• Title/Summary/Keyword: Mechanical indicator

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Predicting and Interpreting Quality of CMP Process for Semiconductor Wafers Using Machine Learning (머신러닝을 이용한 반도체 웨이퍼 평탄화 공정품질 예측 및 해석 모형 개발)

  • Ahn, Jeong-Eon;Jung, Jae-Yoon
    • The Journal of Bigdata
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    • v.4 no.2
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    • pp.61-71
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    • 2019
  • Chemical Mechanical Planarization (CMP) process that planarizes semiconductor wafer's surface by polishing is difficult to manage reliably since it is under various chemicals and physical machinery. In CMP process, Material Removal Rate (MRR) is often used for a quality indicator, and it is important to predict MRR in managing CMP process stably. In this study, we introduce prediction models using machine learning techniques of analyzing time-series sensor data collected in CMP process, and the classification models that are used to interpret process quality conditions. In addition, we find meaningful variables affecting process quality and explain process variables' conditions to keep process quality high by analyzing classification result.

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The Detection of the Internal Defect in the Glass Using Auto Focusing Method (자동 초점 기법을 이용한 유리 내부 결함 검출)

  • Jy, Yong-Woo;Jhang, Kyung-Young;Jung, Ji-Hwa;Kim, Suk-Jun
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.28 no.7
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    • pp.1047-1054
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    • 2004
  • Internal defects in the glass, like-as micro-voids, micro-cracks, or inclusions, easily cause the failure when the glass is exposed to the shock or the thermal variation. In order to produce the highly reliable glass product, the precision inspection of the defect in the glass is required. For this purpose, this paper proposes a machine vision technique based on the auto-focusing method, which searches the defect and measures the location under the fact that the edge image of defect must be the most clear when the focal plane of CCD camera is coincided with the defect. As for the search index, the gradient indicator is presented. The basic principles are verified through the simulations for the computer-generated defect images, where the affects of defect shape, gray level of background, and the brightness of the defect image are also analyzed. Finally, experimental results for actual glass specimens are shown to confirm the applicability of this method to the actual field.

Approximate Life Cycle Assessment of Product Concepts Using Multiple Regression Analysis and Artificial Neural Networks

  • Park, Ji-Hyung;Seo, Kwang-Kyu
    • Journal of Mechanical Science and Technology
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    • v.17 no.12
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    • pp.1969-1976
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    • 2003
  • In the early phases of the product life cycle, Life Cycle Assessment (LCA) is recently used to support the decision-making for the product concepts, and the best alternative can be selected based on its estimated LCA and benefits. Both the lack of detailed information and time for a full LCA for a various range of design concepts need a new approach for the environmental analysis. This paper explores a new approximate LCA methodology for the product concepts by grouping products according to their environmental characteristics and by mapping product attributes into environmental impact driver (EID) index. The relationship is statistically verified by exploring the correlation between total impact indicator and energy impact category. Then, a neural network approach is developed to predict an approximate LCA of grouping products in conceptual design. Trained learning algorithms for the known characteristics of existing products will quickly give the result of LCA for newly designed products. The training is generalized by using product attributes for an EID in a group as well as another product attributes for the other EIDs in other groups. The neural network model with back propagation algorithm is used, and the results are compared with those of multiple regression analysis. The proposed approach does not replace the full LCA but it would give some useful guidelines for the design of environmentally conscious products in conceptual design phase.

A Study of Engineering Properties and Deformation Behavior of Weathered Rock Mass (풍화 암반의 공학적 특성 및 변형거동에 관한 연구)

  • 강추원;박현식;김수로
    • Explosives and Blasting
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    • v.22 no.2
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    • pp.33-43
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    • 2004
  • The six grades weathering system is normally used in weathered rock classification. In this study. fresh and weathered rock block of grade I to V were sampled in Jang-soo ana but samples of the grade VI was omitted from this study. The variation quantities of chemical weathering indices with weathering degree are smaller than those of physical and mechanical properties. Increase of Weathering degree is well indicated by physical and mechanical properties such as strength, hardness, ultrasonic velocity and slake durability result. Especially, absorption and porosity ratio is a good indicator. As weathering proceeds. a number of the cracks affect the rock deformation. Therefore, stress-strain curves of weathered rocks in unconfined state are quite different from ones of fresh rocks.

Development of Disposable Enzyme-linked Immunosensor Strip Platform (일회용 스트립형 효소면역센서용 플랫폼의 개발)

  • Choi, Ji-Hye;Yi, Seung-Jae;Chang, Seung-Cheol;Kim, Kyung-Chun
    • Journal of Sensor Science and Technology
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    • v.20 no.6
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    • pp.400-405
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    • 2011
  • This study introduced the development of a strip type disposable enzyme-linked immunosensor platform for the detection of IgG. Strips of the strip sensor were fabricated by using commercial nitrocellulose filter membranes and a housing holder for the strips was manufactured by using a standard injection molding process for a plastic material. An IgG-urease conjugate was prepared and used for the competitive immune-binding with sample IgG. From the enzymatic reaction between the conjugated urease and urea added, ammonia was generated and caused a localized alkaline pH change on the immobilized antibody band which was coated onto the sensor strips. This pH increase subsequently caused a color change of the antibody band in the presence of a pH indicator, phenol red. Used in conjunction with a competitive immunoassay format, the intensity of the color produced is directly linked with the concentration of target analyte, IgG, and specific measurement of IgG in a lateral flow immunoassay format was achieved over the range 100 ppb to 2000 ppb IgG.

Comparison of displacement capacity of reinforced concrete columns with seismic codes

  • Cansiz, Sinan;Aydemir, Cem;Arslan, Guray
    • Advances in concrete construction
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    • v.8 no.4
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    • pp.295-304
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    • 2019
  • The lateral displacement or drift may be the cause of the damage in the reinforced concrete (RC) columns under the seismic load. In many regulations, lateral displacement was limited according to the properties of columns. The design displacement limits may be represented indirectly through the material strain limits and the mechanical properties of columns. EUROCODE-8 and FEMA356 calculate displacement limits by taking into account the mechanical properties of columns. However, Turkey Building Earthquake Code (TBEC) determine displacement limits by taking into account the material strain limits. The aim of this study is to assess the seismic design codes for RC columns through an experimental study. The estimates of seismic design codes have been compared with the experimental results. It is observed that the lateral displacement capacities of columns estimated according to some seismic codes are not in agreement with the experimental results. Also, it is observed that TBEC is conservative in the context of the performance indicator of RC columns, compared to EUROCODE-8 and FEMA356. Moreover, in this study, plastic hinge length and effective stiffness of test elements were investigated.

Effect of Non-Uniform Mixture on Cycle Fluctuation of Multi-Cylinder Spark Ignition Engine(I) (다기통 전기점화기관의 혼합기 불균일화가 사이클 변동에 미치는 영향 (I))

  • 송재학;이용길;박경석;양옥룡
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.16 no.9
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    • pp.1736-1743
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    • 1992
  • The combustion in the cylinder of spark ignition engine is completed after the delayed time that the liquid film fuel is vapourized as flowing into the combustion chamber. It is necessary to enhance the homogeneity of mixture and the combustion phenomenon in order to improve the heat efficiency and the emission characteristics of spark ignition engine. The main purpose of this paper is to manufacture a combustion analyzing system and examine closely the influence of non-uniformity due to the liquid film fuel flowing in the intake manifold on the combustion characteristics by using a 4 stroke multi- cylinder spark ignition engine. Moreover, with each cylinder, the interpretation of combustion characteristics by indicator diagram and the concentration of exhaust gas were investigated.

Analysis of Time Domain Active Sensing Data from CX-100 Wind Turbine Blade Fatigue Tests for Damage Assessment

  • Choi, Mijin;Jung, Hwee Kwon;Taylor, Stuart G.;Farinholt, Kevin M.;Lee, Jung-Ryul;Park, Gyuhae
    • Journal of the Korean Society for Nondestructive Testing
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    • v.36 no.2
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    • pp.93-101
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    • 2016
  • This paper presents the results obtained using time-series-based methods for structural damage assessment. The methods are applied to a wind turbine blade structure subjected to fatigue loads. A 9 m CX-100 (carbon experimental 100 kW) blade is harmonically excited at its first natural frequency to introduce a failure mode. Consequently, a through-thickness fatigue crack is visually identified at 8.5 million cycles. The time domain data from the piezoelectric active-sensing techniques are measured during the fatigue loadings and used to detect incipient damage. The damage-sensitive features, such as the first four moments and a normality indicator, are extracted from the time domain data. Time series autoregressive models with exogenous inputs are also implemented. These features could efficiently detect a fatigue crack and are less sensitive to operational variations than the other methods.

Measurements of Thermal Characteristics for a Micro-Fabricated Thermal Mass Air Flow Sensor With Real-Time Controller (실시간 제어기를 이용한 마이크로 열식 질량공기 유량센서의 열특성 측정)

  • Park, Byung-Kyu;Lee, Joon-Sik
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.33 no.8
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    • pp.573-579
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    • 2009
  • A thermal mass air flow sensor, which consists of a micro-heater and thermal sensors on the silicon-nitride thin membrane structure, is micro-fabricated by MEMS processes. Three thermo-resistive sensors, one for the measurement of microheater temperature, the others for the measurement of membrane temperature upstream and downstream of the micro-heater respectively, are used. The micro-heater is operated under the constant temperature difference mode via a real time controller, based on inlet air temperature. Two design models for microfabricated flow sensor are compared with experimental results and confirmed their applicabilities and limitations. The thermal characteristics are measured to find the best flow indicator. It is found that two normalized temperature indicators can be adopted with some advantages in practice. The flow sensor with this control mode can be adopted for wide capability of high speed and sensitivity in the very low and medium velocity ranges.

An investigation on heat transfer effects of two dimensional plane jet attaching offseted obliqued wall (단이 진 경사벽면에 부착되는 2차원 평면제트의 열전달 효과에 관한 연구)

  • Yun, Sun-Hyeon;Lee, Dae-Hui;Sim, Jae-Gyeong;Song, Heung-Bok
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.21 no.10
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    • pp.1314-1325
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    • 1997
  • Experiments have been conducted to determine the flow and heat transfer characteristics for a two-dimensional turbulent wall attaching offset jet at different oblique angles to a flat surface. The distributions of the wall static pressure coefficient and time-averaged reattachment position for various offset ratios and oblique angles have been measured. The local Nusselt number distributions on the plate surface were also measured using liquid crystal as a temperature indicator. The new hue-capturing technique utilizing a true color image processing system was used to accurately determine the temperature of the liquid crystal. The experiments were carried out at Reynolds number, Re (based on D) of from 7300 to 21,300 with offset ratio, H/D from 2.5 to 10, and oblique angle, .alpha. from 0 deg. to 400 deg..