Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
권호 표지
DOI QR코드

DOI QR Code

Practical Surface Sculpting Method for the Fabrication of Predefined Curved Structures using Focused Ion Beam

  • Kim, Heung-Bae (Department of Mechanical Engineering, Myongji College)
  • Received : 2016.07.12
  • Accepted : 2016.08.09
  • Published : 2016.09.30
Download PDF
⟨ Previous Next ⟩

Abstract

Surface erosion using focused ion beam irradiation is the most promising technology for the realization of micro/nanofabrication. However, accurate fabrication of predefined structures is still challenging. This article introduces a single step surface driving method to fabricated predefined curved structures. The previously reported multi step surface driving method (MSDM) has been modified so that a single ion dose profile can be used instead of multiple ion dose profiles. Experimental realization of the method is presented with the fabrication of predefined curved surfaces as well as reference to surface propagation theory. For the purpose of verification, simulations are performed on the basis of a sound mathematical model.

Keywords

References

  1. R. D. Purdr. Appl. Optics 3, 167 (1994).
  2. V. Kudryashov, X. C. Yuan, W. C. Cheong, and K. Radhakrishnan, Microelectron. Eng. 67, 306 (2003).
  3. S. Maruo, O. Nakamura, and S. Kawata, Opt. Lett. 22, 132 (1997). https://doi.org/10.1364/OL.22.000132
  4. V. A. Kudryashov and S. Lee, Microelectron. Eng. 57, 819 (2001).
  5. K. K. Seet, V. Mizeikis, S. Juodkazis, and H. Misawa. J. Non-Cryst. Solid. 352, 2390 (2006). https://doi.org/10.1016/j.jnoncrysol.2006.02.079
  6. D. Resnick, S. V. Sreenivasan, and C. G. Willson, Material Today 8, 34 (2005).
  7. C. M. Waits, A. Modafe, R. Ghodssi, and J. Micromech. Microeng. 13, 170 (2003). https://doi.org/10.1088/0960-1317/13/2/302
  8. J. Pietarinen, S. Siitonen, N. Tossavainen, J. Laukkanen, and M. Kuittinen, Microelectron. Eng. 83, 492 (2006). https://doi.org/10.1016/j.mee.2005.11.015
  9. C. Ochiai, O. Yavas, M. Takai, A. Hosono, and S. Okuda, J. Vac. Sci. Technol. B 19, 933 (2001). https://doi.org/10.1116/1.1349205
  10. Y. Fu and N. K. A. Bryan, J. Vac. Sci. Technol. B 22, 1672 (2004). https://doi.org/10.1116/1.1761460
  11. Y. Fu and N. K. A. Bryan, IEEE T. Semiconduct M. 15, 229 (2002). https://doi.org/10.1109/66.999597
  12. D. P. Adams and M. J. Vasile, J. Vac. Sci. Technol. B 24, 836 (2006). https://doi.org/10.1116/1.2184325
  13. D. P. Adams, M. J. Vasile, and T. M. Mayer, J. Vac. Sci. Technol. B 24, 1766 (2006). https://doi.org/10.1116/1.2210000
  14. H. B. Kim, G. Hobler, A Steiger, A Lugstein, and E. Bertagonolli, Opt. Express 15, 9444 (2007). https://doi.org/10.1364/OE.15.009444
  15. H. B. Kim, Microelectron. Eng. 88, 3365 (2011). https://doi.org/10.1016/j.mee.2011.07.008
  16. H. B. Kim, Microelectron. Eng. 91, 14 (2012). https://doi.org/10.1016/j.mee.2011.11.015
  17. N. Matsunami, Y. Yamamura, Y. Itakawa, N. Itoh, Y. Kazumata, K. Miyagawa, K. Morita, and R. Shimizu. Nagoya University, IPPJAM-14. (1980).
  18. R. Smith, S. J. Wilde, G. Carter, I. V. Katardjiev, and N. J. Nobes, J. Vac. Sci. Technol. B 5, 579 (1986).
  19. I. V. Katardjiev, J. Vac. Sci. Technol. A 6, 2434 (1988). https://doi.org/10.1116/1.575569
  20. I. V. Katardjiev, J. Vac. Sci. Technol. A 7, 3222 (1989). https://doi.org/10.1116/1.576340
  21. I. V. Katardjiev, G. Carter, M. J. Nobes, S. Berg, and H. O. Blom, J. Vac. Sci. Technol. A 12, 61 (1993).
  22. Solid works Manual http://www.solidworks.com. Dassault system (2008).
  23. Wikipedia, http://en.wikipedia.org/wiki/STL_(file_format)
  24. S. Cabrini, C. Liberale, D. Cojoc, A. Carpentiero, M. Prasciolu, S. Mora, V. Degiorgio, F. Angelis, and E. D. Fabrizio, Microelectron. Eng. 83, 804 (2006). https://doi.org/10.1016/j.mee.2006.01.247
  25. H. B. Kim, G. Hobler, A. Lugstein, E. Bertagonolli, and J. Micromech. Microeng. 17 1178 (2007). https://doi.org/10.1088/0960-1317/17/6/011
  26. H. B. Kim, G. Hobler, A. Steiger, A. Lugstein, and E. Bertagonolli, Nanotechnology 18, 245303 (2007). https://doi.org/10.1088/0957-4484/18/24/245303
  27. H. B. Kim, G. Hobler, A Steiger, A Lugstein, and E. Bertagonolli, Nanotechnology 18, 265307 (2007). https://doi.org/10.1088/0957-4484/18/26/265307
  28. S. Lee and D. -G. Kim, Applied Science and Convergence Technology, 24, 162 (2015). https://doi.org/10.5757/ASCT.2015.24.5.162
  29. E. B. Cho, H. M. Kwon, H. S. Lee, and J.-S. Yeo, J. Kor. Vac. Soc. 22, 262 (2013). https://doi.org/10.5757/JKVS.2013.22.5.262