• Journal of the Korean institute of surface engineering
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• v.41 no.6
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• pp.308-311
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• 2008

Oxide layers were prepared on Al2021 alloys substrate under a hybrid voltage of AC 200 V (60 Hz) combined with DC 260 V value at room temperature within $5{\sim}60\;min$ by plasma electrolytic oxidation (PEO). An optimized aluminate-fluorosilicate solution was used as the electrolytes. The surface morphology, thickness and composition of layers on Al2021 alloys at different reaction times were studied. The results showed that it is possible to generate oxide layers of good properties on Al2021 alloys in aluminate-fluorosilicate electrolytes. Analysis show that the double-layer structure oxide layers consist of different states such as ${\alpha}-{Al_2}{O_3}$ and ${\gamma}-{Al_2}{O_3}$. For short treatment times, the formation process of oxide layers follows a linear kinetics, while for longer times the formation process slows down and becomes a steady stage. During the PEO processes, the average size of the discharge channels increased gradually as the PEO treatment time increased.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.39-42
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• 2002

Recently, CMP (chemical mechanical polishing) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, COO (cost of ownership) and COC (cost of consumables) were relatively increased because of expensive slurry. In this paper, we have studied the possibility of recycle of reused silica slurry in order to reduce the costs of CMP slurry. The post-CMP thickness and within-wafer non-uniformity(WIWNU) were measured as a function of different slurry composition. As a experimental result, the performance of reused slurry with annealed silica abrasive of 2 wt% contents was showed high removal rate and low non-uniformity. Therefore, we propose two-step CMP process as follows In the first-step CMP, we can polish the thick and rough film surface using remaked slurry, and then, in the second-step CMP, we can polish the thin film and fine pattern using original slurry. In summary, we can expect the saving of high costs of slurry.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.12
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• pp.1017-1021
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• 2007

To implement tera bit level non-volatile memories of low power and fast operation, proving statistical reproductivity and satisfying reliabilities at the nano-scale are a key challenge. We fabricate the charge trapping nano scaled SONOS unit memories and 64 bit flash arrays and evaluate reliability and performance of them. In case of the dielectric stack thickness of 4.5 /9.3 /6.5 nm with the channel width and length of 34 nm and 31nm respectively, the device has about 3.5 V threshold voltage shift with write voltage of $10\;{\mu}s$, 15 V and erase voltage of 10 ms, -15 V. And retention and endurance characteristics are above 10 years and $10^5$ cycle, respectively. The device with LDD(Lightly Doped Drain) process shows reduction of short channel effect and GIDL(Gate Induced Drain Leakage) current. Moreover we investigate three different types of flash memory arrays.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.3
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• pp.221-226
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• 2013

The water soluble quantum dots (QDs) are synthesized by the phase transfer and silica coating reaction. The photoluminescence intensity of silica-coated QDs are mainly affected by the amount of phase transfer agent, SDS (sodium dodecyl sulfate), and the maximum value is obtained at the cmc (critical micell concentration) concentration of SDS in the phase transfer reaction. Based on fluorescence spectra and field emission transmission electron microscope (FETEM), the energy transfer rate by forster resonance energy transfer (FRET) is increasing with the thickness of the silica shell coated on CdSe/ZnS QDs.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.12
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• pp.49-55
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• 2020

In order to improve the electromagnetic shielding rate of Carbon Fiber (CF), it was produced using the nickel nano-powder impregnating method. Using two types of nickel powder having thicknesses of 50 ㎛ and 100 ㎛, and a thermoplastic elastomer resin, a compound containing 10-20% nickel content was mixed and then manufactured through an extruder. The CF coated with the compound was woven and manufactured using a 1-ply specimen. The final nickel content of the specimen was verified using TGA and the distribution of nickel powder on the CF surface was verified using SEM. The metal shows a high shielding rate in the low-frequency band, but the shielding rate decreases at higher-frequency bands. The CF improves at the higher frequency band, and metals reflect electromagnetic waves while carbon absorbs electromagnetic waves. The study of shielding materials, which are stronger and lighter than metal, by using CF lighter than metal and enabling the shielding rate from low-frequency band to high-frequency band, confirmed that the larger the area coated with nickel nano-powder, the better the electromagnetic shielding performance. In particular, CF coated with a thickness of 100 ㎛ has a shielding rate similar to that of copper and can also be used for EV/HEV automotive cables and other applications in the future.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.9
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• pp.52-60
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• 2017

This study examined the structural stability of nonlocal magneto-electro-elastic nano plates on elastic foundations using first-order shear deformation theory. Navier's method has been used to solve the buckling loads for all edges simply supported boundary conditions. On the other hand, biaxial buckling analysis of nano-plates has beenrarely studied. According to the Maxwell equation and the magneto-electro boundary condition, the change inthe magnetic and electric potential along the thickness direction of the magneto-electro-elastic nano plate wasdetermined. To reformulate the elasticity theory of the magneto- electro-elastic nano plate, the differential constitutive equation of Eringen was used and the governing equation of the nonlocal elasticity theory was studied using variational theory. The effects of the elastic foundation arebased on Pasternak's assumption. The relationship between nonlocal theory and local theory was analyzed through calculation results. In addition, structural stability problems were investigated according to the electric and magnetic potentials, nonlocal parameters, elastic foundation parameters, and side-to-thickness ratio. The results of the analysis revealedthe effects of the magnetic and electric potential. These calculations can be used to compare future research on new material structures made of magneto-electro-elastic materials.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.2
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• pp.1109-1117
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• 2014

We study free vibration analysis of sigmoid functionally graded materials(S-FGM) nano-scale plates, using a nonlocal elasticity theory of Eringen in this paper. This theory has ability to capture the both small scale effects and sigmoid function in terms of the volume fraction of the constituents for material properties through the plate thickness. Numerical solutions of S-FGM nano-scale plate are presented using this theory to illustrate the effect of nonlocal theory on natural frequency of the S-FGM nano-scale plates. The relations between nonlocal and local theories are discussed by numerical results. Further, effects of (i) power law index (ii) nonlocal parameters, (iii) elastic modulus ratio and (iv) thickness and aspect ratios on nondimensional frequencies are investigated. In order to validate the present solutions, the reference solutions are compared and discussed. The results of S-FGM nano-scale plates using the nonlocal theory may be the benchmark test for the free vibration analysis.

• Korean Journal of Materials Research
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• v.21 no.3
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• pp.174-179
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• 2011

Ultra-thin aluminum (Al) and tin (Sn) films were grown by dc magnetron sputtering on a glass substrate. The electrical resistance R of films was measured in-situ method during the film growth. Also transmission electron microscopy (TEM) study was carried out to observe the microstructure of the films. In the ultra-thin film study, an exact determination of a coalescence thickness and a continuous film thickness is very important. Therefore, we tried to measure the minimum thickness for continuous film (dmin) by means of a graphical method using a number of different y-values as a function of film thickness. The raw date obtained in this study provides a graph of in-situ resistance of metal film as a function of film thickness. For the Al film, there occurs a maximum value in a graph of in-situ electrical resistance versus film thickness. Using the results in this study, we could define clearly the minimum thickness for continuous film where the position of minimum values in the graph when we put the value of Rd3 to y-axis and the film thickness to x-axis. The measured values for the minimum thickness for continuous film are 21 nm and 16 nm for sputtered Al and Sn films, respectively. The new method for defining the minimum thickness for continuous film in this study can be utilized in a basic data when we design an ultra-thin film for the metallization application in nano-scale devices.

• Membrane Journal
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• v.17 no.3
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• pp.254-268
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• 2007

Sodium type faujasite(FAU) zeolite layers with diverse materials characteristics(Si/Al ratio, thickness, and structural discontinuity) were hydrothermally grown on a porous $\alpha-Al_2O_3$ tube, and then the $CO_2/N_2$ separation was evaluated at $30^{\circ}C$ for an equimolar mixture of $CO_2$ and $N_2$. Among hydrothermal conditions, $SiO_2$ content in hydrothermal solution seriously affected materials characteristics: with an increment in the $SiO_2$ content, Si/Al ratio, thickness, and structural discontinuity of grown FAU zeolite layer simultaneously increased. The present study reveals that structural discontinuity(intercrystalline voids due to an incomplete densification and cracks induced by GIS Na-P1 phase) is the most important variable affecting the $CO_2/N_2$ separation. Also, it was suggested that the $CO_2$ desorption in permeate side be the rate-determining(slowest) step in the overall $CO_2$ permeation.

• Journal of the Korean Magnetics Society
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• v.17 no.2
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• pp.95-98
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• 2007

In this paper, the magnetic properties and the annealing behavior of spin valve structures with Mo(MoN) underlayers were studied for various underlayer thickness. The spin valve structure was Si substrate/Mo(MoN)$(t{\AA})/NiFe(21{\AA})/CoFe(28{\AA})/Cu(22{\AA})/CoFe(18{\AA})/IrMn(65{\AA})/Ta(25 {\AA})$. Mo and MoN films were deposited on Si substrates and their thermal annealing behavior was analyzed. The deposition rate of the MoN thin film was decreased and tile resistivity of the MoN thin films were increased as the $N_2$ gas flow was increased. The variations of MR ratio and magnetic exchange coupling field of spin valve structure were smaller with MoN underlayers than that with Mo underlayers up to thickness of $51{\AA}$. MR ratio of spin valves with Mo underlayers was 2.86% at room temperature and increased up to 2.91 % after annealing at $200^{\circ}C$. Upon annealing at $300^{\circ}C$, the MR ratio decreased about 2.16%. The MR ratio of spin valves structure with MoN underlayers for $N_2$ gas flow 1 sccm was 5.27% at room temperature and increased up to 5.56% after annealing at $200^{\circ}C$. Upon annealing at $300^{\circ}C$, the MR ratio decreased about 4.9%.