Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

Fabrication of Micro-heaters Using MgO as Medium Layer and It`s Application for Micro-Flowsensors

매개층 산화마그네슘막을 이용한 백금박막 미세발열체의 제작과 마이크로 유량센서에의 응용

  • 홍석우 (동서대학교 정보통신공학부) ;
  • 조정복 (동서대학교 정보시스템공학부) ;
  • 정귀상 (동서대학교 정보통신공학부)
  • Published : 1999.11.01
Download PDF
⟨ Previous Next ⟩

Abstract

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD\`s and micro-heater on the Si substrate, in which MgO thin-films were used as medium layer in order to improve adhesion of Pt thin-films to SiO$_2$ layer The MgO layer improved adhesion of Pt thin-films to SiO$_2$` layer without any chemical reactions to Pt thin-films under high as gas flow rate and its conductivity increased due to increase of heat-loss from sensor to external. Output voltage was 82 mV at N2 flow rate of 2000 sccm/min, heating power of 1.2W. The respons time was about 100 msec when input flow was step-input

Keywords