moment, but when the wing is affected by both the ground and the sidewall, the roll moment does not increase as much as the case where the wing is only affected by the ground. Also, the aerodynamic characteristics of the flying wing inside a channel are the nonlinear function of the wing height and the gap between the wingtip and the sidewall, both of which should be considered in a study of the stability and the flight control of the wing-in-ground effect of the vehicle flying inside a channel.

• 한국화재소방학회논문지
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• 제33권1호
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• pp.50-59
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• 2019

과환기 화재조건에서 화원과 측벽의 거리에 따른 화재특성에 관한 실험 및 수치해석 연구가 수행되었다. 1/3 축소된 ISO 9705 화재실이 제작되었으며, Spruce wood crib이 연료로 사용되었다. 구획 내부의 현상 이해를 위하여 Fire Dynamics Simulator (FDS)를 활용한 시뮬레이션이 수행되었다. 개방된 공간 화재에 비해 구획실 화재는 벽면의 열 피드백 효과로 인하여 질량 감소율과 열발생률이 증가됨이 확인되었다. 측벽과 화원의 거리가 감소됨에 따라 화염으로의 공기 유입 제한에도 불구하고 주요 화재특성인 최대 질량 감소율, 열발생률, 화재 성장률, 온도 및 열유속이 증가되었다. 특히 측벽과 화원이 접촉되었을 때 이들 물리량의 가장 큰 변화가 확인되었다. 추가로 화원과 측벽의 거리에 따른 구획 내부의 유동구조의 변화로 인하여 온도의 수직분포에 상당한 변화가 발생됨이 확인되었다.

• Elastomers and Composites
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• 제52권3호
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• pp.167-172
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• 2017

Ultra-high performance (UHP) tires, for which demand has recently surged, are subject to severe strain conditions due to the low aspect ratio of their sidewalls. It is important to ensure sidewall material durability, since a sudden tire sidewall breakage during vehicle operation is likely to cause a major accident. In the automotive application of rubber parts, cracking is defined as a failure because when cracks occur, the mechanical properties of rubber change. According to Mars, Andre et al., strain and strain energy density (SED) are mainly used as a failure parameters and the SED is generally used as a fatigue damage parameter. In this study, the fatigue life curves of sidewall rubber of tires were determined by using the SED as fatigue damage parameter while the effect of aging on fatigue life was evaluated after obtaining the SED-Nf curves according to aging condition.