Improvement in Ferroelectric Properties of $SrBi_2Ta_2O_9$ Thin Films with seed Layer by Liquid Delivery Metal-Organic Chemical Vapor Deposition

액체운반용 유기금속화학증착법으로 제조된 SBT박막의 씨앗층에 의한 강유전특성의 향상

  • Published : 2001.05.01

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