• Korean Chemical Engineering Research
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• v.40 no.6
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• pp.746-751
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• 2002

Fluidized bed combustion is a coal combustion technology that can reduce both SOx and NOx emission; SOx is removed by limestone that is fed into the combustion chamber and the NOx is reduced by low temperature combustion in a fluidized bed combustor and air stepping, but $N_2O$ generation is quite high. $N_2O$ is not only a greenhouse gas but also an agent of ozone destruction in the stratosphere. The calcium oxide(CaO) is known to be a catalyst of $N_2O$ decomposition. This study of $N_2O$ decomposition reaction in fixed bed reactor packed over CaO bed has been conducted. Effects of parameters such as concentration of inlet $N_2O$ gas, reaction temperature, CaO bed height and effect of $CO_2$, NO, $O_2$ gas on the decomposition reaction have been investigated. As a result of the experiment, it has been shown that $N_2O$ decomposition reaction increased with the increasing fixed bed temperature. While conversion of the reaction was decreased with increasing $CO_2$ concentration. Also, under the present of NO, the conversion of $N_2O$ decomposition is decreased. From the result of kinetic study gained the heterogeneous reaction rate on $N_2O$ decomposition. In the case of $N_2O$ decomposition over CaO, heterogeneous reaction rate is. $\frac{d[N_2O]}{dt}=\frac{3.86{\times}10^9{\exp}(-15841/R)K_{N_2O}[N_2O]}{(1+K_{N_2O}[N_2O]+K_{CO_2}[CO_2])}$. In this study, it is found that the calcium oxide is a good catalyst of $N_2O$ decomposition.

• Journal of Microbiology and Biotechnology
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• v.23 no.1
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• pp.99-105
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• 2013

In this study, nitrous oxide ($N_2O$) emission was compared between the operations of two different sequencing batch reactors, conventional sequencing batch reactor (CNVSBR) and simultaneous nitrification and denitrification sequencing batch reactor (SND-SBR), using synthetic wastewater. The CNV-SBR consisted of anoxic (denitrification) and aerobic phases, whereas the SND-SBR consisted of a microaerobic (low dissolved oxygen concentration) phase, which was achieved by intermittent aeration for simultaneous nitrification and denitrification. The CNV-SBR emitted 3.9 mg of $N_2O$-N in the denitrification phase and 1.6 mg of $N_2O$-N in the nitrification phase, resulting in a total emission of 5.5mg from 432mg of $NH_4^+$-N input. In contrast, the SND-SBR emitted 26.2mg of $N_2O$-N under the microaerobic condition, which was about 5 times higher than the emission obtained with the CNV-SBR at the same $NH_4^+$-N input. From the $N_2O$ yield based on $NH_4^+$-N input, the microaerobic condition produced the highest yield (6.1%), followed by the anoxic (0.9%) and aerobic (0.4%) conditions. It is thought that an appropriate dissolved oxygen level is critical for reducing $N_2O$ emission during nitrification and denitrification at wastewater treatment plants.

• Journal of Advanced Marine Engineering and Technology
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• v.38 no.9
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• pp.1051-1056
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• 2014

Nitrous oxide ($N_2O$) is naturally generated from biological activity, such as bacteria's material exchange. However, recent $N_2O$ concentration in the atmosphere has being increased by the human activities such as industrial growth. One of factors to increase $N_2O$ concentration in the atmosphere is a $N_2O$ emission caused by the combustion of marine fuel oils. The marine transportation presently handles over 99 percent of the international freight cargoes and the number of ship is continuously increasing with increment of cargoes. In this study, author conducted a series of the experimental investigations on which combustion of fuels containing different element concentrations used in a 4-stroke marine diesel engine affect $N_2O$ emissions in the exhaust gas. Moreover, it is assessed on the extent to which fuel combustion patterns in the combustion chamber affect $N_2O$ emissions.

• Transactions on Electrical and Electronic Materials
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• v.5 no.5
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• pp.169-172
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• 2004

Deep sub-micron device required to get the superior ultra thin gate oxide characteristics. In this research, I will recommend a novel shallow trench isolation structure(STI) for thin gate oxide and a $N_2$O gate oxide 30 $\AA$ by NO ambient process. The local oxidation of silicon(LOCOS) isolation has been replaced by the shallow trench isolation which has less encroachment into the active device area. Also for $N_2$O gate oxide 30 $\AA$, ultra thin gate oxide 30 $\AA$ was formed by using the $N_2$O gate oxide formation method on STI structure and LOCOS structure. For the metal electrode and junction, TiSi$_2$ process was performed by RTP annealing at 850 $^{\circ}C$ for 29 sec. In the viewpoints of the physical characteristics of MOS capacitor, STI structure was confirmed by SEM. STI structure was expected to minimize the oxide loss at the channel edge. Also, STI structure is considered to decrease the threshold voltage, result in a lower Ti/TiN resistance( Ω /cont.) and higher capacitance-gate voltage(C- V) that made the STI structure more effective. In terms of the TDDB(sec) characteristics, the STI structure showed the stable value of 25 % ～ 90 % more than 55 sec. In brief, analysis of the ultra thin gate oxide 30 $\AA$ proved that STI isolation structure and salicidation process presented in this study. I could achieve improved electrical characteristics and reliability for deep submicron devices with 30 $\AA$ $N_2$O gate oxide.

• Clean Technology
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• v.17 no.2
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• pp.142-149
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• 2011

The adsorption and desorption behaviors of NO and $N_2O$ over two mixed oxide catalysts, AlCoPd (1/1/0.05) and AlCoFe (1/1/2), have been investigated for the lean $NO_x$ trap applications. The catalysts showed good adsorption capabilities for NO and $N_2O$ without needing oxidation step. The adsorption decreased a lot when they are co-adsorbed with oxygen. While NO kept high adsorbability and selectivity with respect to oxygen, those of $N_2O$ decreased sharply. From the TPD results, NO and $N_2O$ are considered to decompose into nitrogen and oxygen in the higher temperature range and the oxygen seems to be strongly attached to the catalysts even at high temperature.

• Korean Journal of Materials Research
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• v.2 no.1
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• pp.76-82
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• 1992

Deposition of $TEOS-O_3$ oxide film as inter-metal dielectric layer shows the substrate dependency according to the substrate material and pattern density and pitch size. To minimize substrate and Pattern dependency, TEOS-base and $SiH_4-base$ Plasma oxide were predeposited as underlying material on the substrate. The substrate dependency of $TEOS-O_3$ oxide film was more significant on TEOS-base plasma oxide than on $SiH_4-base$ plasma oxide. The dependency of $TEOS-O_3$ oxide film was remarkably reduced, or nearly eliminated, by $N_2$plasma treatment on TEOS-base plasma oxide, which appears to be caused by the O-Si-N structure, observed on the the surface of TEOS-base plasma oxide.

• Korean Journal of Soil Science and Fertilizer
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• v.46 no.6
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• pp.463-468
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• 2013

The level of nitrous oxide ($N_2O$), a long-lived greenhouse gas, in atmosphere has increased mainly due to anthropogenic source, especially application of nitrogen fertilizers. Quantifying $N_2O$ emission from agricultural field is essential to develop national inventories of greenhouse gases (GHGs) emission. The objective of the study was to develop emission factor to estimate direct $N_2O$ emission from agricultural field in Gangwon-do, Korea by measuring $N_2O$ emissions from potato (Solanum tuberosum), red pepper (Capsicum annum L.), and Chinese cabbage (Brassica campestris L.) cultivation lands from 2009 to 2012. Accumulated $N_2O$ emission was $1.48{\pm}0.25kg$ $N_2O-N\;ha^{-1}$ for red pepper, $1.27{\pm}0.27kg$ $N_2O-N\;ha^{-1}$ for potato, $1.49{\pm}0.06kg$ $N_2O-N\;ha^{-1}$ for Chinese cabbage cultivated in spring, and $1.14{\pm}0.22kg$ $N_2O-N\;ha^{-1}$ for fall Chinese cabbage. Emission factor of $N_2O$ calculated from accumulated $N_2O$ emission, nitrogen fertilization rate, and background $N_2O$ emission was $0.0051{\pm}0.0016kg$ $N_2O-N\;ha^{-1}$ N for cropland in Gangwon province. More extensive study is deserved to be conducted to develop $N_2O$ emission factor for upland crops in Korea through examining the emission factors from various regions and crops because $N_2O$ emission is influenced by many factors including climate characteristics, soil properties, and agricultural practices.

• Journal of Power System Engineering
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• v.18 no.6
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• pp.106-112
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• 2014

The diesel engine, which has high compression ratio than other heat engines, has been using as the main power source of marine transport. Especially, since marine diesel engines offer better specific fuel consumption (SFC), it is environment-friendly compared to those used in other industries. However, attentio should be focused on emissions such as nitrous oxide ($N_2O$) which is generated from combustion of low-grade fuels. Because $N_2O$ in the atmosphere is very stable, the global warming potential (GWP) of $N_2O$ is 310 times as large as that of $CO_2$, and it becomes a source of secondary contamination after photo-degradation in the stratosphere. It has been hitherto noted on the $N_2O$ exhaust characteristics from stationary power plants and land transportations, but reports on $N_2O$ emission from the marine diesel engine are very limited. In this experimental study, a author investigated $N_2O$ emission characteristics by using changed diesel fuel components of nitrogen and sulfur concentration, assessed on the factors which affect $N_2O$ generation in combustion. The experimental results showed that $N_2O$ emission exhibited increasement with increasing of sulfur concentration in fuel. However, all kinds of nitrogen component additives used in experiment could not change $N_2O$ emission.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.04b
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• pp.39-42
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• 2000

As gate dimensions continue to shrink below $0.2{\mu}m$, improving CD (Critical Dimension) control has become a major challenge during CMOS process development. Anti-Reflective Coatings are widely used to overcome high substrate reflectivity at Deep UV wavelengths by canceling out these reflections. In this study, we have investigated Batchtype system for PECVO SiOxNy as Anti-Reflective Coatings. The Singletype system was baseline and Batchtype system was new process. The test structure of Singletype is SiON $250{\AA}$ + Cap Oxide $50{\AA}$ and Batchtype is SiON $250{\AA}$ + Cap Oxide $50{\AA}$ or N2O plasma treatment. Inorganic chemical vapor deposition SiOxNy layer has been qualified for bottom ARC on Poly+WSix layer, But, this test was practiced on the actual device structure of TiN/Al-Cu/TiN/Ti stacks. A former day, in Batchtype chamber thin oxide thickness control was difficult. In this test, Batchtype system is consist of six deposition station, and demanded 6th station plasma treatment kits for N2O treatment or Cap Oxide after SiON $250{\AA}$. Good reflectivity can be obtained by Cap Oxide rather than N2O plasma treatment and both system of PECVD SiOxNy ARC have good electrical properties.

• Journal of Korean Society for Atmospheric Environment
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• v.20 no.6
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• pp.749-758
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• 2004

Nitrous oxide ($N_2$O) has been known as an important trace gas due to the greenhouse gas and the major source of stratospheric oxide of nitrogen (NO). Soil is the major source of $N_2$O in nature. The physicochemical characteristics of soils affect the emission of $N_2$O from soil. These physicochemical parameters are soil moisture, soil temperature, and soil N content. Since these parameters are correlated to the flux of $N_2$O from soil individually and compositely, there still remain many unknowns in the mechanism to produce $N_2$O in soil and the roles of such physicochemical parameters which affect the soil $N_2$O emission. Soil $N_2$O fluxes were measured at different levels in water filled pore space (WFPS), soil temperature and soil N contents from the same amounts of soils which were sampled from agriculturally managed upland field in a depth of ～30 cm at Kunsan. The soil $N_2$O flux measurements were conducted in a laboratory with a closed flux chamber system. The optimum soil moisture and soil temperature were observed at 60% of WFPS and ～13$^{\circ}C$. The soil $N_2$O flux increased as soil N contents increases during the whole experimental hours (up to 48 hours). However, average $N_2$O flux decreased after ～30 hours when organic carbon was mixed with nitrogen in the sample soils. It is suggested that organic carbon could be important for the emission of $N_2$O, and that the ratio of N to C needs to be identified in the process of $N_2$O soil emission.