A Study on the Driving Principles of a Novel Non-contact Surface Actuator Using Combination of Magnetic Force

비접촉 평면 구동기의 자기력 조합 방식 구동 원리

  • Jung, Kwang-Suk (Dept.of Mechanical Engineering, Graduate School of Yonsei University) ;
  • Baek, Yoon-Su (Dept.of Mechanical Electronics Engineering, Yonsei University)
  • 정광석 (연세대학교 기계공학과 대학원) ;
  • 백윤수 (연세대학교 기계전자공학부)
  • Published : 2001.03.01

Abstract

In micro automation technology, the concurrent realization of a high resolution and a large operating rage has been achieved by a dual actuator, usually called by piggy-back system, conventionally. But, because of its manufacturing cost, the complexity of control, and the limit of overall bandwidth, the contract-free and single servo actuators have been suggested with specific applications. In this paper, we suggest a novel non-contact surface actuator suing combination of the Lorentz force and the magnetized force, and discuss the actuating principles including an analytical approach. Differently from the existing planar system, an operating range of the suggested system can be expanded by an additional attachment of active elements. Therefore, it is estimated to be suitable for the next-generation moving system.

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