Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Development of High Precision Actuator for Micro Press System by Inchworm Motor

인치웜모터를 이용한 마이크로 프레스용 고정밀 구동기의 개발

  • 최종필 (강원대학교 기계메카트로닉스공학과 대학원) ;
  • 남권선 (강원대학교 기계메카트로닉스공학과 대학원) ;
  • 이해진 (한국생산기술연구원 디지털 성형공정팀) ;
  • 이낙규 (한국생산기술연구원 디지털 성형공정팀) ;
  • 김병희 (강원대학교 기계메카트로닉스공학부)
  • Published : 2009.04.15
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Abstract

This paper presents the fabrication of inchworm motor for high precision actuator system of large displacement and high force. The inchworm motor consists of a extend actuator that provides displacement of tool guide and two clamping actuators which provide the holding force. In order to avoid the PZT fracture, design of pre-load housing was conducted by flexure hinge structure, because PZT actuator has low tensile and shear. To design the pre-load housing and optimize the clamping mechanism, the static and dynamic analysis were conducted by finite element method. From these results, a prototype of the inchworm motor was fabricated and dynamic characteristic with respect to the various frequency was tested. The maximum velocity of the inchworm motor was $41.1{\mu}m/s$ at 16Hz.

Keywords

References

  1. Kussul, E., Baidyk, T., Ruiz-Huerta, L., Caballero-Ruiz, A., Velasco1, G., and Kasatkina, L., 2002, "Development of Micromachine Tool Prototypes for Microfactories," Journal of Micromechnics and Microengineering, Vol. 12, pp. 795-812. https://doi.org/10.1088/0960-1317/12/6/311
  2. Jeong, S. J., Kim, G. H., Cha, K. R., Lee, K. H., and Song, S., 2006, "A Study on the Motion Mechanism of Multi-Axis Ultra Precision Stage for Optical Element Alignment," Transactions of KSMTE, Vol. 15, pp. 8-16.
  3. Cady, W. G., 1964, Piezoelectricity, McGraw-Hill, New York
  4. Haertling, G., 1999, "Ferroelectric ceramics: History and technology," Journal of the American Ceramic Society, Vol. 82, pp. 797-818. https://doi.org/10.1111/j.1151-2916.1999.tb01840.x
  5. Lim, J. H., Shon, J. H., Kim, J. J., Park, B. O.. and Cho, S. H., 1995, "Variations of Piezoelectric Properties and Compressive Strength of PZT Ceramics with Poling Directions," Journal of the Korean Ceramic Society, Vol. 32, pp. 1131-1138.
  6. Liu, Y. T., Fung, R. F.. and Huang, T. K., 2004, "Dynamic Responses of a Precision Positioning Table Impacted by a Soft-mounted Piezoelectric Actuator," Precision Engineering, Vol. 28, pp. 252-260. https://doi.org/10.1016/j.precisioneng.2003.10.005
  7. Adriaens, H. J. M. T. A., Koning, W. L., and Banning, R., 2000, "Modeling Piezoelectric Actuators," IEEE/ASME Transactions on Mechatronics, Vol. 5, pp. 331-341. https://doi.org/10.1109/3516.891044
  8. Park, J., Keller, S., Carman, G. P., and Hahn, H. T., 2001, "Development of a Compact Displacement Accumulation Actuator Device for both Large Force and Large Displacement," Sensors and Actuators, A 90, pp. 191-202.
  9. Vorndran, S., 2001, MicroPosioning Nanopositioning NanoAutomation, Physik Instrumente (PI) GmbH, Germany.