• Current Optics and Photonics
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• 제1권5호
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• pp.505-513
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• 2017

Measuring the thickness of thin films is strongly required in the display industry. In recent years, as the size of a pattern has become smaller, the substrate has become larger. Consequently, measuring the thickness of the thin film over a wide area with low spatial sampling size has become a key technique of manufacturing-yield management. Interferometry is a well-known metrology technique that offers low spatial sampling size and the ability to measure a wide area; however, there are some limitations in measuring the thickness of the thin film. This paper proposes a method to calculate the thickness of the thin film in the following two steps: first, pre-estimation of the thickness with the phase at the peak position of the interferogram at the bottom surface of the thin film, using white-light phase-shift interferometry; second, accurate correction of the measurement by fitting the interferogram with the theoretical pattern through the estimated thickness. Feasibility and accuracy of the method has been verified by comparing measured values of photoresist pattern samples, manufactured with the halftone display process, to those measured by AFM. As a result, an area of $880{\times}640$ pixels could be measured in 3 seconds, with a measurement error of less than 12%.

• 한국광학회지
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• 제8권1호
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• pp.26-30
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• 1997

서로 수직으로 편광되고 두개의 종모우드로 발진하는 주파수가 안정화된 He-Ne 레이저를 이용하여 넓은 측정 범위를 갖는 헤테로다인 간섭계를 구성하였다. 두 모우드 사이의 맥놀이 주파수인 684MHz에 대한 라디오 주파수 간섭을 이용하여 약 .+-.1.74.mu.m의 분해능으로 광학매질의 광학두께를 측정할 수 있는 장치를 구성하였다. 이와 같은 측정장치를 이용하여 Nd:YAG 레이저의 수동형 Q-스위칭에 포화흡수체로 사용되고 있는 유기염료 박막의 두께와 국부적인 광학두께의 변화에 대한 map을 구할 수 있었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.269-270
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• 2008

• Tribology and Lubricants
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• 제19권3호
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• pp.133-138
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• 2003

The characteristics for bimorph PZT cantilever of laboratory-fabricated have been evaluated experimentally. The deflections of cantilever with PZT are result from a capillary force between a water drop and a tip of cantilever. The output voltage due to deflect cantilever are depend on the tip shape and thickness of cantilever. We applied a bimorph PZT cantilever to oil thickness measurement. This reasonable concept is that the output voltage be caused by different defected characteristics between oil and surface. Experimental results demonstrated that the high measurement accuracy of the oil film thickness is obtained from the probe.

• 한국전문물리치료학회지
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• 제18권4호
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• pp.60-67
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• 2011

Ultrasonography (US) is a recent technique that has proven to be useful for assessing muscle thickness and guiding the rehabilitation decision-making of clinicians and researchers. The purpose of this study was to determine the inter-rater reliability of the US measurement of transversus abdominis (TrA), internal oblique (IO), and external oblique (EO) thicknesses for different probe locations and measurement techniques. Twenty healthy volunteers were recruited in this study. Muscle thicknesses of the transversus TrA, IO, and EO were measured three times in the hook-lying position. The three different probe locations were as follows: 1) Probe location 1 (PL1) was below the rib cage in direct vertical alignment with the anterior superior iliac spine (ASIS). 2) Probe location 2 (PL2) was halfway between the ASIS and the ribcage along the mid-axillary line. 3) Probe location 3 (PL3) was halfway between the iliac crest and the inferior angle of the rib cage, with adjustment to ensure the medial edge of the TrA. The two different techniques of thickness measurement from the captured images were as follows: 1) Muscle thickness was measured in the middle of the muscle belly, which was centered within the captured image (technique A; TA). 2) Muscle thickness was measured along a horizontal reference line located 2 cm apart from the medial edge of the TrA in the captured image (technique B; TB). The intraclass correlation coefficient (ICC [3,k]) was used to calculate the inter-rater reliability of the thickness measurement of TrA, IO and EO using the values from both the first and second examiner. In all three muscles, moderate to excellent reliability was found for all conditions (probe locations and measurement techniques) (ICC=.70~.97). In the PL1-TA condition, inter-rater reliability in the three muscle thicknesses was good to excellent (ICC=.85~.96). The reliability of all measurement conditions was excellent in IO (ICC=.95~.97). Therefore, the findings of this study suggest that TA can be applied to PL1 by clinicians and researchers in order to measure the thickness of abdominal muscles.

• 한국소음진동공학회논문집
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• 제22권12호
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• pp.1250-1256
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• 2012

Resilient materials are used to reduce the floor impact sound in apartment buildings. Since an on-dol layer is installed in the resilient materials' upper part, thickness deformation can be occur in the resilient material. It is necessary to check a thickness deformation grade for a long period of time. In this research, we measured thickness deformation over 400th day to the resilient materials(EPP, EPS, EVA) which is used in Korea. Although there was a difference according to the kind of measurement test specimens, it became clear that thickness was decreases as to time increased. The thickness deformation grade of ten years after was calculated based on the thickness measurement result. Compare with the calculated result and result of ISO 20392. Larger thickness deformation occurred in the measurement result of these research findings compare with the ISO standard.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.78-81
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• 2004

A technical performance of the coating depends greatly on the thickness of painting film or coating film. Therefore the confirmed report of the technique to measure accurately is essential to the coating film thickness for the assessment about a coating quality performance. In this paper, two gap sensors - eddy current gap sensor and capacitance gap sensor - which has a different operating principle were used to measure the thickness of a nonmagnetic substance coating film such as paint, enamel or ceramic that was coated on the metallic material. A capacitance gap sensor was used to measure the distance between the sensor head and a coating film and an eddy current gap sensor to measure the distance between the sensor head and a base metal. Then the thickness of a coating film was obtained by the difference of two measurement value. At this result, the suggested dual sensor can measure an arbitrary film thickness to be coated on a base metal as the measurement value of coating thickness exists accurately within the 2％ error.

• Journal of Information Processing Systems
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• 제1권1호
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• pp.36-40
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• 2005

TRISO (Tri-Isotropic)-coated fuel particle is widely applied due to its higher stability at high temperature and its efficient retention capability for fission products in the HTGR (high temperature gas-cooled reactor), one of the highly efficient Generation IV reactors. The typical ball-type TRISO-coated fuel particle with a diameter of about 1 mm is composed of a nuclear fuel particle as a kernel and of outer coating layers. The coating layers consist of a buffer PyC, inner PyC, SiC, and outer PyC layer. In this study, a digital image processing algorithm is proposed to automatically measure the thickness of the coating layers. An FBP (filtered backprojection) algorithm was applied to reconstruct the CT image using virtual X-ray radiographic images for a simulated TRISO-coated fuel particle. The automatic measurement algorithm was developed to measure the coating thickness for the reconstructed image with noises. The boundary lines were automatically detected, then the coating thickness was circularly by the algorithm. The simulation result showed that the measurement error rate was less than 1.4%.

• Nuclear Engineering and Technology
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• 제52권9호
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• pp.2119-2129
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• 2020

Flow-accelerated corrosion (FAC), liquid droplet impingement erosion (LDIE), cavitation and flashing can cause continuous wall-thinning in nuclear secondary pipes. In order to prevent pipe rupture events resulting from the wall-thinning, most NPPs (nuclear power plants) implement their management programs, which include periodic thickness inspection using UT (ultrasonic test). Meanwhile, it is well known in field experiences that the thickness measurement errors (or deviations) are often comparable with the amount of thickness reduction. Because of these errors, it is difficult to estimate wall-thinning exactly whether the significant thinning has occurred in the inspected components or not. In the previous study, the authors presented an approximate estimation procedure as the first step for thickness measurement deviations at each inspected component and the statistical & quantitative characteristics of the measurement deviations using plant experience data. In this study, statistical significance was quantified for the current methods used for wall-thinning determination. Also, the authors proposed new estimation procedures for determining local wall-thinning to overcome the weakness of the current methods, in which the proposed procedure is based on analysis of variance (ANOVA) method using subgrouping of measured thinning values at all measurement grids. The new procedures were also quantified for their statistical significance. As the results, it is confirmed that the new methods have better estimation confidence than the methods having used until now.

• 비파괴검사학회지
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• 제19권5호
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• pp.363-368
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• 1999

시험체의 두께나 초음파 속도를 측정하기 위해서 초음파 펄스-에코법이 널리 사용되고 있다. 초음파 속도를 결정하기 위해서는 초음파 송수신 장치를 포함한 오실로스코우프와 같은 초음파 측정 장치를 사용하여 시험편에서의 초음파진행 시간을 측정하고, 초음파 진행 거리에 해당하는 시험편의 두께를 버어니어 캘리퍼스 또는 마이크로미터와 같은 길이측정 도구를 사용하여 측정한다. 그리고 초음파를 이용하여 시험편의 두께를 측정할 때에는 초음파 속도를 알고 있는 대비 시험편으로 기준을 설정하여야 한다. 본 연구에서는, 대비 시험편 없이 재료의 두께와 초음파 속도를 동시에 구하는 방법을 제시하였다. 재질과 두께를 달리한 여러 시험편에서 측정된 초음파 속도와 두께가 기존의 방법에 의해 측정한 값과 잘 일치하였다.