• Journal of the Korean Vacuum Society
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• v.2 no.4
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• pp.474-479
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• 1993

Submicron contact hole filling with aluminum alloys has been achieved with a multistep metallization method, which utilizes a metal " flow" or self-diffusion process at elevated temperatures after the metal was sputter-deposited. A multi-chamber, modular sputtering system was employed to deposit aluminum alloys and subsequently to anneal the deposited metal films under vacuum at high temperatures. The film were deposited on 200 mm wafers with planar, dc magnetron sputtering sources without anysubstrate bias. The basic process steps studied for the multistep metallization include an initial layer deposition at low temperatures less than $100^{\circ}C$, and an annealin gstep at elevated temperatures, between 450 and $550^{\circ}C$. The degree of planarization or step coverage was dependent strongly upon the temperature and time of the flow step and complete filling of the submicron contacts with aluminum alloys was achieved. Responsible mechanisms for the enhancement in step coverge and factros determining uniform and reproducible flow of aluminum alloys during the high temperauture step are discussed.discussed.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.4
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• pp.458-465
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• 2003

The main objective of the research is to develop a research code solving transient incompressible Navier-Stokes equation. In this research code, Adams-Bashforth method was applied to the convective terms of the navier stokes equation and the splitted equations were discretized spatially by finite element methods to solve the complex geometry problems easily. To reduce the divergence on the boundaries of pressure poisson equation due to the unsuitable pressure boundary conditions, multi step approximation pressure boundary conditions derived from the boundary linear momentum equations were used. Simulations of Lid Driven Flow and Flow over Cylinder were conducted to prove the accuracy by means of the comparison with results of the previous workers.

• Journal of the Korean Institute of Telematics and Electronics
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• v.25 no.3
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• pp.269-275
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• 1988

In this paper, a high efficiency motor drive system which improves the multi-step response of PM step motors by reducing the transition time of the motor drive current, is studied by designing a dual-voltage drive circuit. The designed drive circuit eventually prevents the motor from decreasing drive torque while the stepping rate is increased. The method of designing a dual-voltage drive circuit with the motor specifications is suggested in order to improve the response of step rate and drive efficiency. Also, despite improving the power efficiency on motor driving, the response characterstics suggested by the motor manufacture's specifications are satisfied without any special deficiency.

• Journal of Korean Society for Quality Management
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• v.19 no.1
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• pp.151-162
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• 1991

The purpose of this study is to propose a facility layout design algorithm based on artificial intelligence concept, and then to develop a computer program which is more practical than any other conventional facility layout design systems. The algorithm is composed of five step layout procedures; knowledge and data input, knowledge interpretation, priority determination, inference of layout design, and evaluation, In the step of priority determination, the algorithm is divided into single row and multi row layout problem. In the step of inference of layout design, alternatives are generated by constraints-directed reasoning and depth first search method based on artificial intelligence concept. Alternatives are evaluated by the moving cost and relationship value by interactive man-machine interface in the step of evaluation. As a case study, analytical considerations over conventional programs such as CRAFT and CORELAP was investigated and compared with algorithm propsed in this study. The proposed algorithm in this study will give useful practical tool for layout planner. The computer progran was written in C language for IBM PC-AT.

• Archives of design research
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• v.13 no.1
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• pp.131-138
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• 2000

The evaluation of design is one of the most important steps in design process. However, because in most cases, design evaluation has been disregarded in comparison with other steps and has been performed by designer's subjective judgment. there are few studies for the development of systematic methodology. In this study, we developed the method of design evaluation using the fuzzy theory and the multi-criteria dedsion making model. This method consists of two steps. The first step is to obtain relative importance weights of design evaluation criteria, and the second step is to obtain and integrate scores for design evaluation criteria. AHP(analytic hierarchy process) and fuzzy theory were applied to the first and the second step, respectively. We applied the developed method to the sensible evaluation of cellular phone design. As the result, we verified that the developed method could be effectively used in the evaluation of product design.

• Geomechanics and Engineering
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• v.28 no.6
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• pp.573-584
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• 2022

Water inrush may occur during seaside urban tunnel excavation. Various factors affect the water inrush, and the water inrush mechanism is complex. In this study, nine evaluation indices having potential effects on water inrush were analysed. Specifically, the geographic and geomorphic conditions, unfavourable geology, distance from the tunnel to sea, strength of the surrounding rock, groundwater level, tidal action, cyclical footage, grouting pressure, and grouting reinforced region were analysed. Furthermore, a two-step interval risk assessment method for water inrush management during seaside urban tunnel excavation was developed by a multi-index system and interval risk assessment comprised of an interval analytic hierarchy process, fuzzy comprehensive evaluation, and relative superiority analysis. The novel assessment method was applied to the Haicang Tunnel successfully. A preliminary interval risk assessment method for water inrush was performed based on engineering geological conditions. As a result, the risk level fell into a risk level IV, which represents a section with high risk. Subsequently, a secondary interval risk assessment method was performed based on engineering geological conditions and construction conditions. The risk level of water inrush is reduced to a risk level II. The results agreed with the current tunnel situation, which verified the reliability of this approach.

• Journal of the Korean Society of Marine Environment & Safety
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• v.26 no.3
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• pp.254-261
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• 2020

Welding is the most convenient method for fabricating steel materials to build ships and of shore structures. However, welding using high heat processes inevitably produces welding displacements on welded structures. To mitigate these, heavy industries introduce various welding techniques such as back-step welding and skip-step welding. These techniques effect on the change of the distribution of high heat on welded structures, leading to a reduction of welding displacements. In the present study, various cases using different and newly introduced welding techniques are numerically simulated to ascertain the most efficient technique to minimize welding displacements. A numerical simulation using a finite element method based on the inherent strain, interface element and multi-point constraint function is introduced herein. Based on several simulation results, the optimal welding technique for minimizing welding displacements to build a general ship grillage structure is finally proposed.

• Proceedings of the IEEK Conference
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• 2001.06a
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• pp.69-72
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• 2001

Blind equalization of transmission channel is important in communication areas and signal processing applications because it does not need training sequence, nor does it require a priori channel information. Recently, Tong et al. proposed solutions for this problem exploit the diversity induced by antenna array or time oversampling, leading to the second order statistics techniques, fur example, subspace method, prediction error method, and so on. The linear prediction error method is perhaps the most attractive in practice due to the insensitive to blind equalizer length mismatch as well as for its simple adaptive filter implementation. Unfortunately, the previous one-step prediction error method is known to be limited in arbitrary delay. In this paper, we induce the optimal delay, and propose the adaptive blind equalizer with multi-step linear prediction using RLS-type algorithm. Simulation results are presented to demonstrate the proposed algorithm and to compare it with existing algorithms.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.49-50
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• 2006

Photoelasticity is widely and conveniently used methods for whole field stress analysis. In this paper, 8-step photoelastic phase shifting method was performed by using a multi-purpose polariscope to measure the fringe orders along a specified line on the specimen containing a square hole. The material of the specimen is made of Polycarbonate. The measurement results by 8-step phase shifting method were compared with the those calculated by ABAQUS.

• Applied Science and Convergence Technology
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• v.25 no.5
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• pp.92-97
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• 2016

Surface erosion using focused ion beam irradiation is the most promising technology for the realization of micro/nanofabrication. However, accurate fabrication of predefined structures is still challenging. This article introduces a single step surface driving method to fabricated predefined curved structures. The previously reported multi step surface driving method (MSDM) has been modified so that a single ion dose profile can be used instead of multiple ion dose profiles. Experimental realization of the method is presented with the fabrication of predefined curved surfaces as well as reference to surface propagation theory. For the purpose of verification, simulations are performed on the basis of a sound mathematical model.