Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Fabrication of a buckling micro MCA valve

버클링 마이크로 적층형 압전밸브의 제작

  • 이종화 (울산대학교 전기전자정보시스템공학부) ;
  • 정귀상 (울산대학교 전기전자정보시스템공학부)
  • Published : 2006.01.31
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Abstract

This paper describes the design, fabrication and characteristics of a buckling microvalve using a MCA (multilayer ceramic actuator). The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed microvalve using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a small piezoelectric actuator. The flow rate of the fabricated MCA valve was 0-8.13 ml/min at the applied pressure of 0-50 kPa. Maximum non-linearity was 2.24 % FS at a duty cycle of 50 %. The maximum pressure was 230 kPa and the leak rate was $3.03{\times}10^{-8}\;Pa{\cdot}m^{3}/cm^{2}$ at a supply voltage of 100 V.

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References

  1. N. T, Nguyen, S. Schuber, S. Richter, and W. Dotzel 'Hybrid-assembled micro dosing system using silicon-based micropump and mass flow sensor', Sensors & Actuators, vol. A 69, pp. 85-91, 1998
  2. M. Stehr, S. Messner, H. Sandmaier, and R. Zengerle, 'The VAMP - a new device for handling liquids or gases', Sensors & Actuators, vol. A 57, pp. 153-157, 1996
  3. P. Muralt, 'PZT Thin films for microsensors and actuators: where do we stand?', IEEE Tran. on Ultrasonics, Ferroelectronics, & Frequency Control, vol. 47, no. 4, pp. 903-915, 2000 https://doi.org/10.1109/58.852073
  4. G. S. Chung, J. M. Kim. S. J. Yoon, S. J. Jeong, and J. S. Song, 'Deign, fabrication and characteristics of a MCA valve', J. of the Korean Sensors Soc., vol. 13, no. 3, pp. 230-235, 2004 https://doi.org/10.5369/JSST.2004.13.3.230
  5. W. Schomburg and C. Coll, 'Design optimization of bistable micro-diaphragm valves', Sensors & Actuators, vol. A 64, pp. 259-263, 1998
  6. I. Chakraborty, W. Tang, D. Bame, and T. Tang, 'MEMS micro-valve for space applications', Sensors & Actuators, vol. A 83, pp. 188-192, 2000
  7. J. Ulrich and R. Zengerle, 'Static and dynamic flow simulation of a KOH-etched micro-valve using the finite- element method', Sensors & Actuators, vol. A 53, pp. 379-385, 1996
  8. X. Yang, 'A MEMS valve for the MIT microengine', A Master's Thesis of UC Berkeley, pp. 79-81, 2001
  9. G. S. Chung and J. M. Kim, 'Anodic bonding characteristics of MLCA/Si-wafer using a sputtered Pyrex #7740 glass layer for MEMS applications', Sensors & Actuators A, vol. 116, pp. 352-356, 2004 https://doi.org/10.1016/j.sna.2004.04.029
  10. S. Weichel, R. Rous, and M. Rindahl, 'Silicon-to-silicon wafer bonding using evaporated glass', Sensors & Actuators, vol. A 70, pp. 179-184, 1998
  11. 신정철, 양우정, 기초 유체역학, 구민사, pp. 250-254, 2000