• 제목/요약/키워드: Organic Ferroelectric

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MOD법을 이용한 BNdT박막의 제조 및 특성 연구 (The Preparation and Characterization of BNdT Thin Films by MOD Process)

  • 김기범;장건익
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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    • pp.861-864
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    • 2002
  • Ferroelectric $Bi_{4-x}Nd_xTi_3O_{12}$(BNdT) thin films with the composition(x=0.75) were prepared on pt/Ti/$SiO_2$/Si(100) substrate by metal-organic deposition. The electrical and structural characteristics of BNdT thin films were investigated to develop ferroelectric thin films for capacitor layers of FRAM. After spin coating, thin films were annealed at $650^{\circ}C$ for 1hour in oxygen atmosphere. Scanning electron micrographs showed uniform surfaces composed of rod-like grains. The $Bi_{4-x}Nd_xTi_3O_{12}$(X=0.75) thin film capacitors with a Pt top electrode showed better ferroelectric properties. At the applied voltage of 5V, the dielectric constant$(\varepsilon_r)$, dissipation factor$(tan{\delta})$, remanent polarization(2Pr) and nonvolatile swiching charge of the $Bi_{4-x}Nd_xTi_3O_{12}$(x=0.75)thin films were about 346.7, 0.095, $56{\mu}C/cm^2$ and $38{\mu}C/cm^2$ respectively. Also the capacitor did not show any significant fatigue up to $8{\times}10^{10}$ read/write switching cycles at a frequency of 1MHz.

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The Microstructure and Ferroelectric Properties of Ce-Doped Bi4Ti3O12 Thin Films Fabricated by Liquid Delivery MOCVD

  • Park, Won-Tae;Kang, Dong-Kyun;Kim, Byong-Ho
    • 한국세라믹학회지
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    • 제44권8호
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    • pp.403-406
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    • 2007
  • Ferroelectric Ce-doped $Bi_4Ti_3O_{12}$ (BCT) thin films were deposited by liquid delivery metal organic chemical vapor deposition (MOCVD) onto a $Pt(111)/Ti/SiO_2/Si(100)$ substrate. X-ray diffraction (XRD) and scanning electron microscopy (SEM) were used to identify the crystal structure, the surface, and the cross-section morphology of the deposited ferroelectric flims. After annealing above $640^{\circ}C$, the BCT films exhibited a polycrystalline structure with preferred (001) and (117) orientations. The BCT lam capacitor with a top Pt electrode showed a large remnant polarization ($2P_r$) of $44.56{\mu}C/cm^2$ at an applied voltage of 5 V and exhibited fatigue-free behavior up to $1.0{\times}10^{11}$ switching cycles at a frequency of 1 MHz. This study clearly reveals that BCT thin film has potential for application in non-volatile ferroelectric random access memories and dynamic random access memories.

Ferroelectric-gate Field Effect Transistor Based Nonvolatile Memory Devices Using Silicon Nanowire Conducting Channel

  • Van, Ngoc Huynh;Lee, Jae-Hyun;Sohn, Jung-Inn;Cha, Seung-Nam;Hwang, Dong-Mok;Kim, Jong-Min;Kang, Dae-Joon
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.427-427
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    • 2012
  • Ferroelectric-gate field effect transistor based memory using a nanowire as a conducting channel offers exceptional advantages over conventional memory devices, like small cell size, low-voltage operation, low power consumption, fast programming/erase speed and non-volatility. We successfully fabricated ferroelectric nonvolatile memory devices using both n-type and p-type Si nanowires coated with organic ferroelectric poly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)] via a low temperature fabrication process. The devices performance was carefully characterized in terms of their electrical transport, retention time and endurance test. Our p-type Si NW ferroelectric memory devices exhibit excellent memory characteristics with a large modulation in channel conductance between ON and OFF states exceeding $10^5$; long retention time of over $5{\times}10^4$ sec and high endurance of over 105 programming cycles while maintaining ON/OFF ratio higher $10^3$. This result offers a viable way to fabricate a high performance high-density nonvolatile memory device using a low temperature fabrication processing technique, which makes it suitable for flexible electronics.

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Effects of Lanthanides-Substitution on the Ferroelectric Properties of Bismuth Titanate Thin Films Prepared by MOCVD Process

  • Kim, Byong-Ho;Kang, Dong-Kyun
    • 한국세라믹학회지
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    • 제43권11호
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    • pp.688-692
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    • 2006
  • Ferroelectric lanthanides-substituted $Bi_4Ti_3O_{12}$ $(Bi_{4-x}Ln_xTi_3O_{12}, BLnT)$ thin films approximately 200 nm in thickness were deposited by metal organic chemical vapor deposition onto Pt(111)/Ti/SiO$_2$/Si(100) substrates. Many researchers reported that the lanthanides substitution for Bi in the pseudo-perovskite layer caused the distortion of TiO$_6$ octahedron in the a-b plane accompanied with a shift of the octahedron along the a-axis. In this study, the effect of lanthanides (Ln=Pr, Eu, Gd, Dy)-substitution and crystallization temperature on their ferroelectric properties of bismuth titanate $(Bi_4Ti_3O_{12}, BIT)$ thin films were investigated. As BLnT thin films were substituted to lanthanide elements (Pr, Eu, Gd, Dy) with a smaller ionic radius, the remnant polarization (2P$_r$) values had a tendency to increase and made an exception of the Eu-substituted case because $Bi_{4-x}Eu_xTi_3O_{12}$ (BET) thin films had the smaller grain sizes than the others. In this study, we confirmed that better ferroelectric properties can be expected for films composed of larger grains in bismuth layered peroskite materials. The crystallinity of the thin films was improved and the average grain size increased as the crystallization temperature,increased from 600 to 720$^{\circ}C$. Moreover, the BLnT thin film capacitor is characterized by well-saturated polarization-electric field (P-E) curves with an increase in annealing temperature. The BLnT thin films exhibited no significant degradation of switching charge for at least up to $1.0\times10^{11}$ switching cycles at a frequency of 1 MHz. From these results, we can suggest that the BLnT thin films are the suitable dielectric materials for ferroelectric random access memory applications.

Ferroelectric and Antiferroelectric Behavior in Chiral Bent-shaped Molecules with an Asymmetric Central Naphthalene Core

  • Lee, Seng-Kue;Tokita, Masatoshi;Shimbo, Yoshio;Kang, Kyung-Tae;Takezoe, Hideo;Watanabe, Junji
    • Bulletin of the Korean Chemical Society
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    • 제28권12호
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    • pp.2241-2247
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    • 2007
  • A new series of chiral bent-shaped liquid crystals with an asymmetric central core based on 1,6- dihydroxynaphthalene and chiral terminal chain prepared from (S)-(?)-2-methyl-1-butanol, 1,6-naphthalene bis[4-(4-alkoxyphenyliminomethyl)]benzoates [N(1,6)-n-O-PIMB(n-2)*-(n-4)O (n = 8-11)] were synthesized. Their mesomorphic properties and phase structures were investigated by means of electro-optical, polarization reversal current, and second harmonic generation measurements in order to confirm the relationship between the molecular structure and phase structure. All odd n (n = 9 and 11) compounds, N(1,6)-9-O-PIMB7*-5O and N(1,6)-11-O-PIMB9*-7O exhibit antiferroelectric phase, whereas even n (n = 8 and 10) compounds was flexible, N(1,6)-10-O-PIMB8*-6O exhibits the ferroelectric phase but N(1,6)-8-O-PIMB6*-4O exhibits the antiferroelectric phase. These results come from the decrease of the closed packing efficiency within a layer and the lack of uniform interlayer interaction between adjacent layers, which were caused by the asymmetrical naphthalene central core. Thus, we concluded that the structure of central core as well as the terminal chain plays an important role for the emergence of particular polar ordering in phase structures.

강유전체 박막 형성방법에 따른 용액 공정 기반 강유전체 전계효과 트랜지스터의 전기적 특성 의존성 (Dependence of Ferroelectric Film Formation Method on Electrical Characteristics in Solution-processed Ferroelectric Field Effect Transistor)

  • 김우영;배진혁
    • 전자공학회논문지
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    • 제50권7호
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    • pp.102-108
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    • 2013
  • 용액 공정 기반으로 유기 전자소자를 제작할 시, 회전 도포 방법을 이용하는데 이 방법의 단점 중의 하나는 후속 회전 도포할 때 용액 속의 용매에 의해 이미 제작된 유기 박막을 물리적 또는 화학적인 손상을 입힐 수 있다는 것이다. 이러한 문제들로 인해 후속적인 박막 제조에 사용될 수 있는 용매의 종류는 매우 제한적일 수 밖에 없다. 본 논문에서는 기존에 알려진 용매들의 적절한 조합으로 인해 다층 박막 제작이 가능함을 보이고, 이를 이용하여 용액 공정 기반 유기 트랜지스터를 제작하여 성능의 향상을 보일 것이다. 트랜지스터의 구조는 하부 게이트 하부 접촉 (bottom gate, bottom contact) 구조로 제작되었고 게이트 절연체는 강유전체 고분자로 제작되었는데 한 번의 회전 도포 방법과 두 번의 회전 도포 방법으로 동일 두께를 형성하여 두 트랜지스터를 제작, 드레인 전압에 따른 소스-드레인 전류를 비교하였다. 그 결과 소스-게이트 누설 전류 감소 효과가 있었고, ON 상태에서의 소스-드레인 전류의 상승효과도 관찰되었다. 전류-전압 그래프로부터 계산된 이동도는 약 2.7배 증가되었다. 그러므로 용액 공정 기반 전계효과 트랜지스터를 제작할 시, 게이트 절연체를 다층 구조로 제작하면 성능 향상에 이점이 많다는 것을 알 수 있었다.

Si 기판위에 증착한 SrTiO$_3$ /PbTiG$_3$ 고용체 박막의 구조적 특성 및 C-V 특성 (Structural and C-V characteristics of SrTiO$_3$ /PbTiO$_3$ thin film deposited on Si)

  • 이현숙;이광배;김윤정;박장우
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
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    • pp.71-74
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    • 2000
  • Pt/Pb$TiO_3$/$SrTiO_3$/p-Si films were prepared by metallo-organic solution deposition(M0SD) method and investigated its structure and ferroelectric properties. Crystallinity of specimen as a funtions of post annealing temperature and the thickness of $SrTiO_3$(STO) buffer layer was studied using XRD and AFM. Based on C-V and P-E curve, $PbTiO_3$(PTO) capacitors showed good ferroelectric hysteresis arising from the polarization switching properties. When the thickness of ST0 buffer layer between PTO and Si substrate was 260 nrn and the post annealing temperature was $650^{\circ}C$, it was showed that production of the pyrochlore phase due to interdiffusion of Si into FTO was prevented. The dielectric constant of FTO thin films calculated from a maximum Cma in the accumulation region was 180 and the dielectric loss was 0.30 at 100 kHz frequency. The memory window in the C-V curve is 1.6V at a gate voltage of 5V.

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Cyclic Co-oligomeric Ferroelectric Liquid Crystals with Fast Switching Properties, Wide SmC* Temperature Range and de Vries-type SmA*-SmC* Transition

  • Park, Seung-Beom;Cho, Tai-Yon;Yoon, Kyung-Hwan;Chang, Ji-Young;Zentel, Rudolf;Yoon, Do-Y.
    • Bulletin of the Korean Chemical Society
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    • 제32권spc8호
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    • pp.3057-3062
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    • 2011
  • We have synthesized and characterized the first cyclic co-oligomeric ferroelectric liquid crystals (FLCs) based on cyclic siloxanes and found that the co-oligomer containing two different mesogenic units exhibits $SmC^*$ mesophase over a wide temperature range from $65^{\circ}C$ to $135^{\circ}C$, much wider than those of the monomer counterparts and the cyclic homo-oligomers. The cyclic co-oligomeric liquid crystal readily filled the display cell and exhibited fast switching times in the range of 4 ms to 6 ms over the entire $SmC^*$ phase. Moreover, the practical absence of layer shrinkage, attributed to de Vries-type transition, shows an additional significant advanage for cyclic co-oligomeric FLCs in LCD applications.

MOD법을 이용한 BLT박막의 제초 및 특성에 관한 연구 (The Preparation and Characterization of BLT Thin Films by MOD Process)

  • 이진한;장건익
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.186.1-189
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    • 2001
  • Ferroelectric $Bi_{4-x}$La$_{x}$Ti$_3$O$_{12}$ (BLT)thin films with various compositions(x=0.65, 0.70, 0.75) were prepared on Pt//Ti/SiO$_2$/Si(100) substrate by metal-organic deposition. The electrical and structural characteristics of BLT thin films were investigated to develop ferroelectric thin films for capacitor layers of FRAM. After spin coating, thin films were annealed at $650^{\circ}C$ for 1hour in oxygen atomosphere. Scanning electron micrographs showed uniform surfaces composed of rod-like grains. The $Bi_{4-x}$La$_{x}$Ti$_3$O$_{12}$ (x=0.70) thin film capacitors with a Pt top electrode showed better ferroelectric properties than other films. At the applied voltage of 5V, the dielectric constant($\varepsilon$$_{r}$), dissipation factor(tan$\delta$),remanent polarization(2Pr), and coercive field(2Ec) of the $Bi_{4-x}$La$_{x}$Ti$_3$O$_{12}$ (x=0.70)thin films were about 272.54, 0.059, 32.4 $\mu$C/cm$^2$, 2Ec=119.9kV/cm. Also the capacitor did not show any significant fatigue up to 4.8$\times$10$^{10}$ read/write switching cycles.hing cycles.s.

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