• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.9 no.1
• /
• pp.38-44
• /
• 2000

The background of this study lies in he investigation of the formation mechanism of ductile mode(nkanometer-size) chips of brittle materials such as fine ceramics glass and silicon. As the first step to achieve this purpose this paper intends to observe the micro-deformation behavior of these materials in sub${\mu}{\textrm}{m}$ depth indentation tests using a diamond indentor. In this study it was developed Ultra-Micro Indentation. Device using the PZT actuator. Experimentally by using the Ultra-Micro Indentation device the micro fracture behavior of the silicon wafer was investigated. It was possible that ductile-brittle transition point in ultimate surface of brittle material can be detected by adding an acoustic emission sensor system to the Ultra-Micro Indentation appartus.

• The Journal of Korea Robotics Society
• /
• v.2 no.1
• /
• pp.64-70
• /
• 2007

In this paper, a robotic system which consists of a precision manipulator and a micro gripper for a micro system assembly is presented. By the experiment, we proved that the developed the system gives acceptable performance when minute operations. Developed the micro-nano robot is actuated by newly proposed modular revolute and prismatic actuators. As an end-effector of this system, micro gripper is designed and fabricated with MEMS technology and the displacement of jaw is up to 142.8 micro meter. We think that new robot system will be appropriate for micro system assembly tasks and life science application.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.1907-1910
• /
• 2003

Miniaturized machine tool can be used to produce 3D features based on CNC and PC-NC technology in the micro/meso scale. Wide applications of CNC technology are developed and there are lots of know-hows in the cutting process and their CNC application. It helps micro/meso scale structure to machine components, which can be used directly for practical applications. In the present research, as the machine tool is miniaturized, the manufacturing machine tools costs less when compared to the equipment used in other micromachining technologies. Moreover, with advancement of micro tool technology, the cutting process can be used to produce micro/meso scale parts. In conclusion, the proposed system can reduce the cost by utilizing the current machining technology, and as a result, complex micro/meso parts can be produced efficiently with high productivity.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.1577-1580
• /
• 2003

In the recent years, as the research and the development of micro and precision machinery become active, the interest of micro actuators using SMA(Shape Memory Alloy) has been increased. The dynamic characteristic analysis of SMA is necessary for actuator application and many common researches report the material characteristics of SMA sufficiently. However, the research on dynamic characteristics is very deficient. In this paper, the helical spring are fabricated with NiTi SMA wire of high resistivity. The force, response speed, temperature, and displacement are measured by digital force gauge, infrared thermometer, and laser displacement sensor so that the dynamic characteristics of this SMA is analyzed. Also, bidirectional actuator was fabricated and experimented for its performance.

• Proceedings of the Korean Society For Composite Materials Conference
• /
• 2001.10a
• /
• pp.53-56
• /
• 2001

Piezoelectric Fiber Composites with Interdigitated Electrodes (PFCIDE) were previously introduced as an alternative to monolithic wafers with conventional electrodes for applications of structural actuation. This paper is an investigation into the performance improvement of piezoelectric fiber composite actuators by changing the matrix material and actuator shape. This paper presents a modified micro-electromechanical model and numerical analyses of piezoelectric fiber/piezopolymer matrix composite actuator with interdigitated electrodes (PFPMIDE). Numerical analyses show that the shape of the graphite/epoxy composite plate with the PFPMIDE may be controlled by judicious choice of voltages, piezoelectric fiber angles, and elastic tailoring of the composite plate.

• 제어로봇시스템학회:학술대회논문집
• /
• 2001.10a
• /
• pp.103.2-103
• /
• 2001

In this paper, we discusses compliant actuators those are made of electrostrictive polymer. Electrostrictive polymer actuators(EPAs) are based on the deformation of dielectric elastomer polymer in the presence of an electric field. We address actual design and fabrication method of an actuator using the electrostrictive polymer. We have developed primitive prototypes of the actuator using elastic restoring force. And they actuators have 1 to 3 DOF, 1 DOF actuators are simple linear actuators and 3 DOF actuator has linear actuation and steering capability. They are simple in structure with lightweight, high trust, force and large stroke. Basic design principles and experimental procedures for confirming their performance will be introduced.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2001.11a
• /
• pp.371-375
• /
• 2001

The concept of a new linear motor that uses piezo-stack actuator is demonstrated. The working principle is far different from the conventional inchworm motor. This motor is based on the self-moving cell concept. The linear motor has three cells and each cell is constructed with one piezo-stack actuator and a shell structure. A cell train is constructed by connecting these cells and the cell train is fitted into a guide way with a proper interference. The cell train moves along the guide way, by activating each cell in succession. The moving motion of the motor is tested. Since this linear motor uses piezo-stack actuator with unified clamping cell, it can produce fast speed, high resolution and large push force.

• Journal of the Korean Society for Precision Engineering
• /
• v.18 no.3
• /
• pp.115-121
• /
• 2001

In micro automation technology, the concurrent realization of a high resolution and a large operating rage has been achieved by a dual actuator, usually called by piggy-back system, conventionally. But, because of its manufacturing cost, the complexity of control, and the limit of overall bandwidth, the contract-free and single servo actuators have been suggested with specific applications. In this paper, we suggest a novel non-contact surface actuator suing combination of the Lorentz force and the magnetized force, and discuss the actuating principles including an analytical approach. Differently from the existing planar system, an operating range of the suggested system can be expanded by an additional attachment of active elements. Therefore, it is estimated to be suitable for the next-generation moving system.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.18 no.2
• /
• pp.137-143
• /
• 2009

This paper presents the fabrication of inchworm motor for high precision actuator system of large displacement and high force. The inchworm motor consists of a extend actuator that provides displacement of tool guide and two clamping actuators which provide the holding force. In order to avoid the PZT fracture, design of pre-load housing was conducted by flexure hinge structure, because PZT actuator has low tensile and shear. To design the pre-load housing and optimize the clamping mechanism, the static and dynamic analysis were conducted by finite element method. From these results, a prototype of the inchworm motor was fabricated and dynamic characteristic with respect to the various frequency was tested. The maximum velocity of the inchworm motor was $41.1{\mu}m/s$ at 16Hz.

• Journal of Sensor Science and Technology
• /
• v.15 no.1
• /
• pp.47-52
• /
• 2006

This paper describes the design, fabrication and characteristics of a buckling microvalve using a MCA (multilayer ceramic actuator). The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed microvalve using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a small piezoelectric actuator. The flow rate of the fabricated MCA valve was 0-8.13 ml/min at the applied pressure of 0-50 kPa. Maximum non-linearity was 2.24 % FS at a duty cycle of 50 %. The maximum pressure was 230 kPa and the leak rate was $3.03{\times}10^{-8}\;Pa{\cdot}m^{3}/cm^{2}$ at a supply voltage of 100 V.