• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.844-847
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• 2001

The application of laser direct etching has been discussed, and believed that the process is a very powerful method for micro machining. This study is focused on the micro patterning technology using laser direct etching process with no chemical damage of the material surface. A new introduced concept of energy synergy effect for surface micro machining is the combination of chemically ion reaction and laser thermal process. The etchant can't etch the material in room temperature, and used Ar laser has not power enough to machine. But, the machining is occurred in local area of the material by the combined energy. Using this process, the material is especially prevented from chemical damage for electric property. We have tested this new concept, and achieved a line with $1{mu}m$ width. The Ar laser with 488nm wavelength was used. The material was Si(100) wafer, and etchant is KOH solution. The application and flexibility of this process is in great hopes for MEMS structures and fabrication of the micro electric device parts.

• Laser Solutions
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• v.11 no.3
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• pp.1-4
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• 2008

A selective laser micro bonding process using liquid glass (methylsilsesquioxane) was developed and the results are analysed. The liquid glass can be solidified with Nd:YAG laser irradiation and it can be applied for joining two glass substrates. A bonding thickness of a few micrometers can be achieved. The appropriate laser power density (or this process is around 40-60 $kW/cm^2$ and its bonding force is 1000-1200 $gf/mm^2$. This process can be applied for bonding micro devices such as micro bio-sensors or display products. Its advantages and limitations are presented and discussed.

• Journal of Mechanical Science and Technology
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• v.20 no.5
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• pp.668-674
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• 2006

In order to develop a cell based robot, we present a micro-mechanical force measurement system for the biological muscle actuators, which utilize glucose as a power source. The proposed measurement system is composed of a micro-manipulator, a force transducer with a glass probe, a signal processor, an inverted microscope and video recording system. Using this measurement system, the contractile force and frequency of the cardiac myocytes were measured in real time and the magnitudes of the contractile force of each cardiac myocyte under different conditions were compared. From the quantitative experimental results, we could estimate that the force of cardiac myocytes is about $20\sim40{\mu}N$, and show that there are differences between the control cells and the micro-patterned cells.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2001.05a
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• pp.321-324
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• 2001

The metal-oxide-semiconductor field-effect transistor(MOSFET) has undergone many changes in the last decade in response to the constant demand for increased speed, decreased power, and increased packing density. This paper has compared Micro-Tec with ISE-TCAD. This paper investigates LDD MOSFET using two simulators. Bias condition is applied to the devices with gate lengths 180nm. We have presented MOSF ET's characteristics such as I-V characteristic, electric field. and compared with Micro-Tec and ISE-TCAD.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.108-112
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• 2000

This paper presents a mathematical model and simulation of the micro-actuator based on thermally induced liquid-vapor phase-change in a partially-filled closed cavity. The volume expansion by liquid-vapor Phase change can generate considerable forces and displacement $({\sim}50{\mu}m)$ required for commercial use. For optimum operation involving many cycles within the closed chamber, active(thermoelectric) heating and cooling is used. The optimization of the system is conducted according to the parameters such as input power and response time. The optimized performance of micro-actuator is reasonable compared to other actuators.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.11a
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• pp.358-361
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• 1999

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD\`s and micro-heater on the Si substrate, in which MgO thin-films were used as medium layer in order to improve adhesion of Pt thin-films to SiO$_2$ layer The MgO layer improved adhesion of Pt thin-films to SiO$_2$` layer without any chemical reactions to Pt thin-films under high as gas flow rate and its conductivity increased due to increase of heat-loss from sensor to external. Output voltage was 82 mV at N2 flow rate of 2000 sccm/min, heating power of 1.2W. The respons time was about 100 msec when input flow was step-input

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.2
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• pp.211-218
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• 2002

It has been investigated for the temperature profile in a planar evaporator of micro-cooler subject to a uniform heat flux prior to tole initiation of boiling. The results of the analysis allow for the determination of applied power levels fur which nucleation is likely to occur only within the vapor grooves of the evaporator while maintaining subcooling in the liquid core, thereby increasing the likelihood of a successful startup. Also, limits are fecund for which additional increases in the applied heat flux do not increase the temperature difference between the vapor grooves and the wick-liquid core interface. This analysis is appropriate for the microscale evaporators of micro-cooler during a fully-flooded startup as well as starter pump designs and micro-CPLs(capillary pumped loops). The results are useful in the initial basic design of microscale heat transfer devices.

• Journal of Biomedical Engineering Research
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• v.14 no.2
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• pp.147-153
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• 1993

In this paper, we studied about the micro pressure transmission system using fluid. For the investigation of feasibility of microhydraulic system, the hydraulic characteristics were examined by using the capillary tube system and the micro cylinder system that consists of a rod and a micro capillary tube. A new hydraulic micro actuator using magnetic fluid and an external magnetic field was also investigated. The results showed that our microhydraulic system has the possibility of power transmission in arbitrary directions.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.64.2-64
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• 2001

In this paper, fabricated is a motion capture and attitude detection system for Head Mounted Display HMD composed of three low-price and low-grade micro gyroscopes and a micro-controller, To calculate attitude of a body, modified INS algorithm is used. Because the micro gyroscope has much bias drift error, scale factor error, and run-to-run bias error, the motion of a body can not be measured exactly if the general INS algorithm and micro gyroscopes are used. To reduce the errors, three accelerometers can be used. In this case, however, the size and power consumption become too large to use in HMD system. The modified INS algorithm use the grid map and the characteristics of the human motions.

• The Journal of the Korea institute of electronic communication sciences
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• v.12 no.6
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• pp.1107-1114
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• 2017

In this paper, a miniaturized distribution line was experimentally made. The smart grid distribution system was modeled by analyzing the distribution system, and a miniaturized micro three phase distribution system recloser was designed. The micro recloser was designed as a sensor part, a main part and a relay part, and the main part was designed to cut off the fault current by determining the fault from the input current based on the DSP. Finally, based on the results of the modeling, the micro three phase power distribution line and the micro three phase recloser were experimentally fabricated, and the basic making technology of the miniaturized micro smart grid was obtained through the making process.